JPS5853765A - Current/voltage measuring circuit - Google Patents

Abstract

PURPOSE:To measure a load voltage and a load current at a high accuracy by eliminating the overlapping of the load current with current in a current channel formed in parallel with a load and current via a voltage measuring circuit. CONSTITUTION:A load current IL flows to a common potential section C from a power source 1 through a load 2 and a current IF thereto through a current channel 5 formed in parallel with the load. The overall current flowing from the power source 1 is expressed by the sum of current flowing to an input terminal 3b from an input terminal 3c of a current measuring circuit 3 connected to the common potential section C and current flowing to the input terminal 3c from an input terminal 3a. Since the overall current includes the current proportional to the current IF flowing through the current channel 5 and the current proportional to the current IS flowing to a voltage measuring circuit input section 41, a current proportional to the currents IF and IS is produced with an arithmetic circuit of the current measuring circuit 3 and added thereto. Appropriate selection of the proportional current is made so as not to include the currents IF and IS in the overall current.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a current/voltage writing circuit from ζO and W14, and particularly to a current/voltage measuring circuit suitable for OSG* at high impedance loads.

1 when measuring the current flowing through a load KIIl and the applied voltage! Regarding circuit insertion methods, there are currently three methods commonly used. The 1111th Cabinet is the first
) II Show the ribbon method and the power supply! , the load 2 and the current measurement circuit 3 are connected in series, and the potential of the connection point G between the power supply 1 and the current measurement circuit 3 is set to the ground potential @The voltage measurement circuit 4 is in line with the power supply 1! ◎To measure the load current IL, connect the output terminal 3& of the current measurement circuit 3 and the connection point G1.
The load voltage V is measured between the output terminal 4 & of the voltage measuring circuit 4 and the connection point G, respectively, with the load current xL,
Measurement of a signal proportional to the load voltage VK is performed by O In this configuration, load 2 cannot be grounded, so when it is necessary to ground load 2, it is necessary to adopt the second connection method as shown in Figure 3.・In the optical connection method shown in Figure 2, the connection point G between the load 2 and the current measurement circuit 3 is grounded. ・An example of when such a connection method is suitable or required is shown in Figure 3. This will be explained based on FIG.

Figure 3 shows an ion beam irradiation system W consisting of a controlled cross-field discharge device WI and a target.The load 2 is a grounded target that is irradiated with ions and beams. It is used with a current of 1. will flow in. An electric current is emitted from the cylindrical anode 4 at a potential v1, but at a potential V
The cathode plates 23a and 23b from which a current I flows out from the control electrode η of the anode 4, respectively, are arranged on the opposite side of the target electrode 20 and the same 1IIt;C with respect to the anode 4. The cathode plates 23a and Zl having the openings 23h are internally connected to constitute the cathode 3, the potential is maintained at V, and a current x1 flows into the cathode plates 23a and Zl.

These target electrodes, anode 4, and control electrode n.

A load 2 consisting of a cathode plate is housed in a grounded true volume container, and inside an anode 4 to which a magnetic field is applied in the axial direction by a magnetic field generator (not shown), two cathode plates A controlled field discharge is generated in the space between 23m and 23b', and the ions generated by this discharge pass through the aperture 23h and become a beam, which irradiates the target. In such a load 2, the potential V1. V.

Everything about Ma and the target current! ,,current I,.

At least one of X, ,X, is constantly being measured.The measurement circuits for Xl, Figure 4 shows the anode current I,' and anode voltage v1 in Figure 3 as -
The conventional current/voltage adjusting circuit for determining the current voltage is constructed based on the second connection method shown in FIG.

11, 12, and 13 are an anode power source, a control electrode power source, and a cathode power source, respectively, and the output voltage is V. The target current 1 is applied to the O load 2 which is V, , V, ゛. Osi! The circuit is connected. 31 is a constant anode current circuit, where the anode current x1
Actually, as explained later, the current I
x is measured - 41 is the input part of the measurement times of the anode voltage ma, 42 is the output part - target current measurement circuit,
One ends of the control electrode power source and the cathode power source are each commonly connected and grounded at a connection point G.

