JPS58105473U - 光反応蒸着装置 - Google Patents

光反応蒸着装置

Info

Publication number
JPS58105473U
JPS58105473U JP58782U JP58782U JPS58105473U JP S58105473 U JPS58105473 U JP S58105473U JP 58782 U JP58782 U JP 58782U JP 58782 U JP58782 U JP 58782U JP S58105473 U JPS58105473 U JP S58105473U
Authority
JP
Japan
Prior art keywords
vapor deposition
rotor
deposition tank
photoreactive
reactive vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6140769Y2 (2
Inventor
哲 竹村
那須　昭一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP58782U priority Critical patent/JPS58105473U/ja
Publication of JPS58105473U publication Critical patent/JPS58105473U/ja
Application granted granted Critical
Publication of JPS6140769Y2 publication Critical patent/JPS6140769Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP58782U 1982-01-08 1982-01-08 光反応蒸着装置 Granted JPS58105473U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58782U JPS58105473U (ja) 1982-01-08 1982-01-08 光反応蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58782U JPS58105473U (ja) 1982-01-08 1982-01-08 光反応蒸着装置

Publications (2)

Publication Number Publication Date
JPS58105473U true JPS58105473U (ja) 1983-07-18
JPS6140769Y2 JPS6140769Y2 (2) 1986-11-20

Family

ID=30013653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58782U Granted JPS58105473U (ja) 1982-01-08 1982-01-08 光反応蒸着装置

Country Status (1)

Country Link
JP (1) JPS58105473U (2)

Also Published As

Publication number Publication date
JPS6140769Y2 (2) 1986-11-20

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