JPS5812280U - Structure of quartz glass flange - Google Patents

Structure of quartz glass flange

Info

Publication number
JPS5812280U
JPS5812280U JP10499281U JP10499281U JPS5812280U JP S5812280 U JPS5812280 U JP S5812280U JP 10499281 U JP10499281 U JP 10499281U JP 10499281 U JP10499281 U JP 10499281U JP S5812280 U JPS5812280 U JP S5812280U
Authority
JP
Japan
Prior art keywords
quartz glass
glass flange
flange
welding
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10499281U
Other languages
Japanese (ja)
Other versions
JPH0143164Y2 (en
Inventor
宏 鈴木
優 青木
今　民夫
Original Assignee
東芝セラミツクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝セラミツクス株式会社 filed Critical 東芝セラミツクス株式会社
Priority to JP10499281U priority Critical patent/JPS5812280U/en
Publication of JPS5812280U publication Critical patent/JPS5812280U/en
Application granted granted Critical
Publication of JPH0143164Y2 publication Critical patent/JPH0143164Y2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す概略断面図、第２図〜
第５図は本考案のフランジ部と従来の不透明石英ガラス
製フランジ部の表面荒さを計測した図である。 １・・・不透明石英ガラス、２・・・フランジ部、３・
・・透明石英ガラス製フランジ部、４・・・シール面。Figure 1 is a schematic sectional view showing an embodiment of the present invention, Figures 2-
FIG. 5 is a diagram showing the measured surface roughness of the flange portion of the present invention and the conventional opaque quartz glass flange portion. 1... Opaque quartz glass, 2... Flange portion, 3...
...Transparent quartz glass flange part, 4...Sealing surface.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 不透明ガラス製容器本体のシール部に透明石英ガラス製
フランジを溶着してなる石英ガラス製フランジ部の構造
。The structure of the quartz glass flange part is made by welding a transparent quartz glass flange to the seal part of the opaque glass container body.
JP10499281U 1981-07-15 1981-07-15 Structure of quartz glass flange Granted JPS5812280U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10499281U JPS5812280U (en) 1981-07-15 1981-07-15 Structure of quartz glass flange

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10499281U JPS5812280U (en) 1981-07-15 1981-07-15 Structure of quartz glass flange

Publications (2)

Publication Number Publication Date
JPS5812280U true JPS5812280U (en) 1983-01-26
JPH0143164Y2 JPH0143164Y2 (en) 1989-12-14

Family

ID=29899545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10499281U Granted JPS5812280U (en) 1981-07-15 1981-07-15 Structure of quartz glass flange

Country Status (1)

Country Link
JP (1) JPS5812280U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1053498A (en) * 1996-08-07 1998-02-24 Yamagata Shinetsu Sekiei:Kk Semiconductor wafer reaction vessel and heat treatment apparatus using the vessel

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6078407B2 (en) * 2013-04-05 2017-02-08 古河機械金属株式会社 Berja

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037354A (en) * 1973-08-06 1975-04-08
JPS5623741A (en) * 1979-08-06 1981-03-06 Toshiba Ceramics Co Ltd Quartz glass furnace core tube for manufacturing semiconductor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037354A (en) * 1973-08-06 1975-04-08
JPS5623741A (en) * 1979-08-06 1981-03-06 Toshiba Ceramics Co Ltd Quartz glass furnace core tube for manufacturing semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1053498A (en) * 1996-08-07 1998-02-24 Yamagata Shinetsu Sekiei:Kk Semiconductor wafer reaction vessel and heat treatment apparatus using the vessel

Also Published As

Publication number Publication date
JPH0143164Y2 (en) 1989-12-14

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