JPS5886509U - surface inspection equipment - Google Patents

surface inspection equipment

Info

Publication number
JPS5886509U
JPS5886509U JP18127581U JP18127581U JPS5886509U JP S5886509 U JPS5886509 U JP S5886509U JP 18127581 U JP18127581 U JP 18127581U JP 18127581 U JP18127581 U JP 18127581U JP S5886509 U JPS5886509 U JP S5886509U
Authority
JP
Japan
Prior art keywords
lens system
light source
convergent lens
source device
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18127581U
Other languages
Japanese (ja)
Other versions
JPS6316964Y2 (en
Inventor
実 勝山
公一 釘宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP18127581U priority Critical patent/JPS5886509U/en
Publication of JPS5886509U publication Critical patent/JPS5886509U/en
Application granted granted Critical
Publication of JPS6316964Y2 publication Critical patent/JPS6316964Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の基本構成の概略図、第２図は試料面
の拡大断面図、第３図は試料面上の凹部に光線を与えた
時の光線の状態を示す試料の断面図、第４図および第６
図はこの考案の一実施例の概略図、第６図は第５図の装
置で得られた試料表面の映像図、第７図は試料表面をタ
リステップにより実測した試料の部分拡大断面図である
。 １・・・反射面を有する試料面、２・・・レンズ系、１
２・・・点光源、１３・・・集光レンズ系、１４・・・
点光源の実像、１５・・・集光レンズ系、１６・・・テ
レビカメラ。 第３図 し、Ｊ 第４図Fig. 1 is a schematic diagram of the basic configuration of this invention, Fig. 2 is an enlarged cross-sectional view of the sample surface, and Fig. 3 is a cross-sectional view of the sample showing the state of the light beam when it is applied to a recess on the sample surface. Figures 4 and 6
The figure is a schematic diagram of one embodiment of this invention, Figure 6 is an image of the sample surface obtained with the apparatus shown in Figure 5, and Figure 7 is a partially enlarged sectional view of the sample surface measured by Talystep. be. 1... Sample surface having a reflective surface, 2... Lens system, 1
2... Point light source, 13... Condensing lens system, 14...
Real image of point light source, 15... Condensing lens system, 16... Television camera. Figure 3 and J Figure 4

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）反射性試料面の前方に配置された収束レンズ系と
、この収束レンズ系の前記反射性試料面の反対側に配置
されてその焦点距離よりも収束レンズ系に接近して位置
する点光源装置と、この点光源装置の光線が前記収束レ
ンズ系を通して前記反射性試料面を入射しかつ反射した
反射光を結像検出する手段とを備えた表面検査装置。(1) A convergent lens system placed in front of the reflective sample surface, and a point located on the opposite side of the reflective sample surface of this convergent lens system and closer to the convergent lens system than its focal length. A surface inspection apparatus comprising: a light source device; and means for detecting an image of reflected light by which a light beam from the point light source device enters the reflective sample surface through the converging lens system and is reflected. （２）前記点光源装置はその実像点を前記収束レンズ系
の焦点距離よりも収束レンズ系に接近した位置に形成さ
せる集光レンズ系を有し、かつ前記反射光は前記点光源
装置の光軸上に結像する実用新案登録請求の範囲第（１
）項記載の表面検査装置。(2) The point light source device has a condenser lens system that forms its real image point at a position closer to the convergent lens system than the focal length of the convergent lens system, and the reflected light is the light of the point light source device. Utility model registration claim number (1) that is imaged on the axis
Surface inspection device described in ).
JP18127581U 1981-12-04 1981-12-04 surface inspection equipment Granted JPS5886509U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18127581U JPS5886509U (en) 1981-12-04 1981-12-04 surface inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18127581U JPS5886509U (en) 1981-12-04 1981-12-04 surface inspection equipment

Publications (2)

Publication Number Publication Date
JPS5886509U true JPS5886509U (en) 1983-06-11
JPS6316964Y2 JPS6316964Y2 (en) 1988-05-13

Family

ID=29978606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18127581U Granted JPS5886509U (en) 1981-12-04 1981-12-04 surface inspection equipment

Country Status (1)

Country Link
JP (1) JPS5886509U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020521143A (en) * 2017-05-24 2020-07-16 サントル ナシオナル ドゥ ラ ルシェルシェ シアンティフィクＣｅｎｔｒｅ Ｎａｔｉｏｎａｌ Ｄｅ Ｌａ Ｒｅｃｈｅｒｃｈｅ Ｓｃｉｅｎｔｉｆｉｑｕｅ Method for measuring curvature of reflective surface and related optical device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020521143A (en) * 2017-05-24 2020-07-16 サントル ナシオナル ドゥ ラ ルシェルシェ シアンティフィクＣｅｎｔｒｅ Ｎａｔｉｏｎａｌ Ｄｅ Ｌａ Ｒｅｃｈｅｒｃｈｅ Ｓｃｉｅｎｔｉｆｉｑｕｅ Method for measuring curvature of reflective surface and related optical device

Also Published As

Publication number Publication date
JPS6316964Y2 (en) 1988-05-13

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