JPS589237A - Optical information recording medium - Google Patents

Optical information recording medium

Info

Publication number
JPS589237A
JPS589237A JP56107039A JP10703981A JPS589237A JP S589237 A JPS589237 A JP S589237A JP 56107039 A JP56107039 A JP 56107039A JP 10703981 A JP10703981 A JP 10703981A JP S589237 A JPS589237 A JP S589237A
Authority
JP
Japan
Prior art keywords
film
recording medium
information recording
recording
optical information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56107039A
Other languages
Japanese (ja)
Inventor
Masao Mashita
真下　正夫
Noburo Yasuda
安田　修朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56107039A priority Critical patent/JPS589237A/en
Publication of JPS589237A publication Critical patent/JPS589237A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/2431—Metals or metalloids group 13 elements (B, Al, Ga, In)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24302—Metals or metalloids
    • G11B2007/24316—Metals or metalloids group 16 elements (i.e. chalcogenides, Se, Te)
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/242—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers
    • G11B7/243—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of recording layers comprising inorganic materials only, e.g. ablative layers
    • G11B2007/24318—Non-metallic elements
    • G11B2007/24328—Carbon
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2531—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising glass
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/253—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates
    • G11B7/2533—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of substrates comprising resins

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明は、党、熱等のエネルギービームの照射により記
録膜に穴もしくは！！ｔｉｌｌを形成することによって
情報モ記録するようにした元学的情報記録媒体に係り、
４Ｉ＃こ、感度の同上および長寿命化を図った党学的情
報記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention is a method for forming holes in a recording film by irradiating energy beams such as heat or heat. ! Relating to a scientific information recording medium that records information by forming a till,
4I# This relates to a political information recording medium that has the same sensitivity as above and a longer lifespan.

基板上＃Ｃ形成された薄膜層にエネルギービームを照射
し、記録されるべ會信号に対応したビット列を形成する
ようにした光学的情報記録媒体において、従来より記録
薄膜としてテルル（Ｔ・）を使用することが知られてい
る。Ｔ＠薄膜は最も低いエネルギーて所望のビットを形
成できる材料であり、この種の用途においては高感度材
料として極めて有望である。ここで感度とは、単位面積
轟りのビット形成に畳するエネルギー（ｍＪ／ｍ）で定
義すれる。Conventionally, tellurium (T) has been used as a recording thin film in optical information recording media in which a thin film layer formed on a #C substrate is irradiated with an energy beam to form a bit string corresponding to a target signal to be recorded. known to use. T@ thin film is a material that can form desired bits with the lowest energy and is extremely promising as a highly sensitive material for this type of application. Sensitivity here is defined as the energy (mJ/m) required to form a bit per unit area.

しかしながら、°Ｔ・は大気中に鉛量され、た場合、＠
嵩や水分により鹸化８ｔ′Ｌ、透男になる度合が遭い。However, if °T is the amount of lead in the atmosphere, then @
Depending on the bulk and moisture, the saponification rate is 8t'L, and the degree to which it becomes transparent is met.

