JPS5776873A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5776873A
JPS5776873A JP55152595A JP15259580A JPS5776873A JP S5776873 A JPS5776873 A JP S5776873A JP 55152595 A JP55152595 A JP 55152595A JP 15259580 A JP15259580 A JP 15259580A JP S5776873 A JPS5776873 A JP S5776873A
Authority
JP
Japan
Prior art keywords
silicon
film
mask
oxide film
covered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55152595A
Other languages
English (en)
Inventor
Hiroyasu Azuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55152595A priority Critical patent/JPS5776873A/ja
Publication of JPS5776873A publication Critical patent/JPS5776873A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials

Landscapes

  • Bipolar Transistors (AREA)
JP55152595A 1980-10-30 1980-10-30 Manufacture of semiconductor device Pending JPS5776873A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55152595A JPS5776873A (en) 1980-10-30 1980-10-30 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55152595A JPS5776873A (en) 1980-10-30 1980-10-30 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5776873A true JPS5776873A (en) 1982-05-14

Family

ID=15543861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55152595A Pending JPS5776873A (en) 1980-10-30 1980-10-30 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5776873A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59149055A (ja) * 1983-02-12 1984-08-25 アイテイ−テイ−・インダストリ−ズ・インコ−ポレ−テツド バイポ−ラプレ−ナトランジスタの製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59149055A (ja) * 1983-02-12 1984-08-25 アイテイ−テイ−・インダストリ−ズ・インコ−ポレ−テツド バイポ−ラプレ−ナトランジスタの製造方法

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