JPS5855292A - レ−ザ記録媒体 - Google Patents

レ−ザ記録媒体

Info

Publication number
JPS5855292A
JPS5855292A JP56154099A JP15409981A JPS5855292A JP S5855292 A JPS5855292 A JP S5855292A JP 56154099 A JP56154099 A JP 56154099A JP 15409981 A JP15409981 A JP 15409981A JP S5855292 A JPS5855292 A JP S5855292A
Authority
JP
Japan
Prior art keywords
recording
recording medium
oxide film
absorption layer
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56154099A
Other languages
English (en)
Inventor
Yoshihiro Asano
浅野 義曠
Hironori Yamazaki
裕基 山崎
Akira Morinaka
森中 彰
Bunjiro Tsujiyama
辻山 文治郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP56154099A priority Critical patent/JPS5855292A/ja
Publication of JPS5855292A publication Critical patent/JPS5855292A/ja
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B7/2578Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24314Metals or metalloids group 15 elements (e.g. Sb, Bi)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302Metals or metalloids
    • G11B2007/24316Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25706Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing transition metal elements (Zn, Fe, Co, Ni, Pt)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/2571Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing group 14 elements except carbon (Si, Ge, Sn, Pb)
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/257Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers
    • G11B2007/25705Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials
    • G11B2007/25715Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of layers having properties involved in recording or reproduction, e.g. optical interference layers or sensitising layers or dielectric layers, which are protecting the recording layers consisting essentially of inorganic materials containing oxygen
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2533Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2533Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
    • G11B7/2535Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins polyesters, e.g. PET, PETG or PEN
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2533Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins
    • G11B7/2536Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins polystyrene [PS]