記録薄膜として使用する場合、膜厚は５００Ａ　９度と
極めて・薄いため膜の鹸化で生じ九透ＩＲ度増加に起因
する膜の感度劣化は看しい、、すなわち膜が酸化される
と融解、蒸発１１＆が上昇するとともに透羽化Ｔるため
＃ｃｙｔａ収が少なくなり、ビット形成に景するエネル
ギーが大きくなり感度の劣化を米たす。また、たとえば
７０’Ｃ１相対温度８５％の雰囲気に放置した場合、約
５時間で感度が釣部％低下し、約す時間で約（資）％低
下してしまう。この友めＴｅ　ｉｌｌ　（Ｄ　＠！化防
止のために樵々の防止策がとられている。安定無機物質
で〒Ｃ膜をコートする方法は有効であるが感度低下と高
価なため実用化されていない。一方、プラスチックコー
トの場合は、熱伝導皐が小さく感度を損なう度合が小さ
く有利であるか酸素や水を比較的容易に透過させＴｅ１
１４Ｄ酸化防止−こは役立たない。When used as a recording thin film, the film thickness is extremely thin at 500A and 9 degrees, so there is no noticeable deterioration in sensitivity of the film due to an increase in IR intensity caused by saponification of the film.In other words, when the film is oxidized, it melts and evaporates. As 11& increases, the #cyta yield decreases due to transparentization, and the energy involved in bit formation increases, resulting in deterioration of sensitivity. For example, if the sensor is left in an atmosphere with a 70'C1 relative temperature of 85%, the sensitivity will decrease by 1% in about 5 hours, and will decrease by about 1% in about 5 hours. Preventive measures have been taken to prevent this problem. Coating the C film with a stable inorganic substance is effective, but it has not been put into practical use due to decreased sensitivity and high cost. On the other hand, in the case of plastic coating, the thermal conductivity is small and the degree of deterioration of sensitivity is small, which is advantageous, and oxygen and water permeate relatively easily.
14D antioxidant - This is useless.

本発明は上記問題を解決するためになさＩＬ友もので、
合成ｗｍ基板を使用しながら高感度かつ長寿命の元学的
情報記最媒体を提係することを目的とする。ゝ 本発明の光学的情報記録媒体は記録層を炭素０、硼素（
６）および水素（２）を含有するＴｅ展によって形成し
たことを特徴とし、これによって高感度と長寿命とを葦
ね債えたものである。The present invention was made to solve the above problems, and is an IL friend.
The purpose of this invention is to provide a highly sensitive and long-life scientific information storage medium using a synthetic WM substrate. The optical information recording medium of the present invention has a recording layer made of zero carbon and boron (
It is characterized by being formed by Te expansion containing hydrogen (6) and hydrogen (2), thereby ensuring high sensitivity and long life.

以下、図ｍを参照しながら、本発明の実施ｆ１につ舎詳
細に説明する。Hereinafter, the embodiment f1 of the present invention will be described in detail with reference to FIG.

５菖１図は本発明の一実施例を示す断面−ある。Figure 5 is a cross section showing one embodiment of the present invention.

図において、（１）は基板で本実施例では合成樹層の１
つであるアクリル板を用いた。しかし、他のプラスチッ
ク４［腋九はガラス板であっても作用効果は同じであり
、情報記銀の書き込み、読み出し方法によって適宜選択
すれば良い。（２）は、Ｃ，Ｂ、Ｈを含む情法記碌用Ｔ
ｏ膜であり、その厚さは十分な光反射率を得る１１Ｋに
厚く、かつ感度を損なわない＠度に薄いことが必要で２
００Ｘ〜１声ｍ１１度が遍轟である。In the figure, (1) is the substrate, and in this example, one of the synthetic tree layers.
An acrylic board was used. However, the operation and effect are the same even if the other plastic material 4 is made of a glass plate, and it may be selected as appropriate depending on the method of writing and reading the information storage. (2) is a T for Jōhōki that includes C, B, and H.
The film needs to be as thick as 11K to obtain sufficient light reflectance, and as thin as not to impair sensitivity.
00X to 1 voice m11 degrees is a full-throated sound.

