JPS58202524A - 結晶成長装置 - Google Patents
結晶成長装置Info
- Publication number
- JPS58202524A JPS58202524A JP57084765A JP8476582A JPS58202524A JP S58202524 A JPS58202524 A JP S58202524A JP 57084765 A JP57084765 A JP 57084765A JP 8476582 A JP8476582 A JP 8476582A JP S58202524 A JPS58202524 A JP S58202524A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- growth
- peripheral
- solution
- crystal growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
- H10P14/26—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition
- H10P14/265—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition using solutions
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57084765A JPS58202524A (ja) | 1982-05-21 | 1982-05-21 | 結晶成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57084765A JPS58202524A (ja) | 1982-05-21 | 1982-05-21 | 結晶成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58202524A true JPS58202524A (ja) | 1983-11-25 |
| JPH0454371B2 JPH0454371B2 (2) | 1992-08-31 |
Family
ID=13839772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57084765A Granted JPS58202524A (ja) | 1982-05-21 | 1982-05-21 | 結晶成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58202524A (2) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57129896A (en) * | 1981-01-29 | 1982-08-12 | Toshiba Corp | Liquid phase epitaxial growing apparatus |
-
1982
- 1982-05-21 JP JP57084765A patent/JPS58202524A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57129896A (en) * | 1981-01-29 | 1982-08-12 | Toshiba Corp | Liquid phase epitaxial growing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0454371B2 (2) | 1992-08-31 |
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