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  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 本発明は集光したレーデ光の熱作用によシ、その照射部
を融解・蒸発することによ多情報の記録を行なうに適し
たレーデ記録媒体に関するものである。
一般に、レーデ光の熱的効果を利用した記録は、高密度
・大容量記録が可能なこと、現像処理が不要なため実時
間記録・即′再生ができること、追加記録が可能なこと
、高コントラストの記録が可能なことなどの利点を有す
る。従うて、大容lファイルメ七りとしての利用が検討
されている。しかし、記録装置の小型化、安定化、低価
格化を計るためには、記録再生光源として半導体レーデ
を用いる必要がある。この半導体レーデの出力はガスレ
ーデなどと比較すると低いため、高速で記録するために
は記録媒体としても高感度な媒体が要求される。
従来、このような記録に用いる媒体としてはRh、 B
l、 T・などの金属薄膜、Am、T曝+ 8@などか
らなるカルコグナイトガラス薄膜、フルオレセインなど
の色素薄膜が知られている。これらはレーデ光を吸収し
て昇温し、融解・蒸発によシ薄膜に孔をあけ情報を記録
する媒体である。
そしてζ記録感度を向上させるため、熱伝導率の小さい
f2スチ、りを基板として用いたシあるいは記録層と基
板との間に断熱層として用いることによp熱の基板側へ
の流出を防ぐ構成がとられている。しかし、20 mW
以下の半導体レーデで高速記録を行なうには感度が不十
分である。また、記録層を薄くシ、融解・蒸発部分の熱
容量を小さくすることによシ感度の向上が計られるが、
記録層が薄くなると再生時のコントラストが低下し、ま
九金属薄膜では表面酸化が膜内部に達しやす〈記録媒体
の寿命を短くする欠点がある。
本発明は低出力の半導体レーデを用いて高速記録が可能
な高感度を有し、かつコントラストの高いレーデ記録媒
体を提供することを目的とし、記録層の背後に極めて薄
い酸化物膜を設けることを特甲としている。
以下図面に基づいて本発明の詳細な説明する。
第1図は本発明記録媒体の一例を示す図であって、1は
透光性を有する!ラスチアり基板、2は酸化物膜、3は
レーデ光吸収層である。4は記録・再生用レーデ光であ
シ、基板越しに集光可能な集光レンズによ〕吸収層上で
約1μm径のス/、トに絞シ込まれる。
基板1としてはアクリk −(PMMA) 、/リスチ
レン、ぼりエチレンテレフタレート、Iリカー−ネート
などの板を用いることができ、酸化物膜2としてはSt
O,〒*02* it、o3. CaO−8102など
の蒸着膜を2001以下の膜厚で用いることができる。
レーデ光吸収層3としてはT・、 BIなどの金属薄膜
、あるいはムm、T・などからなるカルコダンガラス薄
膜、あるいはT・、 Biなどの金属を含有させ九二硫
化炭素!ラズマ重合膜を用いることができる。
この媒体に記録用レーデ光4を照射すると吸収層3が融
解・蒸発し孔が形成される。孔の形成される過程は複雑
でちゃ、不明な点も多いが吸収層3と基板1との界面状
態が孔形成に影響を与えると考えられる。このことは、
例えばJ、Va@、8c1.T@ehno1.+18(
1) IP、68*(1981)の文献に記載されてい
る。つtb、吸収層3が融解したのみでは孔は形成され
ず、この融解した部分が基板1から切シ離される必要が
ある。
吸収層Sと基板1との界面に酸化物膜2を設けることに
よシ、吸、収層3の融解した部分に働く界面応力の大き
さが変化し、融解部分は周辺に引張られ、孔の周辺に盛
シ上がシとして残留し孔が形成されやすくなる。従って
、酸化物膜2を設けることによシ1.酸化物膜2がな込
場合より記録感度が向上する。
なお、酸化物膜2は厚くすると吸収層3に発生し九熱が
基板1側に流出し、感度が低下するため200X以下で
用いる必要がある。
第2図は本発明の他の一例を示す図で、5はノラスチ、
り膜、fツズマ重合膜、有機蒸着膜など低熱伝導率の材
料からなる断熱層である。
この場合も、第1図の場合と同様に酸化物膜2の効果に
よシ孔が形成されやすくなる。
以下実施例を中心に述べる。
(実施例1) アクーリル基板上にS量Oを50X蒸着し、この上に3
00芙のT・を蒸着した。この媒体を波長830 nm
OGmAm半導体レーデで書き込み、読み出しを行なっ
た結果を第3図に示す。媒体上のレーデ/臂ワ6 mW
 、ビーム径り、S tsrt* X 1.6 Jlm
で書き込み、0.6mWのレーデパワで読み出した。
第3図の横軸は半導体レーデのノ臂ルス巾を、縦軸は再
生信号出力(記録前後の反射光強度R@。
8の差)を表わしている0図中、曲11aはsi。
膜を設けた場合、曲線すは810膜がない場合の特性を
示す0曲線aでは記録閾値が低くなるとともにレーデ1
4ルス巾の増加に伴なう信号出力の増加が急峻である。
従うて、高速で書き込みができるとともに、読み出し時
のレーザーダヮも高くできるため再生時のコントラスも
高くすることができ丸。
(実施例2) 実施例1 O810O代わ’) K 501 OT@0
2蒸着膜を用いた。 StOの場合と比較すると記録閾
値はわずかに増えたが曲線の立上)は急峻であった。
(実施例3) 実施例1の810の代わシにCm0−810zを50X
蒸着した。StOと同様の記録特性が得られた。
(実施例4) ガラス基板上に二硫化炭素プラズマ重合膜を0、2 p
us重合し、その上に810を501蒸着し、さらに丁
・を200芙蒸着した。実施例1と同じ条件で記録特性
を測定した結′果を第4図に示す。
曲線Cは810膜がある場合、曲adFi引0膜がない
場合である。1110 @がある場合に記録閾値の低下
が観られる。ま九、T・膜厚を増加させた場合、810
 gがないと記録閾値が大巾に増加するのに対し、81
0膜があるとT@膜厚4001fiで閾値はほとんど変
化しなかった。Te膜厚が増すと信号出力は大きくなる
ため高コント2ストの再生が可能でTo−)た。
(実施例5) 実施例40T@膜の代わ)にム−1゜丁・9゜を300
又蒸着した。!J施例4と同じ記録特性が得られた。
(実施例6) 実施例40T・膜の代わシにT・含有二硫化炭素グッズ
マ重合膜を300膜重合した。T・含有量は90マo1
幅とした。記録特性は実施例4と同様であう丸。
(実施例7) 実施例4のT・膜の代わ)にB1を2001蒸増加した
が記録特性曲線の立上シが急峻であシ、高コントラスト
の再生が可能であった。
(実施例8) 実施例6の媒体を300−の直径のディスク上に作製し
丸。このディスクを180 Or、p、mで回転し、媒
体上ノ臂ワー6 mW 、ビーム径1.6*mx1.6
μmの半導体レーデで記録を行なった。レーデノ譬ワ1
 mWで読み出しを行なったところディスクの内周、外
周と4再生信号出力の雑音化は4048以上であう九。
以上説明したように、酸化物膜をレーデ光吸収層の背後
に設けることによシ記録閾値が低く、しかも鋭い記録閾
値を有する媒体が得られる。
酸化物膜の効果は吸収層の融解部分を孔の周辺に押しヤ
シ孔を形成しやすくすることで感度向上に寄与する。そ
して酸化物膜の膜厚は200芙以下と極めて薄く、とく
に50X程度のときは膜が島状になると考えられ基板側
への熱の流出には影響を与えない、を九、孔を形成しや
すくする動量1は吸収層が厚くなった場合も顕著に生じ
るため高コントラストの記録ができる。
従って、半導体レーデにょ)高速で高コントラストの記
録が可能な媒体が得られるという利点がある。
【図面の簡単な説明】
第1図は本発明レーデ記録媒体の一例を示す断面拡大図
、第2図線本発明レーデ記録媒体の他の一例を示す断面
拡大図、第3図、第4図はそれぞれ本発明レーデ記録媒
体の記録特性例を示す曲線図である。 1・・・基板、2・−酸化物膜、S・・・レーデ光吸収
層、4・・・記録・再生用レーデ光、5用断熱層。

