JPS5779631A - Rotating mechanism of probe card for prober and fixing mechanism thereof - Google Patents
Rotating mechanism of probe card for prober and fixing mechanism thereofInfo
- Publication number
- JPS5779631A JPS5779631A JP55155336A JP15533680A JPS5779631A JP S5779631 A JPS5779631 A JP S5779631A JP 55155336 A JP55155336 A JP 55155336A JP 15533680 A JP15533680 A JP 15533680A JP S5779631 A JPS5779631 A JP S5779631A
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- arm
- holding member
- regulation
- prober
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To perform regulation of rotation smoothly and to perform fixing and relieving accurately of a probe card for prober by a method wherein an arm at the outside circumferential part of a disk type probe card holding member is pressed alternately by a feed screw mechanism and a spring mechanism. CONSTITUTION:When a regulating bar 7 is made to advance by rotating a knob 4, the regulating bar 7 presses the arm 9 for regulation of angle to make the probe card holding member 3 to rotate. At the same time, because the arm 9 for regulation of angle is pressed from the oppsite direction by a coiled spring 12 through a preliminary pressing bar 10, play of the probe card holding member 3 in the rotating direction is eliminated. When the regulating bar 7 is made to retreat by rotating the knob 4, the arm 9 is pressed by the coiled spring 12 through the preliminary pressing bar 10, and the probe card holding member 3 can be rotated in the opposite direction to the case when the regulating bar 7 is made to advance. Fine regulation can be performed as to make the X and Y axes of the prober and the probe card to coincide in this manner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55155336A JPS5779631A (en) | 1980-11-05 | 1980-11-05 | Rotating mechanism of probe card for prober and fixing mechanism thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55155336A JPS5779631A (en) | 1980-11-05 | 1980-11-05 | Rotating mechanism of probe card for prober and fixing mechanism thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5779631A true JPS5779631A (en) | 1982-05-18 |
Family
ID=15603658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55155336A Pending JPS5779631A (en) | 1980-11-05 | 1980-11-05 | Rotating mechanism of probe card for prober and fixing mechanism thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5779631A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5960559U (en) * | 1982-10-15 | 1984-04-20 | 株式会社アドバンテスト | Connection terminal floating mechanism |
-
1980
- 1980-11-05 JP JP55155336A patent/JPS5779631A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5960559U (en) * | 1982-10-15 | 1984-04-20 | 株式会社アドバンテスト | Connection terminal floating mechanism |
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