JPS5789486A - Washing and drying method - Google Patents
Washing and drying methodInfo
- Publication number
- JPS5789486A JPS5789486A JP16699980A JP16699980A JPS5789486A JP S5789486 A JPS5789486 A JP S5789486A JP 16699980 A JP16699980 A JP 16699980A JP 16699980 A JP16699980 A JP 16699980A JP S5789486 A JPS5789486 A JP S5789486A
- Authority
- JP
- Japan
- Prior art keywords
- vessel
- article
- water
- cleaning solution
- dewatering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005406 washing Methods 0.000 title abstract 2
- 238000001035 drying Methods 0.000 title 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract 6
- 238000004140 cleaning Methods 0.000 abstract 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 5
- 230000008016 vaporization Effects 0.000 abstract 3
- 238000009834 vaporization Methods 0.000 abstract 3
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 abstract 2
- 239000007788 liquid Substances 0.000 abstract 2
- 239000003960 organic solvent Substances 0.000 abstract 2
- 230000001464 adherent effect Effects 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 abstract 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To completely remove water from fine cracks and small apertures without contaminating the surface of an article and to dry the article, by passing a water-adhering article through a dewatering vessel, a washing vessel and then a vaporization vessel in which specified agents are charged individually.
CONSTITUTION: An article to be washed is dipped in a dewatering vessel 1 in which a trichlorotrifluoroethane cleaning solution containing a few % of water- soluble organic liquid such as ethanol is filled, to remove water adherent to the surface of the article. The separated water floats on the surface of the cleaning solution and flows into a water-separating vessel 2. The resultant water phase 2a is let flow through a drain pipe 3 into a purifier 4 to separate ethanol from it. The ethanol is returned to the dewatering vessel 1 and the water-separating vessel 2. The article having passed through the dewatering vessel 1 is cleaned with the vapor bath of a cleaning solution in a vaporization vessel 16, and then carried through a cleaning vessel 18 in which a flon-type organic solvent containing 20W50% of water-soluble organic liquid is filled and a vaporization vessel 22 containing the vapor of a flon-type organic solvent mainly composed of trichlorotrifluoroethane, to completely remove water content and the flon-type cleaning solution from the surface of the article. Thereafter, the article is dried.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16699980A JPS5789486A (en) | 1980-11-26 | 1980-11-26 | Washing and drying method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16699980A JPS5789486A (en) | 1980-11-26 | 1980-11-26 | Washing and drying method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5789486A true JPS5789486A (en) | 1982-06-03 |
| JPS6128034B2 JPS6128034B2 (en) | 1986-06-28 |
Family
ID=15841495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16699980A Granted JPS5789486A (en) | 1980-11-26 | 1980-11-26 | Washing and drying method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5789486A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60121287A (en) * | 1983-12-05 | 1985-06-28 | Daikin Ind Ltd | How to clean hot melt processed products |
| JPS60125282A (en) * | 1983-12-13 | 1985-07-04 | 有限会社タス技術研究所 | Dustless cleaning and drying apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4936867A (en) * | 1972-08-23 | 1974-04-05 | ||
| JPS52137756U (en) * | 1976-04-14 | 1977-10-19 |
-
1980
- 1980-11-26 JP JP16699980A patent/JPS5789486A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4936867A (en) * | 1972-08-23 | 1974-04-05 | ||
| JPS52137756U (en) * | 1976-04-14 | 1977-10-19 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60121287A (en) * | 1983-12-05 | 1985-06-28 | Daikin Ind Ltd | How to clean hot melt processed products |
| JPS60125282A (en) * | 1983-12-13 | 1985-07-04 | 有限会社タス技術研究所 | Dustless cleaning and drying apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6128034B2 (en) | 1986-06-28 |
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