Claims (1)

    【特許請求の範囲】
  1. レーデ光を照射し、その照射部分を融解変形または蒸発
    させるととによって記録するレーデ記録媒体において、
    レーデ光を吸収する吸収層の背後に酸化物膜を設けるこ
    とを特徴とするレーデ記録媒体。
JP56154099A 1981-09-29 1981-09-29 レ−ザ記録媒体 Pending JPS5855292A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56154099A JPS5855292A (ja) 1981-09-29 1981-09-29 レ−ザ記録媒体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56154099A JPS5855292A (ja) 1981-09-29 1981-09-29 レ−ザ記録媒体

Publications (1)

Publication Number Publication Date
JPS5855292A true JPS5855292A (ja) 1983-04-01

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ID=15576888

Family Applications (1)

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JP56154099A Pending JPS5855292A (ja) 1981-09-29 1981-09-29 レ−ザ記録媒体

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Country Link
JP (1) JPS5855292A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6038745A (ja) * 1983-08-09 1985-02-28 Nec Corp 光学記録媒体および光学記録再生方法
JPS6045955A (ja) * 1983-06-02 1985-03-12 オプチカル・ストラヘ・インテルナチオナル ホランド 光学記録素子
US5244770A (en) * 1991-10-23 1993-09-14 Eastman Kodak Company Donor element for laser color transfer
CN108415107A (zh) * 2018-03-07 2018-08-17 上海道助电子科技有限公司 一种复合板材表面的增透膜制程工艺

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52146221A (en) * 1976-05-31 1977-12-05 Asahi Chemical Ind Image forming material

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52146221A (en) * 1976-05-31 1977-12-05 Asahi Chemical Ind Image forming material

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6045955A (ja) * 1983-06-02 1985-03-12 オプチカル・ストラヘ・インテルナチオナル ホランド 光学記録素子
JPS6038745A (ja) * 1983-08-09 1985-02-28 Nec Corp 光学記録媒体および光学記録再生方法
US5244770A (en) * 1991-10-23 1993-09-14 Eastman Kodak Company Donor element for laser color transfer
CN108415107A (zh) * 2018-03-07 2018-08-17 上海道助电子科技有限公司 一种复合板材表面的增透膜制程工艺
CN108415107B (zh) * 2018-03-07 2020-07-14 上海道助电子科技有限公司 一种包含有聚甲基丙烯酸甲酯的板材的表面增透膜制程工艺

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