A current path 5 with a ridge impedance z is formed between the anode power supply 11, the line connecting the load 2, and the ground, and the current f
There is a current between the input section 41 and the output section 42 of the O anode voltage measurement circuit through which fp flows! is flowing. Here, assuming that there is no electrostatic and zero electromagnetic coupling between the anode power source 11 and the ground other than the above-mentioned current path 5,
The current I measured by the anode current measurement circuit 31 is x, -x, +xy +x, ---=-= (1) Normally, the anode current X is very small in the high vacuum region, Xx''';;'X 1 holds true only in some areas where the degree of vacuum has dropped considerably. ・The anode current 11 cannot be accurately controlled over the entire high vacuum area. In addition, when the impedance of load 2 is high, the presence of the current xy+, which flows with negative mK superimposed thereon, cannot be ignored, so the measurement of the load current IX, (-x,) becomes impossible. The purpose of this invention is to provide current and voltage adjustment that can accurately measure the current flowing through the load and the load voltage applied to the load. To provide a constant circuit.

In this invention, the current Xf in the current path and the current 1. The above objective was achieved by making sure that the current was not superimposed on the load current ML.

An embodiment of the present invention will be described below in detail based on Figure NK. Figure 5 is a block diagram showing an embodiment of the present invention. A load current IL flows through the current path 5, and a current 1y flows through the current path 5. The part surrounded by the chain line is the current/voltage measurement circuit 6, which connects the current measurement circuit 3 and the voltage measurement circuit 4 (input section 41.
・I is the output of the current measurement circuit 3, V is the output of the voltage measurement circuit 42, respectively. ・The voltage vL tm applied to the load 2 is determined by The input section 41 has two input ends 41m, 41
t+ and an output terminal 41 & ◎Figure 6 shows the input section 4
The turtle shows an example of the configuration of 1, so you can easily create 0 with a simple voltage divider.
From the output terminal 4111, a current of 1. Flows toward the output section 42 and then flows into the input end 4!1 provided at the output section 42. The other input end 42a of the output part minor is the common potential part aKI.
I! #1 Figure 7 shows an example of the configuration of the output section 42, which can be composed of a resistor, a capacitor, and an operational amplifier having a chibi dance. Current II flowing through load 2, t - Current to be measured fIllIl constant circuit 3
has three input terminals 3a, 3'b, 3a, the input terminal 31 is connected to the terminal it of the power supply 1 and the input terminal 411 of the voltage-electrical circuit input part 41, and the input terminal 31 is connected to the terminal it of the power supply 1 1 other terminal 1) and the koji input terminal 41t of the voltage measurement circuit input section 41
The operation of the 0th order in which the input terminal 3o#i is connected to the input terminal 3o#i and the common potential section OK will be explained.

Common potential section OK*e*required current measurement circuit 30 input terminal 36
If the current flowing from the input end 31 toward the input end 31 is 11, then □ m L F
A current x11 proportional to the current 11 flowing through the current path BK (
m': constant) and flows into the voltage measuring circuit input section 41. A current D1. K so that a superimposed current flows with
Then, the total current flowing toward input terminal 3C or input terminal 313 is expressed by the above equation (x, K''AIp+M
, is added, x110mr) + FuX, Wwork1
+(1+A)IF+(1+T))X.