Ｃ，ＢおよびＨを含む情報記碌用Ｔｅ薄膜（２）はＴｅ
　％ターゲットとしＣ，Ｂ、Ｈを含むガス例えばメタン
（ＣＨ，）とジボラン（Ｂ、Ｈ・）との混合ガス中でス
パッターすることにより得られる。ここでＴｅ膜中のＣ
，Ｂ、Ｈの含有量は０Ｍ４とＢ、ＩＩ・との滉合比およ
び印加高周波電力により自由に制御でも、例えばＣＨ＆
／　ＢＩＨ＠　＝１０　Ｏ混合比テ約０．３　Ｗ／ａｔ
　ＯＲＦ（１３，５６ＭＨｚ）電力を！・ターゲット基
板との間に印加すると釣部原子％のＣと約２原子％のＢ
を含有した膜を形成させることができる。この場合展の
組成式はＴ＠□−１−ｙ　Ｃｘ　Ｂ１０）と書き表わ丁
ことができ、膜が化学的に最も安定するＨの含有量はＸ
ｅｌによって決まる。ここでは膜中に水素ガス（Ｈ＊）
が発生するほど多量ｌこ含有させないかぎりＨ含有量は
任意に選ぶことができる。The information recording Te thin film (2) containing C, B and H is Te
% target and a gas containing C, B, and H, for example, a mixed gas of methane (CH,) and diborane (B, H.). Here, C in the Te film
, B, and H can be freely controlled by the combination ratio of 0M4 and B, II, and the applied high-frequency power.
/ BIH@ = 10 O mixing ratio approximately 0.3 W/at
ORF (13,56MHz) power!・When applied between the target substrate, atomic% of C and approximately 2 atomic% of B are applied between the target substrate.
It is possible to form a film containing . In this case, the compositional formula can be written as T@□-1-y Cx B10), and the H content at which the film is chemically most stable is
Determined by el. Here, hydrogen gas (H*) is present in the film.
The H content can be arbitrarily selected as long as it is not so large as to cause the occurrence of.

膜厚は、スパッタ時間に比例するので自由に制御できる
。The film thickness can be freely controlled because it is proportional to the sputtering time.

膜の光学定数はｗ４組成によって決まるので記録媒体の
光学的性質は、上記の実施例では約１ｏｏｏＸＯ膜厚で
反射率が最大となり記ＩＩ特性が最良となつ九。Since the optical constant of the film is determined by the w4 composition, the optical properties of the recording medium are such that in the above example, the reflectance is maximum at a film thickness of about 100XO, and the characteristics II are the best.

この条件で作成し良膜は非晶質であり、多結晶Ｔｅ膜に
比べて記録状態のビット周辺エツジ部が滑らかとなり、
情報読みとり時のノイスレペルを低くおさえることがで
きる。A good film made under these conditions is amorphous, and the edges around the bit in the recorded state are smoother than a polycrystalline Te film.
It is possible to suppress noise level when reading information.

第２図は％７０℃相対温度８５％の雰囲気で時間経過に
対する感度の劣化を従来のＴｏ４阜体するものと本発明
によるものとを比較した図である。FIG. 2 is a diagram comparing the deterioration of sensitivity over time in an atmosphere with a relative temperature of 70° C. and 85% between a conventional To4 sensor and a sensor according to the present invention.

本図における感度の劣化は、記録着こ必要なエネルギー
の逆数の初期値に対する変化として表わされてお′す、
Ｔｅ単体からなる従来の記録層、本発明による記録層と
もにアクリル基板上に形成された場合を示す。The deterioration in sensitivity in this figure is expressed as a change in the reciprocal of the energy required for recording relative to the initial value.
A case is shown in which both a conventional recording layer made of Te alone and a recording layer according to the present invention are formed on an acrylic substrate.

本図かられかるようにＴｅ単体からなる記録層の場合１
国中（ム）で示すように時間経過とともに感度が劣化す
る。これは時間とともに局部的な透明領域（シミ）が発
生するためで約１７０時間経過後には全面にわたって劣
化する。As can be seen from this figure, in the case of a recording layer consisting of only Te, 1
As shown in Kuninaka (Mu), sensitivity deteriorates over time. This is because local transparent areas (stains) occur over time, and the entire surface deteriorates after about 170 hours.

