JPS5893872A - sputtering equipment - Google Patents

Abstract

PURPOSE:To permit higher speed sputtering of ferromagnetic materials by providing covers for magnetic poles of the same material as that of a target on the magnetic pole parts appearing on the front surface of the target and interposing metallic blocks having good heat conductivity between the covers and a base plate in tight contact therewith. CONSTITUTION:An annular magnet 2, a columnar magnet 3 and a target 4 consisting of a ferromagnetic material are mounted on a stainless steel base plate 1 having magnetism. Further, an annular copper block 5, a columnar copper block 6 and a copper block 7 are provided on the plate 1 respectively in tight contact with the magnets 2,3. Covers 8, 9 for magnetic poles of the same or resembling material as or to that of the target 4 are provided respectively on the magnets 2,3 and the blocks 5, 6, 7. The tight contact with the covers 8, 9 and the blocks 5, 6, 7 as well as the blocks 5, 6, 7 and the plate 1 are improved. The plate 1 is made coolable using water. Then the temp. elevation of the covers 8, 9 and the magnets 2, 3 during sputtering is suppressed and the high speed sputtering of the ferromagnetic material is made possible.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sputtering apparatus, particularly a sputtering device that uses two sputtering devices as a target.
The present invention relates to a sputtering device suitable for using ferromagnetic materials.

Sputtering equipment is widely used to create thin films of metals or non-metals. In these devices, in order to increase the speed of sputtering and increase the efficiency of film formation, a pair of magnetic poles is placed on the front side of the target, and a pair of magnetic poles is placed on the back side of the target, and a pair of magnetic poles is placed on the back side of the target. It uses the emitted magnetic field.

However, when the target is a ferromagnetic material, the influence of the magnetic pole on the back surface of the target is difficult to reach the front surface. For this reason, various ideas have been devised to utilize magnetic fields when sputtering ferromagnetic materials.

One method is to place magnetic poles in front of the target. However, in this case, there is a risk that the material on the magnetic pole surface will be sputtered, so to avoid this, the magnetic pole portion is covered with a material that is compositionally the same as or similar to the target.

In a sputtering apparatus in which the magnetic pole is covered in this way, sputtering of two ferromagnetic materials can be performed at a high speed, and moreover, the magnetic pole itself can be covered with a thin film. It is also possible to prevent the data from being tarred. However, if the sputtering rate is further increased, the temperature of the material covering the magnetic pole increases, which further increases the temperature of the magnetic pole, which may adversely affect the characteristics.

Therefore, an object of the present invention is to arrange a magnetic pole in front of a target as described above, cover the front surface of this magnetic pole with a material that is compositionally the same as or similar to that of the target, and furthermore, it is possible to dispose a magnetic pole on the front surface of a target and to cover the same or similar material to the target. The object of the present invention is to provide an apparatus capable of suppressing the temperature rise during futtering, and thus capable of faster futtering of ferromagnetic materials.

Therefore, a part of the apparatus of the present invention has the following configuration. That is, a metal block with excellent thermal conductivity and at least a non-ferromagnetic material is placed surrounding or along the magnetic pole in front of the target, and the target material is placed so as to cover both the top surface of this block and the magnetic pole that is aligned with the block. Attach a magnetic pole cover of the same or similar composition. It is important that the metal block is in close contact with both the magnetic pole cover and the metal part of the surface or base that holds the targ.

Next, a detailed explanation will be given with reference to the drawings.

FIG. 1 is a cross-sectional view of the configuration of an embodiment of the present invention. In Fig. 1, a base 1 made of magnetic stainless steel
There is a ring magnet near the outer periphery 2. Pillar magnet in the center 3. A target 4 made of permalloy is attached. Further, on this base 1, an annular copper block 5 is disposed along the inside of the annular magnet 2, and columnar copper blocks 6 are disposed at several locations on the outside of the annular magnet 2 in contact with the magnet 2. Further, there is a copper block 7 surrounding the central columnar magnet 3.

