JPS5849043B2 - How to fine-tune the frequency of a crystal oscillator - Google Patents
How to fine-tune the frequency of a crystal oscillatorInfo
- Publication number
- JPS5849043B2 JPS5849043B2 JP51022941A JP2294176A JPS5849043B2 JP S5849043 B2 JPS5849043 B2 JP S5849043B2 JP 51022941 A JP51022941 A JP 51022941A JP 2294176 A JP2294176 A JP 2294176A JP S5849043 B2 JPS5849043 B2 JP S5849043B2
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- crystal resonator
- electrode film
- fine
- finished
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 title claims description 15
- 238000000034 method Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【発明の詳細な説明】
本発明は水晶振動子の周波数微調整方法に関するもので
、レーザガンから照射されたレーザビームにより一方の
電極膜にのみ穴径のばらつきのない小さい穴を穿ち、か
つ他方の電極膜を傷つけないで精度のよい周波数の調整
を可能とするものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for fine-tuning the frequency of a crystal resonator, in which a small hole with uniform diameter is drilled only in one electrode film using a laser beam irradiated from a laser gun, and This enables accurate frequency adjustment without damaging the electrode film.
図において１は水晶振動子であって、片面２は平面であ
り、鏡面研磨により仕上げられている。In the figure, 1 is a crystal resonator, and one side 2 is flat and finished by mirror polishing.
他面３は凸面であり、ラツピングにより仕上げられてい
る。The other surface 3 is a convex surface and is finished by wrapping.
両面２，３にたとえばＡｕ，Ａｇ，Ａ４などの蒸着によ
り電極膜４，５が形威してある。Electrode films 4, 5 are formed on both surfaces 2, 3 by vapor deposition of, for example, Au, Ag, A4, or the like.
６，７は保持バネで導電性接着剤８により電極膜に接続
されるとともに水晶振動子１を保持している。Reference numerals 6 and 7 denote holding springs which are connected to the electrode film by a conductive adhesive 8 and hold the crystal resonator 1.
保持バネ６，７は基板９上に起立する端子１０，１１に
連結してある。The holding springs 6 and 7 are connected to terminals 10 and 11 standing up on the substrate 9.
基板９上にＩＣやＬＳＩなどの半導体回路素子１２が配
設してある。A semiconductor circuit element 12 such as an IC or an LSI is arranged on the substrate 9.
１３−・・・・・・・・は基板９を貫通突出している外
部端子ビンであり、ボンデイングワイヤ１４・・・・・
・・・・を介して半導体回路素子１２に接続してある。13-... are external terminal pins that protrude through the board 9, and bonding wires 14...
It is connected to the semiconductor circuit element 12 via .
水晶振動子１の周波数を調整するには、基板９上に半導
体回路素子１２、水晶振動子１などを固着し、ＡＴカッ
ト水晶ならば大気中でもよいが、必要に応じて真空ベル
ジャー（図示せず。To adjust the frequency of the crystal resonator 1, the semiconductor circuit element 12, the crystal resonator 1, etc. are fixed on the substrate 9, and if it is an AT-cut crystal, it may be placed in the atmosphere, but if necessary, a vacuum bell jar (not shown) may be used. .
）内に位置させ、所定の端子を短絡させて水晶振動子を
発振させる。) and short-circuit the specified terminals to cause the crystal resonator to oscillate.
周波数を測定し、所望の周波数と一致しないとき、レー
ザガン１５からのレーザビーム１６を水晶振動子１の平
面の鏡面仕上げ面の電極膜４に照射する。The frequency is measured, and if it does not match the desired frequency, a laser beam 16 from a laser gun 15 is irradiated onto the electrode film 4 on the flat, mirror-finished surface of the crystal resonator 1.
レーザビーム１６を面に直角の入射光とすると、照射面
は鏡面であるので乱反射は無く、したがって電極面に不
揃いな径の穴があけられることはなく、一定のレーザビ
ームの照射により一定量の膜を蒸発させて一定の径の穴
を効率良くあけることができる。If the laser beam 16 is incident light perpendicular to the surface, there will be no diffuse reflection because the irradiation surface is a mirror surface, and therefore holes with irregular diameters will not be made on the electrode surface. By evaporating the film, holes of a certain diameter can be efficiently made.