一方、本発明によるＣ、ＢおよびＨを含有するＴ・薄ｌ
ＩＯ場合は、同図ＣＢ）で示すように１０００時閏経過
量もＴｅ薄薄膜鬼られた様なりミは全く認められず、常
にほぼ一定の感度を保持しており、長寿命化を達成する
ことがわかる。On the other hand, T-thin l containing C, B and H according to the present invention
In the case of IO, as shown in CB) in the same figure, there is no visible distortion of the Te thin film even after 1000 hours, and the sensitivity is always maintained almost constant, achieving a long life. I understand that.

本発明による上記実施例の感度は従来Ｔｅｌ［ｆ用いた
記録媒体、と同等か、またはわずか上まわる値を示して
おり、本発明によるＣ、ＢおよびＨ８含有ＴるＴａ薄薄
膜用い大元学記録厳体は高感度であること、も兼ね備え
ている。The sensitivity of the above embodiment according to the present invention is equivalent to or slightly higher than that of the recording medium using the conventional Tel[f], and the sensitivity of the recording medium using the conventional Tel Strict record keeping is also highly sensitive.

以上述べたように本発＠ＩこよるＣ、ＢｉｄよびＨを含
有るＴｅ薄薄膜用いた記録媒体は優れ比感度と非常に長
い寿命を得ることができる。ただし；５ＩＩ子％以下の
Ｃを含有する膜ではＴｅ膜との有意差は見られず、また
４０原子％以上含有する膜では感度の低下がみられ九。As described above, the recording medium using the Te thin film containing C, Bid and H according to the present invention can have excellent specific sensitivity and a very long life. However, no significant difference from the Te film was observed in films containing less than 5% of C, and a decrease in sensitivity was observed in films containing more than 40 atom%.

Ｃと■は膜の耐湿性と高感度化、Ｂは膜の結晶質化と高
感度化にそれぞれ主に役立っていると考えられる。Ｂは
１原子％以下では効果がなく、薗原子％以上では寿命を
短かくする。It is thought that C and ■ are mainly useful for increasing the film's moisture resistance and sensitivity, and B is mainly useful for crystallizing the film and increasing its sensitivity, respectively. B has no effect when it is less than 1 atomic %, and shortens the life when it is more than 1 atomic %.

上記の例ではＣＨ，とＢ！■−の混合ガス中での反応性
スパッタリングによる薄膜形Ｉｉｔ法について述べた。In the above example, CH, and B! (2) The thin film type Iit method using reactive sputtering in a - mixed gas has been described.

この他、上記記録膜特性を示す膜の形成方法として、ｃ
）Ｉ４とＢｄ（＠モ含むガスと、　Ｔｅの蒸気とをプラ
ズマ状ｌこして基板にＣ，ＢおよびＨを含むＴｅ１ＩＩ
を形成する方法でも可能である。更曇ζＣＨ，，ＢＪ・
およびＴｅ（ＣＨａ）＊　（ジメチルテルル）を用いた
気相成長またはプラズマ気相成長によっても形成可能で
ある。あるいは、Ｔｅ、　Ｃ，ＢおよびＨ原子の全部ま
たは一部をイオン化してビーム状として基板上に轟てて
上記特性を有する腰を形成することも可能である。上記
ＣＨ，ガスはＣ，）１４（エチレン）。In addition, c
) A gas containing I4 and Bd (@Mo) and Te vapor are combined into a plasma to form a Te1II containing C, B and H on the substrate.
It is also possible to form a SaragumoζCH,,BJ・
It can also be formed by vapor phase epitaxy using Te(CHa)* (dimethyltellurium) or plasma vapor phase epitaxy. Alternatively, it is also possible to ionize all or some of the Te, C, B and H atoms and beam them onto the substrate to form a beam having the above properties. The above CH, gas is C,)14 (ethylene).

ＣａＯ置（アセチレン）等で、家たＴ＠（ＣＨａ）ｍ　
Ｔｅ（Ｃｄ（ｓ）雪（ジエチルテルル）等で置き換える
ことも可■である。With CaO (acetylene), etc., it was
It is also possible to replace it with Te(Cd(s), snow (diethyl tellurium), etc.).

