JPS6316854B2 - - Google Patents
Info
- Publication number
- JPS6316854B2 JPS6316854B2 JP56179619A JP17961981A JPS6316854B2 JP S6316854 B2 JPS6316854 B2 JP S6316854B2 JP 56179619 A JP56179619 A JP 56179619A JP 17961981 A JP17961981 A JP 17961981A JP S6316854 B2 JPS6316854 B2 JP S6316854B2
- Authority
- JP
- Japan
- Prior art keywords
- extraction electrode
- shaft
- sliding member
- ion source
- drive motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/022—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56179619A JPS5882447A (ja) | 1981-11-11 | 1981-11-11 | イオン源における引出電極の位置および姿勢調整装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56179619A JPS5882447A (ja) | 1981-11-11 | 1981-11-11 | イオン源における引出電極の位置および姿勢調整装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5882447A JPS5882447A (ja) | 1983-05-18 |
| JPS6316854B2 true JPS6316854B2 (2) | 1988-04-11 |
Family
ID=16068915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56179619A Granted JPS5882447A (ja) | 1981-11-11 | 1981-11-11 | イオン源における引出電極の位置および姿勢調整装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5882447A (2) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0635363Y2 (ja) * | 1988-08-22 | 1994-09-14 | 日新電機株式会社 | イオン源 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4884299A (2) * | 1972-02-16 | 1973-11-09 | ||
| US4017403A (en) * | 1974-07-31 | 1977-04-12 | United Kingdom Atomic Energy Authority | Ion beam separators |
| JPS5812973B2 (ja) * | 1977-02-25 | 1983-03-11 | 三菱電機株式会社 | 冷陰極放電形イオン源装置 |
| FR2410359A1 (fr) * | 1977-11-28 | 1979-06-22 | Anvar | Electrode d'extraction mobile pour source d'ions |
-
1981
- 1981-11-11 JP JP56179619A patent/JPS5882447A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5882447A (ja) | 1983-05-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5231473A (en) | Lens barrel | |
| JPH0351050B2 (2) | ||
| DE2422166A1 (de) | Roentgenroehre mit drehanode | |
| JPS6316854B2 (2) | ||
| JPH0587413B2 (2) | ||
| CN118635657B (zh) | 一种辅助对焦型激光打标机 | |
| JP3412190B2 (ja) | イオン源の電極駆動機構 | |
| CN119786335A (zh) | 一种离子源可调式扫描控制装置 | |
| CN118809416A (zh) | 一种均压环旋压抛光装置 | |
| JP3117363B2 (ja) | 高速回転ア−ク溶接装置 | |
| US4203018A (en) | Method and apparatus for eroding inner and outer walls of work pieces | |
| JP3018224B2 (ja) | ベルトサンダー機における舵取ローラの揺動角度範囲調整装置 | |
| JPH0720837Y2 (ja) | イオン源 | |
| RU2121965C1 (ru) | Устройство для получения сажи, содержащей фуллерены | |
| CN220671796U (zh) | 一种影视拍摄用照明装置 | |
| CN115738094A (zh) | 一种基于光动力的皮肤诊疗设备 | |
| CN115139713A (zh) | 两栖机器人 | |
| CN217227571U (zh) | 一种建筑工程用的建筑材料转运装置 | |
| KR930006887B1 (ko) | 편향요오크 위치조절장치 | |
| CN219872090U (zh) | 一种伸缩式镜头结构 | |
| CN115070559B (zh) | 一种工业机器人磨削加工设备及系统 | |
| CN218315923U (zh) | 一种公共使用的一体打印机 | |
| KR102078633B1 (ko) | 휠체어 바퀴와 롤러의 간격 조절장치 | |
| JP2990086B2 (ja) | イオン注入装置 | |
| JPS6412453A (en) | Ion implanter |