JPS577937A - Washing device - Google Patents

Washing device

Info

Publication number
JPS577937A
JPS577937A JP8239780A JP8239780A JPS577937A JP S577937 A JPS577937 A JP S577937A JP 8239780 A JP8239780 A JP 8239780A JP 8239780 A JP8239780 A JP 8239780A JP S577937 A JPS577937 A JP S577937A
Authority
JP
Japan
Prior art keywords
water
washing
washed
container
nozzles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8239780A
Other languages
Japanese (ja)
Inventor
Hideki Miyaji
Mikio Fujii
Koji Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP8239780A priority Critical patent/JPS577937A/en
Publication of JPS577937A publication Critical patent/JPS577937A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE:To save water and to automate the process, by providing a pair of washing water introducing pipes having a plurality of nozzles at the upper part of an open type washing container, providing a water discharging port at the bottom thereof, and regulating the quantity of water. CONSTITUTION:The top side of the washing container 11 is opened, and objects to be washed 13 are inserted. A pair of the washing water introducing pipes 15 having a plurality of the nozzles 14 are arranged along the direction of aligning the objects to be washed over the object to be washed. The inner pipe 15A of the washing water introducing pipes is fixed, but the outer pipe 15B can be rotated by an external crank mechanism of the container 11. When the direction of the nozzles are deviated from the object to be washed, the water supply is stopped. At the bottom of the container, the water discharge port 18 which can be opened and closed is provided. A water supply port 17 of the washing water is provided in the side wall, and a duct 19 is provided. In this constitution, the water can be conserved, and the process can be automated because the device is of an open type.
JP8239780A 1980-06-18 1980-06-18 Washing device Pending JPS577937A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8239780A JPS577937A (en) 1980-06-18 1980-06-18 Washing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8239780A JPS577937A (en) 1980-06-18 1980-06-18 Washing device

Publications (1)

Publication Number Publication Date
JPS577937A true JPS577937A (en) 1982-01-16

Family

ID=13773451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8239780A Pending JPS577937A (en) 1980-06-18 1980-06-18 Washing device

Country Status (1)

Country Link
JP (1) JPS577937A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0375153U (en) * 1989-11-28 1991-07-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0375153U (en) * 1989-11-28 1991-07-29

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