JPS589385B2 - density - Google Patents
densityInfo
- Publication number
- JPS589385B2 JPS589385B2 JP50115833A JP11583375A JPS589385B2 JP S589385 B2 JPS589385 B2 JP S589385B2 JP 50115833 A JP50115833 A JP 50115833A JP 11583375 A JP11583375 A JP 11583375A JP S589385 B2 JPS589385 B2 JP S589385B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- measurement
- measure
- temperature range
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 3
- 238000009835 boiling Methods 0.000 claims 1
- 238000007710 freezing Methods 0.000 claims 1
- 230000008014 freezing Effects 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Description
【発明の詳細な説明】
この発明は電子部品の電気的特性値をある温度範囲にお
いて精度よく測定する装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an apparatus for accurately measuring electrical characteristic values of electronic components within a certain temperature range.
従来電子部品の電気的特性値をある温度範囲において測
定する場合、恒温槽の内部の空気まだは、窒素等の気体
雰囲気中に前記電子部品および熱電対等の温度検出器を
入れて測定していたが、恒温槽内部の温度の均一性が容
易には得られず前記電子部品と前記温度検出器の温度に
若干の差が生じる事が多かった。Conventionally, when measuring the electrical characteristic values of electronic components over a certain temperature range, the electronic components and temperature detectors such as thermocouples were placed in a gas atmosphere such as nitrogen to measure the air inside the thermostat. However, temperature uniformity inside the thermostatic chamber cannot be easily achieved, and a slight difference in temperature often occurs between the electronic components and the temperature detector.
また前記温度範囲が、前記恒温槽内部の気体雰囲気の露
点以下を含む場合、前記雰囲気中に含まれる水蒸気が霜
又は水滴となって前記電子部品及び測定系の一部に付着
し、リーク電流が流れ精度よく測定する事が困難であっ
た。Furthermore, if the temperature range includes a temperature below the dew point of the gas atmosphere inside the constant temperature oven, water vapor contained in the atmosphere becomes frost or water droplets and adheres to the electronic components and a part of the measurement system, causing a leakage current. It was difficult to measure the flow accurately.
この発明は従来方法のこれらの欠点を解消し、精度よく
測定することのできる電子部品の測定装置を提供するこ
とを目的とする。The object of the present invention is to eliminate these drawbacks of the conventional methods and provide a measuring device for electronic components that can measure with high precision.
以下この装置の構成および測定法について説明する。The configuration of this device and the measurement method will be explained below.
図は本発明電子部品の測定装置の主要部の斜視図で絶縁
性の液体を満すガラスあるいは金属性の容器１、試料固
定台２、熱電対等の温度検出器３、ソケット４および導
線５から成り、導線５および温度検出器３の前記容器１
からの取シ出し口は密閉されている。The figure is a perspective view of the main parts of the electronic component measuring device of the present invention, including a glass or metal container 1 filled with an insulating liquid, a sample fixing table 2, a temperature detector 3 such as a thermocouple, a socket 4, and a conductor 5. The container 1 consists of a conductor 5 and a temperature sensor 3.
The outlet from which it is taken out is sealed.
前記装置を恒温槽内に入れ導線５および温度検出器３の
恒温槽からの取り出し口は密閉して使用する。The device is placed in a thermostatic oven, and the openings from which the conductor 5 and temperature detector 3 are taken out from the thermostatic oven are sealed.
測定は前記容器１にフレオンなどの絶縁性の液体を満し
ソケット４に被測定試料を取りつけ、温度検出器３で温
度を測定しながら被測定試料の電気的特性値を測定する
ことにより行なう。The measurement is carried out by filling the container 1 with an insulating liquid such as Freon, attaching the sample to be measured to the socket 4, and measuring the electrical characteristic values of the sample while measuring the temperature with the temperature detector 3.
