JPS58697Y2 - スパッタ用タ−ゲット - Google Patents

スパッタ用タ−ゲット

Info

Publication number
JPS58697Y2
JPS58697Y2 JP1978121697U JP12169778U JPS58697Y2 JP S58697 Y2 JPS58697 Y2 JP S58697Y2 JP 1978121697 U JP1978121697 U JP 1978121697U JP 12169778 U JP12169778 U JP 12169778U JP S58697 Y2 JPS58697 Y2 JP S58697Y2
Authority
JP
Japan
Prior art keywords
ceramic
sputtering
sputtering target
electrode
conductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978121697U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5537879U (2
Inventor
友彦 新川
和男 田附
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1978121697U priority Critical patent/JPS58697Y2/ja
Publication of JPS5537879U publication Critical patent/JPS5537879U/ja
Application granted granted Critical
Publication of JPS58697Y2 publication Critical patent/JPS58697Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1978121697U 1978-09-04 1978-09-04 スパッタ用タ−ゲット Expired JPS58697Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978121697U JPS58697Y2 (ja) 1978-09-04 1978-09-04 スパッタ用タ−ゲット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978121697U JPS58697Y2 (ja) 1978-09-04 1978-09-04 スパッタ用タ−ゲット

Publications (2)

Publication Number Publication Date
JPS5537879U JPS5537879U (2) 1980-03-11
JPS58697Y2 true JPS58697Y2 (ja) 1983-01-07

Family

ID=29079093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978121697U Expired JPS58697Y2 (ja) 1978-09-04 1978-09-04 スパッタ用タ−ゲット

Country Status (1)

Country Link
JP (1) JPS58697Y2 (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145981A (en) * 1981-03-03 1982-09-09 Toshiba Corp Target for sputtering device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737967Y2 (2) * 1979-09-20 1982-08-20

Also Published As

Publication number Publication date
JPS5537879U (2) 1980-03-11

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