【図面の簡単な説明】[Brief explanation of the drawing]

第１１！ｌは本発明の実ＩＩ例を示す断面図、１８２図
は１１１１ｍに示したｅ曽媒体と従来の記録媒体との寿
命についての比ＩＩ！図である。 ｌ・・・基板 ２…Ｔ・−〇　−Ｂ−）１展 代塩入　升虐士　　細近ＪＩｌ値　はｘｌｈ１名手　続
　補　正　書（自発） 特許庁長官　若極相夫殿 １６　　事件の表示 昭和５６年特願第１０７０３９号 ２、発明の名称 光学的情報記録媒体 ３、補正をする者 事件との関係　特許出願人 （３０７）東京芝浦電気株式会社 ４、代理人 〒１００ 東京都千代田区内幸町１−１−６ 東京芝首電気株式会社東京事務所内 ６、補正の内容 （１）　　特許請求の範囲を別紙のとうシ補正する。 （２）明細書＃ｆ２頁＃！２行目の「凹部」を「例えば
凹部等の変形部」と訂正する。 以上 ４１Ｉ＃！ｆ請求の範囲 （１）　　基板上に記俺膜ｔＳ成し、前記記録膜にエネ
Ｍギービームを照射し、穴もしくは変形部を形成して情
報を記録する光学的記録用部材において、前記記録膜が
テルル、縦索、硼素および水素を含有することｉ−Ｗ微
とする光学的情報配録媒体。 （２）基板はガラスもしくは合成樹脂であること′ｔＩ
ｐｉ徴とする特許請求の範囲菖１項記載の光学的情報記
録媒体。 （３）記録膜の組成はＴｅ１−ｘ−ｙ　０ｘＢｙ（Ｈ）
と表わしたとき、炭素（０）の含有量は、５〜４０原子
パーセント、硼素ＣＢ）の含有量は１〜５０原子パーセ
ントであること１に４！微とする特許請求の範囲第１項
記載の光学的情報記録媒体。 （４）記録膜の厚さは２００Ａないし１μｍであること
ｔ−特徴とする特許請求の範囲第１項記載の光学的情報
記録媒体。11th! Figure 182 is a cross-sectional view showing Example II of the present invention, and Figure 182 is the ratio of the lifespan of the medium and the conventional recording medium shown at 1111m. It is a diagram. l...Substrate 2...T・-〇-B-)1 Exhibition Shioiri Masochika JIl value is xlh1 name procedure amendment (self-motivated) Commissioner of the Japan Patent Office Mr. Wakagoku Aio 16 Display of the case 1972 Patent Application No. 107039 2, Name of the invention Optical information recording medium 3, Relationship with the amended person case Patent applicant (307) Tokyo Shibaura Electric Co., Ltd. 4, Agent 1-1 Uchisaiwai-cho, Chiyoda-ku, Tokyo 100 1-6 Tokyo Shibakubi Electric Co., Ltd. Tokyo Office 6. Contents of Amendment (1) The scope of the claims will be amended in the attached document. (2) Specification #f2 page #! Correct "recess" in the second line to "deformed part, such as a recess." That’s all 41I#! fClaims (1) An optical recording member in which a recording film tS is formed on a substrate, the recording film is irradiated with an energy beam, and information is recorded by forming holes or deformed parts. An optical information storage medium containing tellurium, longitudinal fibers, boron and hydrogen. (2) The substrate must be glass or synthetic resin.
The optical information recording medium according to claim 1, wherein the optical information recording medium has a pi characteristic. (3) The composition of the recording film is Te1-x-y 0xBy(H)
When expressed as, the content of carbon (0) is 5 to 40 atomic percent, and the content of boron (CB) is 1 to 50 atomic percent.1 to 4! The optical information recording medium according to claim 1, wherein the optical information recording medium is small. (4) The optical information recording medium according to claim 1, characterized in that the thickness of the recording film is 200 Å to 1 μm.

