JPS5840758A - 粒子線による試料走査形試料像表示装置における非点収差補正方法 - Google Patents

粒子線による試料走査形試料像表示装置における非点収差補正方法

Info

Publication number
JPS5840758A
JPS5840758A JP57127721A JP12772182A JPS5840758A JP S5840758 A JPS5840758 A JP S5840758A JP 57127721 A JP57127721 A JP 57127721A JP 12772182 A JP12772182 A JP 12772182A JP S5840758 A JPS5840758 A JP S5840758A
Authority
JP
Japan
Prior art keywords
astigmatism
sample
axis
particle beam
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57127721A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6139703B2 (2
Inventor
Fumio Mizuno
文夫 水野
Hideyuki Kakiuchi
垣内　秀行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57127721A priority Critical patent/JPS5840758A/ja
Publication of JPS5840758A publication Critical patent/JPS5840758A/ja
Publication of JPS6139703B2 publication Critical patent/JPS6139703B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP57127721A 1982-07-23 1982-07-23 粒子線による試料走査形試料像表示装置における非点収差補正方法 Granted JPS5840758A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57127721A JPS5840758A (ja) 1982-07-23 1982-07-23 粒子線による試料走査形試料像表示装置における非点収差補正方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57127721A JPS5840758A (ja) 1982-07-23 1982-07-23 粒子線による試料走査形試料像表示装置における非点収差補正方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP50093126A Division JPS5811073B2 (ja) 1975-08-01 1975-08-01 粒子線による試料走査形試料像表示装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4779385A Division JPS6134840A (ja) 1985-03-11 1985-03-11 粒子線による試料走査形試料像表示装置における非点収差補正方法

Publications (2)

Publication Number Publication Date
JPS5840758A true JPS5840758A (ja) 1983-03-09
JPS6139703B2 JPS6139703B2 (2) 1986-09-05

Family

ID=14967064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57127721A Granted JPS5840758A (ja) 1982-07-23 1982-07-23 粒子線による試料走査形試料像表示装置における非点収差補正方法

Country Status (1)

Country Link
JP (1) JPS5840758A (2)

Also Published As

Publication number Publication date
JPS6139703B2 (2) 1986-09-05

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