-1...-(K11i like a powder type. Current adjustment circuit 8
A calculation circuit is built in to generate a current B proportional to the current Iy.
Create a current IFI proportional to X y (B: constant and current X, (F: constant), and add these currents to the current
The total current MB is xB-xp+(1+Mu+B)Iy+(1+D1F)I,
-(4>) ・Here, the constants B and D take only positive values, but the constants B and F can take any value of positive, negative, or zero, so electric machine B and IF can be applied uniformly. !!Select iK, lS-1=-(1+mu)' −−−−=−
L＜Mackerel? =-(1+n) ・・・-・--
--(Ship (2), the constant 1.ν is set so that it follows the grip 2, and it is a 0 large ship that is due east, (*, 181 to X@ -
IL −”°0°−−−−− eF) is obtained, and the current IF can be expressed in an unconventional form. In this way, the voltage measurement circuit 4 connects the power supply l, the load 2, and the
The potential difference between the tam point and the common potential part 0 can be determined as the output voltage via the current I, and the current measuring circuit 3 separates the load current IL from the current Iν and the current I. During the output of the current measurement circuit, the output of the voltage measurement circuit can be either a constant current type or a constant voltage type, depending on the application. It is also possible to take out the output from the current-voltage circuit, not only by dispersing it as a value that is proportional to the load voltage in the load current, but also by performing calculations on those values and taking it out as a value. By making the resistance value of the output section Cf of the voltage measuring circuit shown in 71aK very large and the capacitance of the gondenna very small, the current 1. It is possible to write the O value very small. In this way, the error due to correction can be reduced, so it is possible to measure the load current with good accuracy.
Wow.

This invention is configured to eliminate the influence of the current ottxy and the current I passing through the voltage measuring circuit on the load current RXLK, so that the current and voltage OIm can be determined with high accuracy even when the load current is small. It has the advantage of providing a suitable UGIUI path for high impedance loads.

[Brief explanation of drawings]

Figure 1 is a circuit diagram showing the conventional current and voltage adjustment circuit O first sl method, Figure 2 is a circuit diagram showing the *SO* continuation method, and Figure 3 is a circuit diagram showing the line-controlled cross-field fault electrical equipment W. The ion beam irradiation device consists of a beam and a target, and Figure 4 is the conventional #lI! A connection diagram of the current and voltage measurement circuit of the ion irradiation device shown in Figure #18, which is configured based on the lo* continuation method, a block diagram showing the 581st twist of this invention, and a 6th Kakuhiro voltage measurement circuit. Circuit diagram showing an example of input section 0@m, No. 711
sl is a circuit diagram showing an example of the configuration of the output section of the voltage regulator circuit.
Wow. l...Power supply, G...Load, 3...Electric ****■ road, 4
...Voltage measurement circuit, company...Voltage measurement circuit input section, Minoru...Voltage adjustment circuit output section, 5...Current path, 6...
・Current voltage measurement circuit, 0... common potential section. Applicant's fee: Hojin # Article Kiyoma 1 illustration Horse 3 illustration Heron 4 illustration Horse 6 illustration 7 illustrations

Claims (1)

[Claims] Load and this load! It consists of a current measuring circuit for supplying current from the power supply to the current 1 path that is applied to the column Ell and measuring the load current that is applied to the negative 11Kll, and a voltage 1ItFW path for measuring the load voltage at both ends of the load as S*. The 10th terminal 01 of the power source connected to one end of the load is connected to the 10th input terminal of the current measuring circuit (
8a) and the first input end (4) of the input section of the front distribution voltage field electric line
h) 7 to 11#L, connect the second terminal (1t+) of the power supply to the first input terminal (3) of the current measuring circuit and the front power distribution EE
Connected to the 30th input terminal (41!+) of the 1mQI circuit O input section, and connected to the input section Oa output terminal 411 of the voltage measurement sII.
1) to the voltage 1IIl! The terminal on the side that is not connected to the terminal (11) of the terminal 1 of the power distribution power supply of the load through the output part of the circuit is connected to the common potential part, and the input layer Ba of the current measurement circuit aSS in the previous section is connected to the common potential part. is connected to the common potential section, and the current measuring circuit is connected to the 10th person 7JII (8a).
& fli #IIL 3 (D entry jJtll (3a)
The output terminal (4) of the input part of the voltage writing circuit is
The second current is proportional to the current X flowing from La) through the output portion, and has a desired relationship with the second current that is proportional to the first current and cancels the current RXf. The current of II3 is proportional to the second current, and the current is proportional to the second current. A stone that supplies a current with the desired relationship to cancel the current voltage 1IIIi! circuit.