An annular cover 8 is placed around the magnetic pole surface of the magnet 2 and the top surfaces of the copper blocks 5 and 6. This cover 8 is made of the same material as the target 4.

Also, the magnetic pole face of the central magnet 3 and the steel block 7 surrounding it
A magnetic pole cover 9 made of the same material is also applied to the magnetic pole cover 9 .

What is important when configuring these?

The purpose of assembly is to improve the close contact between the magnetic pole covers 8, 9 and the copper blocks 5, 6, and the close contact between the copper block and the base 1, so as not to impair heat conduction. This can be done by making the heights of the annular magnets 2 and 3 slightly lower than the heights of the copper blocks 5 and 6, since the base has considerable magnetism.
, 9 and the base 1 are strongly attracted to each other via the magnets 2 and 3, whereby this can be easily realized. The purpose of the magnet is to create a magnetic field parallel to the tarde in front of the target.

Naturally, the magnetization directions of magnet 2 and magnet 3 are opposite. Furthermore, the base 1 can be cooled by water.

In the example shown in FIG. 1, the magnetic pole covers 8 and 9 were sufficiently cooled, and no temperature rise that would affect the characteristics of the magnets 2 and 3 was observed.

FIG. 2 is a cross-sectional view of the structure of another embodiment of the present invention. In FIG. 2, the target 14 is embedded in a base 11 equipped with a cooling mechanism, and the other part of the base 11 is equipped with an annular magnet 12. Annular copper blocks 15 and 1 are placed in close contact along the inner and outer surfaces of the magnet 12, respectively.
5' Central offshore magnet 13. A copper block 17 surrounding the magnet is attached. A magnetic pole cover 18 made of the same material as the target covers these magnetic pole faces and the copper block.
and 19 are almost the same as in the previous embodiment.

This example also had an excellent cooling effect, and therefore it was easy to increase the speed of suction and stumbling.

FIG. 3 is a cross-sectional view of a configuration of still another embodiment of the present invention. In FIG. 3, the target 24 constitutes a base (corresponding to 1 in FIG. 2) equipped with a cooling mechanism, and other parts are the same as in the embodiment shown in FIG. In this embodiment, the target 24 serves as a base, which simplifies the structure and provides an excellent cooling effect, making it easy to greatly increase the snorting speed.

As is clear from the above embodiments, in the present invention, the heat generated in the metal plate covering the magnetic pole is quickly guided to the cooling mechanism of the base through the copper block. Therefore, as explained in the description of the embodiment, the metal plate of the magnetic pole cover and the copper block or the copper block and the base portion are in close surface contact.

Very low resistance to heat conduction.

In the above-described embodiments, copper was used as the material for the blocks, but any metal with excellent thermal conductivity can be used instead of copper. For example, aluminum gives good results, but other metals may also be used. Although many variations are possible in the shape of the block and the part to which it is attached, the heat generated in the metal plate that covers the magnetic pole placed in front of the tardoubt is transferred to the cooling section through the metal block with good heat conduction. It is clear that all sputtering apparatuses with delivery mechanisms are within the scope of the present invention.

[Brief explanation of drawings]

1, 2, and 3 are all cross-sectional views showing the construction of an embodiment of the present invention. Explanation of symbols: 1 is the base, 2 is the ring magnet, 3 is the columnar magnet,
4 is a target, 5, 5', 6, and 7 are copper plates, 8 and 9 are magnetic pole covers, and 14.24 is a target. Figure 1 Figure 2 Figure 9P! J3 diagram

Claims (1)

[Claims] 1. At least one pair of magnetic poles is provided near the target, at least a part of the magnetic poles is installed in front of the target, and a portion of the magnetic poles appearing in front of the target A magnetic pole cover made of the same or similar material to the target material is provided. and between this magnetic pole cover and a target near the magnetic pole or a base on which the target is placed. A sputtering device characterized by closely interposing metal blocks with good thermal conductivity.