JPS5228865A - Process for multilayer epitaxial growth in liquid phase - Google Patents

Process for multilayer epitaxial growth in liquid phase

Info

Publication number
JPS5228865A
JPS5228865A JP10450575A JP10450575A JPS5228865A JP S5228865 A JPS5228865 A JP S5228865A JP 10450575 A JP10450575 A JP 10450575A JP 10450575 A JP10450575 A JP 10450575A JP S5228865 A JPS5228865 A JP S5228865A
Authority
JP
Japan
Prior art keywords
liquid phase
epitaxial growth
multilayer epitaxial
solution
multilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10450575A
Other languages
Japanese (ja)
Inventor
Yorimitsu Nishitani
Kenzo Akita
Kazuo Nakajima
Takeshi Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10450575A priority Critical patent/JPS5228865A/en
Publication of JPS5228865A publication Critical patent/JPS5228865A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To prevent contamination of solution and to grow high quality epitxial GaAlAs layer by putting plate of GaAs under supporting block of the solution.
COPYRIGHT: (C)1977,JPO&Japio
JP10450575A 1975-08-30 1975-08-30 Process for multilayer epitaxial growth in liquid phase Pending JPS5228865A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10450575A JPS5228865A (en) 1975-08-30 1975-08-30 Process for multilayer epitaxial growth in liquid phase

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10450575A JPS5228865A (en) 1975-08-30 1975-08-30 Process for multilayer epitaxial growth in liquid phase

Publications (1)

Publication Number Publication Date
JPS5228865A true JPS5228865A (en) 1977-03-04

Family

ID=14382346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10450575A Pending JPS5228865A (en) 1975-08-30 1975-08-30 Process for multilayer epitaxial growth in liquid phase

Country Status (1)

Country Link
JP (1) JPS5228865A (en)

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