JPS5777907A - Surface flaw detector - Google Patents

Surface flaw detector

Info

Publication number
JPS5777907A
JPS5777907A JP15420280A JP15420280A JPS5777907A JP S5777907 A JPS5777907 A JP S5777907A JP 15420280 A JP15420280 A JP 15420280A JP 15420280 A JP15420280 A JP 15420280A JP S5777907 A JPS5777907 A JP S5777907A
Authority
JP
Japan
Prior art keywords
signal
test object
normal
natural number
flaw area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15420280A
Other languages
Japanese (ja)
Other versions
JPH0121883B2 (en
Inventor
Kenji Shiroshita
Hiroshi Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15420280A priority Critical patent/JPS5777907A/en
Publication of JPS5777907A publication Critical patent/JPS5777907A/en
Publication of JPH0121883B2 publication Critical patent/JPH0121883B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/28—Measuring arrangements characterised by the use of optical techniques for measuring areas
    • G01B11/285—Measuring arrangements characterised by the use of optical techniques for measuring areas using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To reduce the calculation time of flaw area by determining a frequency distribution in scanning of a laser beam over the surface of a test object with respect to the count of the normal surface obtained from each scanning based on detection signals of the reflected beam. CONSTITUTION:A laser beam scans over the surface of a test object and reflected beam signals 9 are converted into normal surface discrimination signal 14 via a nomal surface discrinimation circuit 19. This signal is imputted into an AND gate 18 with a inspection area signal 16 and a clock pulse 17 and applied to a counting circuit 20 as normal surfac pulse 19. A normal surface counted value 21 is inputted into a CPU23 with a counting end signal 22 to determine a frequency distribution through a memory device 25. Based on the result, a flaw area D is calculated by computing D=ASIGMA(K=1,h)K [NL-K], where NL is proper length of the test object, K natural number, and h natural number of maximum value NL. This can reduce the calculation time of the flaw area.
JP15420280A 1980-10-31 1980-10-31 Surface flaw detector Granted JPS5777907A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15420280A JPS5777907A (en) 1980-10-31 1980-10-31 Surface flaw detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15420280A JPS5777907A (en) 1980-10-31 1980-10-31 Surface flaw detector

Publications (2)

Publication Number Publication Date
JPS5777907A true JPS5777907A (en) 1982-05-15
JPH0121883B2 JPH0121883B2 (en) 1989-04-24

Family

ID=15579067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15420280A Granted JPS5777907A (en) 1980-10-31 1980-10-31 Surface flaw detector

Country Status (1)

Country Link
JP (1) JPS5777907A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01143945A (en) * 1987-11-30 1989-06-06 Fuji Photo Film Co Ltd Detecting method for defect in tape

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379593A (en) * 1976-12-24 1978-07-14 Hitachi Ltd Surface inspecting method of objects and apparatus for the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5379593A (en) * 1976-12-24 1978-07-14 Hitachi Ltd Surface inspecting method of objects and apparatus for the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01143945A (en) * 1987-11-30 1989-06-06 Fuji Photo Film Co Ltd Detecting method for defect in tape

Also Published As

Publication number Publication date
JPH0121883B2 (en) 1989-04-24

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