JPS5882447A - イオン源における引出電極の位置および姿勢調整装置 - Google Patents

イオン源における引出電極の位置および姿勢調整装置

Info

Publication number
JPS5882447A
JPS5882447A JP56179619A JP17961981A JPS5882447A JP S5882447 A JPS5882447 A JP S5882447A JP 56179619 A JP56179619 A JP 56179619A JP 17961981 A JP17961981 A JP 17961981A JP S5882447 A JPS5882447 A JP S5882447A
Authority
JP
Japan
Prior art keywords
extraction electrode
electrode
lead
ion source
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56179619A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6316854B2 (2
Inventor
Haruto Ono
治人 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP56179619A priority Critical patent/JPS5882447A/ja
Publication of JPS5882447A publication Critical patent/JPS5882447A/ja
Publication of JPS6316854B2 publication Critical patent/JPS6316854B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP56179619A 1981-11-11 1981-11-11 イオン源における引出電極の位置および姿勢調整装置 Granted JPS5882447A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56179619A JPS5882447A (ja) 1981-11-11 1981-11-11 イオン源における引出電極の位置および姿勢調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56179619A JPS5882447A (ja) 1981-11-11 1981-11-11 イオン源における引出電極の位置および姿勢調整装置

Publications (2)

Publication Number Publication Date
JPS5882447A true JPS5882447A (ja) 1983-05-18
JPS6316854B2 JPS6316854B2 (2) 1988-04-11

Family

ID=16068915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56179619A Granted JPS5882447A (ja) 1981-11-11 1981-11-11 イオン源における引出電極の位置および姿勢調整装置

Country Status (1)

Country Link
JP (1) JPS5882447A (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0231055U (2) * 1988-08-22 1990-02-27

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884299A (2) * 1972-02-16 1973-11-09
JPS5164373A (2) * 1974-07-31 1976-06-03 Atomic Energy Authority Uk
JPS53105699A (en) * 1977-02-25 1978-09-13 Mitsubishi Electric Corp Cold cathod discharging type ion source device
JPS54132898A (en) * 1977-11-28 1979-10-16 Anvar Movable drawing electric pole for ion source

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884299A (2) * 1972-02-16 1973-11-09
JPS5164373A (2) * 1974-07-31 1976-06-03 Atomic Energy Authority Uk
JPS53105699A (en) * 1977-02-25 1978-09-13 Mitsubishi Electric Corp Cold cathod discharging type ion source device
JPS54132898A (en) * 1977-11-28 1979-10-16 Anvar Movable drawing electric pole for ion source

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0231055U (2) * 1988-08-22 1990-02-27

Also Published As

Publication number Publication date
JPS6316854B2 (2) 1988-04-11

Similar Documents

Publication Publication Date Title
CA2444731C (en) High throughput ion source with multiple ion sprayers and ion lenses
Weidele et al. Production of “cold/hot” metal cluster ions: a modified laser vaporization source
KR930702775A (ko) 성분 분석장치와 방법
JPS5733923A (en) Electric discharge machining device
JPS5882447A (ja) イオン源における引出電極の位置および姿勢調整装置
US4580058A (en) Scanning treatment apparatus
US4203018A (en) Method and apparatus for eroding inner and outer walls of work pieces
CN111739786A (zh) 一种可平动和转动的激光溅射离子源
GB1161431A (en) Improvements Relating to Mass Spectrometry
JPH0430919A (ja) ワイヤ放電加工機のワイヤ電極案内装置
JPH0720837Y2 (ja) イオン源
JPH06501884A (ja) ワークロールの製造装置
KR200297925Y1 (ko) 이온빔 유도장치의 윙 어퍼처
US3180966A (en) Spark erosion machine
JPS61268450A (ja) 印刷機のインキ供給装置
SU817829A1 (ru) Устройство дл создани коронногоРАзР дА
CN111725111B (zh) 半导体工艺设备的反应腔室及半导体工艺设备
JPH0615389Y2 (ja) ビ−ム走査装置
JP2852144B2 (ja) 荷電粒子ビーム用対物コリメータ
SU1517075A1 (ru) Импульсный источник отрицательных ионов
SU1711263A2 (ru) Электростатический энергоанализатор
JPS6112544B2 (2)
JP2990086B2 (ja) イオン注入装置
CN1414136A (zh) 管筒状工件内表面束线离子注入装置
SU1232728A1 (ru) Устройство дл очистки поверхностей