Claims (1)

【特許請求の範囲】[Claims] （１）　　基板上に記録膜を形成し、前記記録膜にエネ
ルギービームを照射し、穴もしくは凹部そ形成して情報
を記録する元学的記鑞用部材において、・前記記録膜が
テルル、炭素、硼素右よび水素を含有することを特徴と
する光学的情報記録媒体。 （２７ａｌｌはガラスもしくは合ｔｉｔ＊脂である２と
を特徴とする特許１求の範囲第１項記載の一学的情報紀
鎌媒体。 （３：　　記録膜の組成はＴｌ！１ｌ−Ｘ−Ｆ　ＣｘＢ
ｙ（Ｈ）と表わし九とき、炭素（Ｃ）の含有量は、５〜
４６□Ｊ［子パー篭ント、硼ｆＩＡＯＢ）の含有量は１
〜ＳＯ原子パーセントであることを特徴とする褥許讃、
求の一囲’ｍｉ′現記−の光学的情報記録媒体。□　　
　　　　−（４）　　記録膜の厚゛さは２００Ｈないし
１−鷹であるζ、とを５′特黴゛とする特許請求の範囲
第１項記載の光学的ｉ報記録゛媒体。　　　　　　　゛(1) In an optical recording member in which a recording film is formed on a substrate, and information is recorded by irradiating the recording film with an energy beam to form holes or recesses, the recording film is made of tellurium, carbon , an optical information recording medium containing boron and hydrogen. (27all is a glass or a titanium resin. 2) A scientific information storage medium described in item 1 of the scope of patent 1. (3: The composition of the recording film is Tl!1l-X-F CxB
When expressed as y(H), the content of carbon (C) is 5 to 9.
The content of 46□J [child part, 硼fIAOB] is 1
〜SO atomic percent,
Optical information recording media of current demand. □
(4) The optical i-information recording medium according to claim 1, wherein the recording film has a thickness of 200H to ζ of 1 mm.゛
JP56107039A 1981-07-10 1981-07-10 Optical information recording medium Pending JPS589237A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56107039A JPS589237A (en) 1981-07-10 1981-07-10 Optical information recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56107039A JPS589237A (en) 1981-07-10 1981-07-10 Optical information recording medium

Publications (1)

Publication Number Publication Date
JPS589237A true JPS589237A (en) 1983-01-19

Family

ID=14448963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56107039A Pending JPS589237A (en) 1981-07-10 1981-07-10 Optical information recording medium

Country Status (1)

Country Link
JP (1) JPS589237A (en)

Similar Documents

Publication Publication Date Title
JPS5933320B2 (en) optical information recording medium
JPS61115252A (en) information recording medium
JPS63181137A (en) optical information recording medium
JPH05217211A (en) Phase change optical recording medium
JP2001322357A (en) Information recording medium and method of manufacturing the same
US6660451B1 (en) Optical information recording medium
JPS589237A (en) Optical information recording medium
TWI295799B (en)
TW200416726A (en) Optical information-recording media and optical information-recording /reproduction apparatus
JPS5871194A (en) Optical information recording medium
JPS6025278B2 (en) optical information recording medium
JP2000067466A (en) Optical recording medium and manufacturing method thereof
JPS589236A (en) Optical information recording medium
TWI290714B (en) Optical recording medium
JPS588694A (en) Optical information recording medium
JPS61110349A (en) information recording medium
JPS589235A (en) optical information recording medium
JPS63188836A (en) Optical recording medium
JPS589238A (en) Optical information recording body
JPH01169748A (en) Optical information recording medium
JPS62283431A (en) Optical recording medium
JP2798247B2 (en) Optical recording medium
JPS63176185A (en) Information recording material
JPS5871195A (en) Optical information recording medium
JPH01290135A (en) Optical information recording medium