レーザビーム１６が電極膜４を一定量蒸発させて穴をあ
け、水晶振動子１内を通過して他面３に到達しても、こ
の面は凸面であり、かつラツピング面であるので光は乱
反射し、電極膜５を損傷するには致らない。Even if the laser beam 16 evaporates a certain amount of the electrode film 4 to make a hole, passes through the crystal oscillator 1, and reaches the other surface 3, this surface is a convex surface and a wrapping surface, so the light does not pass through. It will not cause diffuse reflection and damage the electrode film 5.
またこの乱反射によりレーザ光のエネルギ密度が下がる
ので、電極膜４に再び到達したときにはもはや電極膜を
損傷するエネルギを有しない。Moreover, the energy density of the laser beam is reduced by this diffuse reflection, so that when it reaches the electrode film 4 again, it no longer has the energy to damage the electrode film.
このようにして水晶振動子の周波数を測定しつつ、レー
ザビームを鏡面側の電極膜４に照射してミクロン桁の穴
をあけ、所望の周波数に合せ込むのである。While measuring the frequency of the crystal resonator in this way, a laser beam is irradiated onto the electrode film 4 on the mirror surface side to make a micron-sized hole and tuned to a desired frequency.
このように本発明によれば、平面で鏡面仕上げ面の電極
膜にレーザビームが照射されるので所定の位置にばらつ
きのない小さい穴を穿つことができ、かつ所定の位置以
外の電極膜に損傷を与えることがなく、精度のよいかつ
効率のよい周波数微調整を可能とするものである。As described above, according to the present invention, since the laser beam is irradiated onto the flat, mirror-finished electrode film, it is possible to drill small holes at predetermined positions without any variation, and to prevent damage to the electrode film other than the predetermined positions. This makes it possible to perform accurate and efficient frequency fine adjustment without giving any noise.
図面は本発明の一実施例を示す正面図である。
１・・・・・・水晶振動子、２・・・・・・片面、３・
・・・・・他面、４，５・・・・・・電極膜、１６・・
・・・・レーザビーム。The drawing is a front view showing an embodiment of the present invention. 1...Crystal resonator, 2...One side, 3.
...Other side, 4, 5... Electrode film, 16...
...Laser beam.
Claims (1)
ラツピング面に仕上げ、両面に電極膜が形戒されている
水晶振動子に対し、その平面の鏡面仕上げ面に形成され
ている電極膜にレーザビームを照射することを特徴とす
る水晶振動子の周波数微調整方法。1. An electrode film formed on the flat, mirror-finished surface of a quartz crystal resonator in which one side is finished as a flat and mirror-finished surface, the other side is finished as a convex and wrapping surface, and electrode films are formed on both sides. A method for fine-tuning the frequency of a crystal resonator, the method comprising irradiating a laser beam to the crystal resonator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP51022941A JPS5849043B2 (en) | 1976-03-03 | 1976-03-03 | How to fine-tune the frequency of a crystal oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP51022941A JPS5849043B2 (en) | 1976-03-03 | 1976-03-03 | How to fine-tune the frequency of a crystal oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52106288A JPS52106288A (en) | 1977-09-06 |
| JPS5849043B2 true JPS5849043B2 (en) | 1983-11-01 |
Family
ID=12096642
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP51022941A Expired JPS5849043B2 (en) | 1976-03-03 | 1976-03-03 | How to fine-tune the frequency of a crystal oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5849043B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60159248U (en) * | 1984-03-30 | 1985-10-23 | 豊田合成株式会社 | elastic butting |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58159012A (en) * | 1982-03-16 | 1983-09-21 | Seiko Instr & Electronics Ltd | Manufacture of coupling vibrator unit |
| JPS58182910A (en) * | 1982-04-20 | 1983-10-26 | Fujitsu Ltd | Piezoelectric oscillator |
| JP2533633Y2 (en) * | 1987-03-06 | 1997-04-23 | 日本電波工業 株式会社 | AT-cut crystal unit |
-
1976
- 1976-03-03 JP JP51022941A patent/JPS5849043B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60159248U (en) * | 1984-03-30 | 1985-10-23 | 豊田合成株式会社 | elastic butting |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52106288A (en) | 1977-09-06 |
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