JPS5779631A - Rotating mechanism of probe card for prober and fixing mechanism thereof - Google Patents

Rotating mechanism of probe card for prober and fixing mechanism thereof

Info

Publication number
JPS5779631A
JPS5779631A JP55155336A JP15533680A JPS5779631A JP S5779631 A JPS5779631 A JP S5779631A JP 55155336 A JP55155336 A JP 55155336A JP 15533680 A JP15533680 A JP 15533680A JP S5779631 A JPS5779631 A JP S5779631A
Authority
JP
Japan
Prior art keywords
probe card
arm
holding member
regulation
prober
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55155336A
Other languages
English (en)
Inventor
Toshimi Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55155336A priority Critical patent/JPS5779631A/ja
Publication of JPS5779631A publication Critical patent/JPS5779631A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP55155336A 1980-11-05 1980-11-05 Rotating mechanism of probe card for prober and fixing mechanism thereof Pending JPS5779631A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55155336A JPS5779631A (en) 1980-11-05 1980-11-05 Rotating mechanism of probe card for prober and fixing mechanism thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55155336A JPS5779631A (en) 1980-11-05 1980-11-05 Rotating mechanism of probe card for prober and fixing mechanism thereof

Publications (1)

Publication Number Publication Date
JPS5779631A true JPS5779631A (en) 1982-05-18

Family

ID=15603658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55155336A Pending JPS5779631A (en) 1980-11-05 1980-11-05 Rotating mechanism of probe card for prober and fixing mechanism thereof

Country Status (1)

Country Link
JP (1) JPS5779631A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5960559U (ja) * 1982-10-15 1984-04-20 株式会社アドバンテスト 接続端子浮動機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5960559U (ja) * 1982-10-15 1984-04-20 株式会社アドバンテスト 接続端子浮動機構

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