JPS5872610U - Film thickness measuring device - Google Patents
Film thickness measuring deviceInfo
- Publication number
- JPS5872610U JPS5872610U JP16776281U JP16776281U JPS5872610U JP S5872610 U JPS5872610 U JP S5872610U JP 16776281 U JP16776281 U JP 16776281U JP 16776281 U JP16776281 U JP 16776281U JP S5872610 U JPS5872610 U JP S5872610U
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- measuring device
- thickness measuring
- film
- received light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、本考案の一実施例に係るフィルム厚み測定装
置の模式図、第２図は、本考案装置の要部を説明するた
めの、第１図の鎖線部分に係る拡大模式図である。
１・・・光源部、２，４・・・光ファイバー、３・・・
検出部。FIG. 1 is a schematic diagram of a film thickness measuring device according to an embodiment of the present invention, and FIG. 2 is an enlarged schematic diagram of the chain line portion in FIG. 1 for explaining the main parts of the device of the present invention. be. 1... Light source part, 2, 4... Optical fiber, 3...
Detection unit.
Claims (2)
長に対する受光強度Ｂ（λ）と、フィルムを介するとき
の光学的干渉現象に応答する、波長に対する受光強度Ｆ
（入）とを測定する手段と、測定された前記の両方の受
光強度に基づいてフィルムの厚み被測定点における光の
変調信号Ａ（入）を計測する手段とを含み、前記変調度
Ａ（λ）に基づいてフィルムの厚みを測定するようにし
たことを特徴とする、フィルムの厚み測定装置。(1) Received light intensity B (λ) with respect to wavelength when not passing through the film whose thickness is being measured, and received light intensity F with respect to wavelength in response to optical interference phenomenon when passing through the film
and means for measuring the modulation signal A (in) of light at the film thickness measurement point based on the measured received light intensities, and the modulation degree A (in). A film thickness measuring device characterized in that the film thickness is measured based on λ).
ルムの厚み測定装置において、前記変調信号Ａ（λ）は
Ｆ（λ）／Ｂ（λ）で与えられる関数であることを特徴
とする、フィルムの厚み測定装置。(2) In the film thickness measuring device according to claim 1 of the utility model registration, the modulation signal A(λ) is a function given by F(λ)/B(λ). Film thickness measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16776281U JPS5872610U (en) | 1981-11-10 | 1981-11-10 | Film thickness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16776281U JPS5872610U (en) | 1981-11-10 | 1981-11-10 | Film thickness measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5872610U true JPS5872610U (en) | 1983-05-17 |
Family
ID=29959830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16776281U Pending JPS5872610U (en) | 1981-11-10 | 1981-11-10 | Film thickness measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5872610U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026069603A1 (en) * | 2024-09-27 | 2026-04-02 | 株式会社日立ハイテク | Optical inspection device and control method therefor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53119076A (en) * | 1977-03-26 | 1978-10-18 | Ritsuo Hasumi | Optical thicknessmeter for transparent film |
-
1981
- 1981-11-10 JP JP16776281U patent/JPS5872610U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53119076A (en) * | 1977-03-26 | 1978-10-18 | Ritsuo Hasumi | Optical thicknessmeter for transparent film |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026069603A1 (en) * | 2024-09-27 | 2026-04-02 | 株式会社日立ハイテク | Optical inspection device and control method therefor |
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