この装置を用いることにより、前記電子部品の表面およ
び測定系の一部にリーク電流が流れるのを防ぎ、かつ気
体中で測定する従来の装置より温度の均一性が良い為前
記電子部品と前記温度検出器３の温度を同一に保ちなが
ら測定できるので測定の精度が上がる。By using this device, it is possible to prevent leakage current from flowing to the surface of the electronic component and a part of the measurement system, and to achieve better temperature uniformity than conventional devices that measure in gas. Since measurement can be performed while keeping the temperature of the detector 3 the same, measurement accuracy is improved.
次にこの装置を用いた測定例を示す。Next, an example of measurement using this device will be shown.
この例で用いた試料は密封容器に窒素を雰囲気として封
入したモノリシツク集積回路である。The sample used in this example is a monolithic integrated circuit in which a sealed container is filled with nitrogen as an atmosphere.
前記密封容器内雰囲気中の水蒸気が低温において前記密
封容器内の半導体チップ表面に付着し電流が流れるがこ
の電流値の温度変化を求めるのが目的であった。Water vapor in the atmosphere inside the sealed container adheres to the surface of the semiconductor chip in the sealed container at low temperatures, causing a current to flow, and the purpose was to determine the temperature change in this current value.
この測定を従来の方法で行なうと、低温において前記密
封容器表面および測定系の一部に露が付着し、測定目的
である前記密封容器内の程度あるいはそれ以上のリーク
電流が前記密封容器表面および測定系の一部に流れ精度
よい測定は不可能であった。If this measurement is performed using the conventional method, dew will adhere to the surface of the sealed container and a part of the measurement system at low temperatures, and a leakage current of the same level or higher than that in the sealed container, which is the object of measurement, will occur on the surface of the sealed container and a portion of the measurement system. It was impossible to measure the flow with high accuracy in a part of the measurement system.
また測定温度範囲全体において恒温槽の温度の不均一性
により再現性の良い測定が困難であった。Furthermore, it was difficult to measure with good reproducibility due to the non-uniformity of the temperature of the constant temperature bath over the entire measurement temperature range.
この発明による装置を用いて測定を行なうと温度範囲−
５０℃〜＋５０℃において数百ピコアンペアの電流の温
度変化が精度良く測定出来た。When measuring with the device according to the invention, the temperature range -
Temperature changes in a current of several hundred picoamperes could be measured with high accuracy between 50°C and +50°C.
以上詳細に説明した様にこの発明による装置を用いると
従来の測定に比べある温度範囲における電気的特性値を
格段に精度良く測定出来る。As explained in detail above, when the apparatus according to the present invention is used, electrical characteristic values in a certain temperature range can be measured with much higher precision than conventional measurements.
図は本発明電子部品の測定装置の主要部の斜視図である
。
１・・・・・・容器、２・・・・・・試料固定台、３・
・・・・・温度検出器、４・・・・・・ソケット、５・
・・・・・導線。The figure is a perspective view of the main parts of the electronic component measuring device of the present invention. 1... Container, 2... Sample fixing stand, 3.
...Temperature detector, 4...Socket, 5.
...Conducting wire.
Claims (1)
液体に浸漬された被測定電子部品用ソケアトと温度検出
器とを備えた容器が恒温槽内に設置されていることを特
徴とする電子部品の測定装置。1. An electronic device characterized in that a container equipped with a temperature detector and a socket for an electronic component to be measured immersed in an insulating liquid having neither a freezing point nor a boiling point within the measurement temperature range is installed in a constant temperature bath. Measuring equipment for parts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50115833A JPS589385B2 (en) | 1975-09-25 | 1975-09-25 | density |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50115833A JPS589385B2 (en) | 1975-09-25 | 1975-09-25 | density |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5240158A JPS5240158A (en) | 1977-03-28 |
| JPS589385B2 true JPS589385B2 (en) | 1983-02-21 |
Family
ID=14672237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50115833A Expired JPS589385B2 (en) | 1975-09-25 | 1975-09-25 | density |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS589385B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63194179U (en) * | 1987-06-03 | 1988-12-14 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5627985B2 (en) * | 1972-11-16 | 1981-06-29 |
-
1975
- 1975-09-25 JP JP50115833A patent/JPS589385B2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63194179U (en) * | 1987-06-03 | 1988-12-14 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5240158A (en) | 1977-03-28 |
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