JPS58177134A - 外熱型化学気相成長装置の反応管 - Google Patents

外熱型化学気相成長装置の反応管

Info

Publication number
JPS58177134A
JPS58177134A JP57058013A JP5801382A JPS58177134A JP S58177134 A JPS58177134 A JP S58177134A JP 57058013 A JP57058013 A JP 57058013A JP 5801382 A JP5801382 A JP 5801382A JP S58177134 A JPS58177134 A JP S58177134A
Authority
JP
Japan
Prior art keywords
reaction tube
inert gas
gas inlet
lid
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57058013A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6148583B2 (2
Inventor
Yoshihide Endo
遠藤　好英
Harushige Kurokawa
黒河　治重
Yuichi Hotta
堀田　雄一
Masuo Suzuki
鈴木　増雄
Shigeru Takeda
茂 武田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP57058013A priority Critical patent/JPS58177134A/ja
Publication of JPS58177134A publication Critical patent/JPS58177134A/ja
Publication of JPS6148583B2 publication Critical patent/JPS6148583B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP57058013A 1982-04-09 1982-04-09 外熱型化学気相成長装置の反応管 Granted JPS58177134A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57058013A JPS58177134A (ja) 1982-04-09 1982-04-09 外熱型化学気相成長装置の反応管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57058013A JPS58177134A (ja) 1982-04-09 1982-04-09 外熱型化学気相成長装置の反応管

Publications (2)

Publication Number Publication Date
JPS58177134A true JPS58177134A (ja) 1983-10-17
JPS6148583B2 JPS6148583B2 (2) 1986-10-24

Family

ID=13072079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57058013A Granted JPS58177134A (ja) 1982-04-09 1982-04-09 外熱型化学気相成長装置の反応管

Country Status (1)

Country Link
JP (1) JPS58177134A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395254B (zh) * 2006-01-25 2013-05-01 Air Water Inc Film forming device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395254B (zh) * 2006-01-25 2013-05-01 Air Water Inc Film forming device

Also Published As

Publication number Publication date
JPS6148583B2 (2) 1986-10-24

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