JPS6139703B2 - - Google Patents

Info

Publication number: JPS6139703B2
Authority: JP; Japan
Prior art keywords: sample; astigmatism; axis; signal; scanning
Prior art date: 1982-07-23
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

JP57127721A

Other languages

English (en)

Japanese (ja)

Other versions

JPS5840758A (ja

Inventor

Fumio Mizuno

Hideyuki Kakiuchi

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1982-07-23

Filing date

1982-07-23

Publication date

1986-09-05

1982-07-23 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1982-07-23 Priority to JP57127721A priority Critical patent/JPS5840758A/ja

1983-03-09 Publication of JPS5840758A publication Critical patent/JPS5840758A/ja

1986-09-05 Publication of JPS6139703B2 publication Critical patent/JPS6139703B2/ja

Status Granted legal-status Critical Current

Links

201000009310 astigmatism Diseases 0.000 claims description 55
239000002245 particle Substances 0.000 claims description 21
238000000034 method Methods 0.000 claims description 5
230000001360 synchronised effect Effects 0.000 claims description 2
238000010586 diagram Methods 0.000 description 5
238000010894 electron beam technology Methods 0.000 description 3
150000002500 ions Chemical class 0.000 description 3
230000000694 effects Effects 0.000 description 2
230000004075 alteration Effects 0.000 description 1
238000005136 cathodoluminescence Methods 0.000 description 1
230000005284 excitation Effects 0.000 description 1
238000010884 ion-beam technique Methods 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Analysing Materials By The Use Of Radiation (AREA)

JP57127721A 1982-07-23 1982-07-23 粒子線による試料走査形試料像表示装置における非点収差補正方法 Granted JPS5840758A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP57127721A JPS5840758A (ja)	1982-07-23	1982-07-23	粒子線による試料走査形試料像表示装置における非点収差補正方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP57127721A JPS5840758A (ja)	1982-07-23	1982-07-23	粒子線による試料走査形試料像表示装置における非点収差補正方法

Related Parent Applications (1)

Application Number	Title	Priority Date	Filing Date
JP50093126A Division JPS5811073B2 (ja)	1975-08-01	1975-08-01	粒子線による試料走査形試料像表示装置

Related Child Applications (1)

Application Number	Title	Priority Date	Filing Date
JP4779385A Division JPS6134840A (ja)	1985-03-11	1985-03-11	粒子線による試料走査形試料像表示装置における非点収差補正方法

Publications (2)

Publication Number	Publication Date
JPS5840758A JPS5840758A (ja)	1983-03-09
JPS6139703B2 true JPS6139703B2 (2)	1986-09-05

Family

ID=14967064

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP57127721A Granted JPS5840758A (ja)	1982-07-23	1982-07-23	粒子線による試料走査形試料像表示装置における非点収差補正方法

Country Status (1)

Country	Link
JP (1)	JPS5840758A (2)

1982
- 1982-07-23 JP JP57127721A patent/JPS5840758A/ja active Granted

Also Published As

Publication number	Publication date
JPS5840758A (ja)	1983-03-09

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