JPS5877044U - Thin film peeling device - Google Patents

Thin film peeling device

Info

Publication number
JPS5877044U
JPS5877044U JP17269481U JP17269481U JPS5877044U JP S5877044 U JPS5877044 U JP S5877044U JP 17269481 U JP17269481 U JP 17269481U JP 17269481 U JP17269481 U JP 17269481U JP S5877044 U JPS5877044 U JP S5877044U
Authority
JP
Japan
Prior art keywords
thin film
film peeling
peeling device
tank
mounting plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17269481U
Other languages
Japanese (ja)
Inventor
渡辺　修治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17269481U priority Critical patent/JPS5877044U/en
Publication of JPS5877044U publication Critical patent/JPS5877044U/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図は、本考案に係る薄膜剥離装置の一実施例を示す要部
断面図である。 図において、１は処理槽、２は載置板、３は載置板に設
けられた多数の孔、４は超音波振動子、５は超音波発振
器、６は槽カバー、７は複数個の液体噴射ノズル、８は
フィルタ、９は循環ポンプ、１０は剥離液、１１は半導
体ウェハを示す。The figure is a sectional view of essential parts showing an embodiment of a thin film peeling apparatus according to the present invention. In the figure, 1 is a processing tank, 2 is a mounting plate, 3 is a large number of holes provided in the mounting plate, 4 is an ultrasonic vibrator, 5 is an ultrasonic oscillator, 6 is a tank cover, and 7 is a plurality of holes. A liquid injection nozzle, 8 a filter, 9 a circulation pump, 10 a stripping liquid, and 11 a semiconductor wafer.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 多数の孔を備えたウェハ載置板を処理槽内に水′平に設
け、処理すべき半導体ウェハを載置した載置板の上方に
、前記半導体ウェハに向けて剥離液を噴出する噴射ノズ
ルを配置し、かつ前記処理槽内に溜った剥離液に超音波
振動を与える超音波振動子を前記槽底部にそなえると共
に、前記槽内の′剥離液をフィルタを通して前記噴出ノ
ズルへ循環する手段を付設したことを特徴とする薄膜剥
離装置。A wafer mounting plate with a large number of holes is provided horizontally in the processing tank, and above the mounting plate on which semiconductor wafers to be processed are mounted, there is a spray nozzle that sprays a stripping liquid toward the semiconductor wafers. and an ultrasonic vibrator that applies ultrasonic vibration to the stripping solution accumulated in the processing tank is provided at the bottom of the tank, and means for circulating the stripping solution in the tank through a filter to the jet nozzle. A thin film peeling device characterized by being attached.
JP17269481U 1981-11-19 1981-11-19 Thin film peeling device Pending JPS5877044U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17269481U JPS5877044U (en) 1981-11-19 1981-11-19 Thin film peeling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17269481U JPS5877044U (en) 1981-11-19 1981-11-19 Thin film peeling device

Publications (1)

Publication Number Publication Date
JPS5877044U true JPS5877044U (en) 1983-05-24

Family

ID=29964579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17269481U Pending JPS5877044U (en) 1981-11-19 1981-11-19 Thin film peeling device

Country Status (1)

Country Link
JP (1) JPS5877044U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62258735A (en) * 1986-05-01 1987-11-11 Nec Kyushu Ltd Apparatus for recirculating chemical liquid

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62258735A (en) * 1986-05-01 1987-11-11 Nec Kyushu Ltd Apparatus for recirculating chemical liquid

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