JPS5788302A - Linearity/flatness measuring device - Google Patents

Linearity/flatness measuring device

Info

Publication number
JPS5788302A
JPS5788302A JP14484281A JP14484281A JPS5788302A JP S5788302 A JPS5788302 A JP S5788302A JP 14484281 A JP14484281 A JP 14484281A JP 14484281 A JP14484281 A JP 14484281A JP S5788302 A JPS5788302 A JP S5788302A
Authority
JP
Japan
Prior art keywords
signals
evaluation stage
difference
subtracted
indicator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14484281A
Other languages
English (en)
Japanese (ja)
Inventor
Gerd Schuchardt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
VEB Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by VEB Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Publication of JPS5788302A publication Critical patent/JPS5788302A/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00Measuring arrangements characterised by the use of fluids
    • G01B13/22Measuring arrangements characterised by the use of fluids for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP14484281A 1980-11-03 1981-09-16 Linearity/flatness measuring device Pending JPS5788302A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD22490380A DD154038B2 (de) 1976-04-13 1980-11-03 Anordnung zur gerad- und ebenheitsmessung

Publications (1)

Publication Number Publication Date
JPS5788302A true JPS5788302A (en) 1982-06-02

Family

ID=5527003

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14484281A Pending JPS5788302A (en) 1980-11-03 1981-09-16 Linearity/flatness measuring device

Country Status (6)

Country Link
JP (1) JPS5788302A (de)
CH (1) CH655179A5 (de)
DD (1) DD154038B2 (de)
DE (1) DE3128451A1 (de)
FR (1) FR2493511B1 (de)
GB (1) GB2086589B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59171809A (ja) * 1983-03-18 1984-09-28 Hitachi Ltd 位置決め機構

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0830743B2 (ja) * 1991-03-07 1996-03-27 株式会社ミツトヨ レベリング装置
CN115854949B (zh) * 2023-03-02 2023-05-16 泗水县金佳工贸有限公司 一种卷纸用弧形辊的弧形自动检测装置及控制方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU408891B2 (en) * 1967-09-11 1970-12-11 Theuniversity Of Queensland Tilt meter
FR1601197A (de) * 1968-12-31 1970-08-10
DE2607513C2 (de) * 1976-02-25 1979-02-15 Helmut Ing.(Grad.) Thierbach Automatische MeB- und Überwachungseinrichtung für die präzise Ermittlung relativer Höhenunterschiede verschiedener Meßpunkte
AT341239B (de) * 1976-09-07 1978-01-25 Wittmann Franz Schlauchwaage mit elektrischer niveauanzeige
US4087920A (en) * 1977-03-25 1978-05-09 The United States Of America As Represented By The Secretary Of The Interior Two-fluid tiltmeter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59171809A (ja) * 1983-03-18 1984-09-28 Hitachi Ltd 位置決め機構

Also Published As

Publication number Publication date
DD154038A2 (de) 1982-02-17
GB2086589A (en) 1982-05-12
DE3128451A1 (de) 1982-06-09
FR2493511B1 (fr) 1986-09-12
DD154038B2 (de) 1986-07-16
FR2493511A1 (fr) 1982-05-07
GB2086589B (en) 1985-05-01
CH655179A5 (de) 1986-03-27

Similar Documents

Publication Publication Date Title
JPS5744807A (en) Flatness measuring apparatus
FR2623623B1 (fr) Procede pour etalonner des appareils de mesure de force ou de moment et appareils s'y rapportant
WO1988002490A1 (en) Automatic test equipment for integrated circuits
JPS5788302A (en) Linearity/flatness measuring device
ES8306255A1 (es) Perfeccionamientos en los sistemas de medicion de coordena- das.
DK393088A (da) Fremgangsmaade og apparat til bestemmelse af tilboe jeligheden til stoevdannelse hos papir og pap
KR960011413A (ko) 표시화소의 광량측정방법 및 표시화면의 검사방법 및 검사장치
ES8303684A1 (es) Perfeccionamientos en un sistema de medicion por coordenadas para determinar las dimensiones relativas de un objeto.
MY112820A (en) Apparatus for measuring dimension of article and scale to be used in the same
JPS5936202B2 (ja) 基板のそり測定装置
JPS54112668A (en) Displacement measuring apparatus of rotators
GB2095405A (en) Dual axis level device
SU987367A1 (ru) Устройство дл измерени линейных размеров
SU1762449A1 (ru) Устройство для бесконтактного измерения поверхности стопы и голени
JPS5742861A (en) Noncontacting electrometer
SU1041091A1 (ru) Устройство дл определени опорных усилий человека
SU1226354A1 (ru) Способ измерени напр женности электрического пол
SE8405220D0 (sv) Sett och anordning for kalibrering av lengdindikatorer
SU1682765A1 (ru) Способ измерени линейных параметров детали на микроинтерферометре
SE8206678L (sv) Signal- och/eller informations-behandlande anordning
SU691785A1 (ru) Способ измерени напр женности электрического пол
Atoyan et al. Systematic errors in wattmeter equipment for specific loss measurements on electrical steel sheet stock
JPS52155065A (en) Wafer insepaction method
Pirlet et al. The ROMETER, a Noncontact System for Measuring Hot Strip Flatness
JPS5614905A (en) Measuring method of deflection of printed circuit board