JPS5779639A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5779639A
JPS5779639A JP55156141A JP15614180A JPS5779639A JP S5779639 A JPS5779639 A JP S5779639A JP 55156141 A JP55156141 A JP 55156141A JP 15614180 A JP15614180 A JP 15614180A JP S5779639 A JPS5779639 A JP S5779639A
Authority
JP
Japan
Prior art keywords
layer
polycrystalline
single crystal
layers
oxide films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55156141A
Other languages
English (en)
Inventor
Hiroshi Nozawa
Junichi Matsunaga
Hisahiro Matsukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55156141A priority Critical patent/JPS5779639A/ja
Priority to DE8181305215T priority patent/DE3168688D1/de
Priority to EP81305215A priority patent/EP0051488B1/en
Priority to US06/317,616 priority patent/US4459325A/en
Publication of JPS5779639A publication Critical patent/JPS5779639A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01—Manufacture or treatment

Landscapes

  • Element Separation (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Drying Of Semiconductors (AREA)
JP55156141A 1980-11-06 1980-11-06 Manufacture of semiconductor device Pending JPS5779639A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP55156141A JPS5779639A (en) 1980-11-06 1980-11-06 Manufacture of semiconductor device
DE8181305215T DE3168688D1 (en) 1980-11-06 1981-11-02 Method for manufacturing a semiconductor device
EP81305215A EP0051488B1 (en) 1980-11-06 1981-11-02 Method for manufacturing a semiconductor device
US06/317,616 US4459325A (en) 1980-11-06 1981-11-03 Semiconductor device and method for manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55156141A JPS5779639A (en) 1980-11-06 1980-11-06 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5779639A true JPS5779639A (en) 1982-05-18

Family

ID=15621213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55156141A Pending JPS5779639A (en) 1980-11-06 1980-11-06 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5779639A (ja)

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