JPS5831551A - ペレツト位置検出装置 - Google Patents

ペレツト位置検出装置

Info

Publication number
JPS5831551A
JPS5831551A JP56129682A JP12968281A JPS5831551A JP S5831551 A JPS5831551 A JP S5831551A JP 56129682 A JP56129682 A JP 56129682A JP 12968281 A JP12968281 A JP 12968281A JP S5831551 A JPS5831551 A JP S5831551A
Authority
JP
Japan
Prior art keywords
pellet
camera
pellets
detection
high speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56129682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211502B2 (2
Inventor
Satoshi Takabayashi
高林　聡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56129682A priority Critical patent/JPS5831551A/ja
Publication of JPS5831551A publication Critical patent/JPS5831551A/ja
Publication of JPS6211502B2 publication Critical patent/JPS6211502B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0442—Apparatus for placing on an insulating substrate, e.g. tape

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56129682A 1981-08-19 1981-08-19 ペレツト位置検出装置 Granted JPS5831551A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56129682A JPS5831551A (ja) 1981-08-19 1981-08-19 ペレツト位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56129682A JPS5831551A (ja) 1981-08-19 1981-08-19 ペレツト位置検出装置

Publications (2)

Publication Number Publication Date
JPS5831551A true JPS5831551A (ja) 1983-02-24
JPS6211502B2 JPS6211502B2 (2) 1987-03-12

Family

ID=15015562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56129682A Granted JPS5831551A (ja) 1981-08-19 1981-08-19 ペレツト位置検出装置

Country Status (1)

Country Link
JP (1) JPS5831551A (2)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53160368U (2) * 1977-05-23 1978-12-15
JPS57115242U (2) * 1981-01-07 1982-07-16

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53160368U (2) * 1977-05-23 1978-12-15
JPS57115242U (2) * 1981-01-07 1982-07-16

Also Published As

Publication number Publication date
JPS6211502B2 (2) 1987-03-12

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