JPS6211502B2 - - Google Patents

Info

Publication number
JPS6211502B2
JPS6211502B2 JP56129682A JP12968281A JPS6211502B2 JP S6211502 B2 JPS6211502 B2 JP S6211502B2 JP 56129682 A JP56129682 A JP 56129682A JP 12968281 A JP12968281 A JP 12968281A JP S6211502 B2 JPS6211502 B2 JP S6211502B2
Authority
JP
Japan
Prior art keywords
pellet
pellets
camera
flexible sheet
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56129682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5831551A (ja
Inventor
Satoshi Takabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP56129682A priority Critical patent/JPS5831551A/ja
Publication of JPS5831551A publication Critical patent/JPS5831551A/ja
Publication of JPS6211502B2 publication Critical patent/JPS6211502B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0606—Position monitoring, e.g. misposition detection or presence detection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0442—Apparatus for placing on an insulating substrate, e.g. tape

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56129682A 1981-08-19 1981-08-19 ペレツト位置検出装置 Granted JPS5831551A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56129682A JPS5831551A (ja) 1981-08-19 1981-08-19 ペレツト位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56129682A JPS5831551A (ja) 1981-08-19 1981-08-19 ペレツト位置検出装置

Publications (2)

Publication Number Publication Date
JPS5831551A JPS5831551A (ja) 1983-02-24
JPS6211502B2 true JPS6211502B2 (2) 1987-03-12

Family

ID=15015562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56129682A Granted JPS5831551A (ja) 1981-08-19 1981-08-19 ペレツト位置検出装置

Country Status (1)

Country Link
JP (1) JPS5831551A (2)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53160368U (2) * 1977-05-23 1978-12-15
JPS57115242U (2) * 1981-01-07 1982-07-16

Also Published As

Publication number Publication date
JPS5831551A (ja) 1983-02-24

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