JPS5891850U - Shutter devices for electron microscopes, etc. - Google Patents
Shutter devices for electron microscopes, etc.Info
- Publication number
- JPS5891850U JPS5891850U JP18777781U JP18777781U JPS5891850U JP S5891850 U JPS5891850 U JP S5891850U JP 18777781 U JP18777781 U JP 18777781U JP 18777781 U JP18777781 U JP 18777781U JP S5891850 U JPS5891850 U JP S5891850U
- Authority
- JP
- Japan
- Prior art keywords
- shielding plate
- optical axis
- field type
- magnetic field
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Shutters For Cameras (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示すシャッター装置の縦断
面であり、第２図シャッタ一部分の斜視図である。
１：上磁極片、２：下磁極片、計スペーサ、４゜５：絶
縁板、６，７：伝導板、８．９＝弾性体、 ゛１０：
電子線遮蔽板、１０ａ、１０ｂ：電子線遮蔽板折り曲げ
部、１１．１２：熱吸収棒、１３：絶縁板。FIG. 1 is a longitudinal section of a shutter device showing an embodiment of the present invention, and FIG. 2 is a perspective view of a portion of the shutter. 1: Upper magnetic pole piece, 2: Lower magnetic pole piece, total spacer, 4゜5: Insulating plate, 6, 7: Conductive plate, 8.9 = Elastic body, ゛10:
Electron beam shielding plate, 10a, 10b: bent portion of electron beam shielding plate, 11.12: heat absorption rod, 13: insulating plate.
Claims (1)
と略平行に配置された弾性体の夫々の下端に電子線に対
する非磁性遮蔽板を取り付けるこ、とにより該遮蔽板が
磁界型レンズ磁極片間隙内に懸垂されて光軸と垂直な面
を移動できるように構成し、前記遮蔽板に電流を供給す
る電源を設けたことを特徴とする電子顕微鏡等のシャツ
・−ター装置。 ２ 前記該遮蔽板は縁の一部が熱吸収棒との接触面を大
きくするため折り曲げた構造となっている実用新案登録
請求の範囲第１項記載の電子顕微鏡等のシャッター装置
。[Claims for Utility Model Registration] 1. Attaching a non-magnetic shielding plate for electron beams to the lower end of each of the elastic bodies arranged approximately symmetrically and approximately parallel to the optical axis of the magnetic field type lens. , wherein the shielding plate is suspended within the gap between the magnetic pole pieces of the magnetic field type lens and is movable in a plane perpendicular to the optical axis, and a power source is provided for supplying current to the shielding plate. Shirt-tar equipment such as microscopes. 2. The shutter device for an electron microscope or the like according to claim 1, wherein the shielding plate has a structure in which a part of the edge is bent to increase the contact surface with the heat absorption rod.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18777781U JPS5891850U (en) | 1981-12-16 | 1981-12-16 | Shutter devices for electron microscopes, etc. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18777781U JPS5891850U (en) | 1981-12-16 | 1981-12-16 | Shutter devices for electron microscopes, etc. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5891850U true JPS5891850U (en) | 1983-06-21 |
| JPS6242442Y2 JPS6242442Y2 (en) | 1987-10-30 |
Family
ID=29990868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18777781U Granted JPS5891850U (en) | 1981-12-16 | 1981-12-16 | Shutter devices for electron microscopes, etc. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5891850U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5597953U (en) * | 1978-12-28 | 1980-07-08 |
-
1981
- 1981-12-16 JP JP18777781U patent/JPS5891850U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5597953U (en) * | 1978-12-28 | 1980-07-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6242442Y2 (en) | 1987-10-30 |
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