JPS5778757A - Field discharge type electron gun - Google Patents

Field discharge type electron gun

Info

Publication number
JPS5778757A
JPS5778757A JP55153622A JP15362280A JPS5778757A JP S5778757 A JPS5778757 A JP S5778757A JP 55153622 A JP55153622 A JP 55153622A JP 15362280 A JP15362280 A JP 15362280A JP S5778757 A JPS5778757 A JP S5778757A
Authority
JP
Japan
Prior art keywords
emitter
power source
control electrode
contamination
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55153622A
Other languages
Japanese (ja)
Other versions
JPS6211451B2 (en
Inventor
Shuichi Saito
Junichi Ooyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP55153622A priority Critical patent/JPS5778757A/en
Publication of JPS5778757A publication Critical patent/JPS5778757A/en
Publication of JPS6211451B2 publication Critical patent/JPS6211451B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To reduce the frequency of flashing by compensating the lowering of the emission due to the contamination of the emitter face such that the control electrode potential is brought near to the anode potential while the accelertion voltage is increased. CONSTITUTION:An acceleration power source 4 between an anode 3 and an emitter 1 and a bias power source 5 between the emitter 1 and a control electrode 2 are controlled through drive circuits 12, 14 by detecting the emission current through a resistor 6 then comparing with the referential power source 10 by means of differential amplifiers 7, 8. At first switches 11, 13 are turned to the side (a) to set the acceleration voltage and when the emission current reaches to 80% of the setting level they are switched by a coincidence circuit 9 to transfer to the stabilization due to the control electrode potential control. Consequently the acceleration voltage can be increased accordingly even if the contamination on the emitter surface is promoted thereby it can be started continuously under high efficiency.
JP55153622A 1980-10-31 1980-10-31 Field discharge type electron gun Granted JPS5778757A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55153622A JPS5778757A (en) 1980-10-31 1980-10-31 Field discharge type electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55153622A JPS5778757A (en) 1980-10-31 1980-10-31 Field discharge type electron gun

Publications (2)

Publication Number Publication Date
JPS5778757A true JPS5778757A (en) 1982-05-17
JPS6211451B2 JPS6211451B2 (en) 1987-03-12

Family

ID=15566509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55153622A Granted JPS5778757A (en) 1980-10-31 1980-10-31 Field discharge type electron gun

Country Status (1)

Country Link
JP (1) JPS5778757A (en)

Also Published As

Publication number Publication date
JPS6211451B2 (en) 1987-03-12

Similar Documents

Publication Publication Date Title
JPS57187849A (en) Electron gun
EP0316523A3 (en) Control for sputtering according to the magnetron principle
JPS56121363A (en) Gate circuit for thyristor
JPS5643825A (en) Schmitt trigger circuit
JPS5778757A (en) Field discharge type electron gun
ES8502811A1 (en) Colour display apparatus.
UST961002I4 (en) Electron current regulator for an electron discharge device
GB1355372A (en) Electric arcs
JPS57101326A (en) Electron beam device
JPS56132172A (en) Rectification circuit
JPS5526631A (en) Laser device
EP0301761A3 (en) Thyristors
JPS5567181A (en) Gas laser device
JPS54129968A (en) Electron gun
JPS57174465A (en) High frequency ion etching device
JPS5516471A (en) Laser device
JPS57152020A (en) Power supply circuit for device with small sized printer
JPS6462084A (en) Spot killer circuit for crt
JPS57197737A (en) Electron gun
JPS5918698Y2 (en) Gas laser discharge device
SU970587A2 (en) Device for control of electron-beam gate
JPS5558610A (en) Traveling-wave tube power source unit
JPS629324Y2 (en)
JPS5646338A (en) Thyristor trigger circuit
JPS535497A (en) Electric beam current control circuit