JPS5896754A - Airtightly sealed package - Google Patents

Airtightly sealed package

Info

Publication number
JPS5896754A
JPS5896754A JP56194429A JP19442981A JPS5896754A JP S5896754 A JPS5896754 A JP S5896754A JP 56194429 A JP56194429 A JP 56194429A JP 19442981 A JP19442981 A JP 19442981A JP S5896754 A JPS5896754 A JP S5896754A
Authority
JP
Japan
Prior art keywords
wiring board
weld ring
ring
shape
square
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56194429A
Other languages
Japanese (ja)
Other versions
JPH0216585B2 (en
Inventor
Yoshitaka Fukuoka
義孝 福岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56194429A priority Critical patent/JPS5896754A/en
Publication of JPS5896754A publication Critical patent/JPS5896754A/en
Publication of JPH0216585B2 publication Critical patent/JPH0216585B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/60Seals

Landscapes

  • Ceramic Products (AREA)

Abstract

PURPOSE:To mount IC chips in high density by a method wherein the outside circumferential shape of a welding ring to be provided on a wiring substrate having a special external form of circle, ellipse, etc., is formed in a polygon having sides facing each other in parallel and being other than a square or a rectangle. CONSTITUTION:The external form of an Al2O3 ceramic wiring substrate 6-1 is a circle, and the welding ring 6-4 for airtightly sealing having the equal coefficient of thermal expansion is soldered with silver solder 6-5 to the circumferential part. When the external form of the welding ring 6-4 is formed in a regular octagon, for example, the area possible to mount can be secured effectively, and the IC chips can be mounted in high density. The substrate having the equal coefficient of thermal expansion is positioned to the sealing ring, and the whole is sealed airtightly to complete.

Description

【発明の詳細な説明】 発明の属する技術分野 本発明は、アルミナセラミック等の配線基板上にICチ
ップ等のチップ部品を少なくとも1個以上実装し、キャ
ップ等の基体を前記アルミナセラミック等の配線基板上
に装着し、全体を気密封止する気密封止パッケージの構
造に関するものである0 従来技術とその問題点 近年、電子機器の小型、軽量化、高信頼性化の要求が著
しく高まってきており、アルミナセラミック等の高密度
多層配線基板上に電子的機能要素であるIC等をチップ
状態で少なくとも一個以上実装し、全体を気密封止する
所謂るマルチチップパッケージング技術が開発されつつ
ある。この様なパッケージを気密封止する手法としては
、従来エポキシあるいはプラスチックによるモールド手
法によるものがあるが、これ等は信頼性の観点がらする
と、さほど好ましいものとは思われなく、より信頼性の
良い方法としてはハンダ付け、あるいは低融点ガラスに
よる手法も開発されつつあるが、さらに高信頼性を要求
される場合は、ウェルディング(溶接)手法による気密
封止パッケージが開発されつつある。この場合、従来第
1図に示す如く、アルミナセラミック等の配線基板1−
1上のICチップ等のチップ部品が塔載される導体パタ
ーン1−2の周辺部に正方形あるいは長方形のリング状
の導体パターン1−3を形成し、当該正方形あるいは長
方形のリング状の導体パターン1−3上に第2図に示す
如く、アルミナセラミック等の配線基板1−1と熱膨張
係数のほぼ等しいコパールあるいはFe−Ni 42ア
ロイ弄の前記アルミナセラミック等の配線基板1−1の
周辺部のIE正方形るいは長方形のリング状の導体パタ
ーンl−3の導体パターン幅より小さい幅を有し、0.
1朋〜数順の厚さを有する正方形あるいは長方)bのリ
ング状の溶接用の金属基体であるウェルドリンク2−4
を、例えば、エツチングあるいは抜き型にて形成し、例
えばAgロー等の接着剤3−5により接着固定する事に
より、ウェルドリング:3−4(2−4)をアルミナセ
ラミック等の配線基板3−1上に形成していた。第3図
はその断面図を示すものである。以上の様にして形成し
たアルミナセラミック等の配線基板3−1上・・〕ウェ
ルドリンク3−4上に、例えば第4図(a)あるいは(
b)等の断面形状を有する前記ウェルドリンク3−4及
びアルミナセラミック等の配線基板3−1と熱膨張係数
のほぼ等しい例えばコバールあるいはFe−Ni42ア
ロイ等の正方形あるいは長方形の外形形状を有するキャ
ップ等の基体4−6−2又は4−6−bを、第5図に示
す如くキャップ等の基体5−6の周辺部と、ウェルドリ
ンク5−4の周辺部を位置合わせする事により溶接装置
の対向電極5−7をiE正方形るいは長方形の相対向す
る周辺に押し当てて配線基板5−1を塔載している溶接
装置のステージを直進させて、溶接(ウェルディング)
する事により前記パッケージ全体を気密封止していた。
DETAILED DESCRIPTION OF THE INVENTION Technical field to which the invention pertains The present invention is directed to mounting at least one chip component such as an IC chip on a wiring board made of alumina ceramic or the like, and attaching a base such as a cap to the wiring board made of alumina ceramic or the like. This relates to the structure of a hermetically sealed package that is attached to the top of the package and hermetically seals the entire package.0 Conventional technology and its problemsIn recent years, the demand for smaller, lighter, and more reliable electronic devices has increased significantly. A so-called multi-chip packaging technology is being developed in which at least one electronic functional element such as an IC is mounted in the form of a chip on a high-density multilayer wiring board made of alumina ceramic or the like, and the whole is hermetically sealed. Conventional methods for hermetically sealing such packages include molding with epoxy or plastic, but these are not considered to be very desirable from a reliability standpoint; Methods such as soldering or using low-melting glass are being developed, but if even higher reliability is required, hermetically sealed packages using welding are being developed. In this case, conventionally, as shown in FIG.
A square or rectangular ring-shaped conductor pattern 1-3 is formed around the conductor pattern 1-2 on which a chip component such as an IC chip on the top 1 is mounted, and the square or rectangular ring-shaped conductor pattern 1 As shown in FIG. 2, the periphery of the wiring board 1-1 made of copper or Fe-Ni 42 alloy, which has approximately the same coefficient of thermal expansion as the wiring board 1-1 made of alumina ceramic, etc. It has a width smaller than the conductor pattern width of the IE square or rectangular ring-shaped conductor pattern l-3, and has a width of 0.
Weld link 2-4, which is a square or rectangular (b) ring-shaped metal base for welding with a thickness ranging from 1 to a number.
The weld ring 3-4 (2-4) is attached to the wiring board 3-4 made of alumina ceramic or the like by, for example, forming the weld ring 3-4 (2-4) with an etching or cutting die and fixing it with an adhesive 3-5 such as Ag wax. It was formed on 1. FIG. 3 shows a sectional view thereof. 4(a) or (
b) A cap having a square or rectangular external shape made of Kovar or Fe-Ni42 alloy, etc., which has a coefficient of thermal expansion approximately equal to that of the well link 3-4 and the wiring board 3-1 made of alumina ceramic, etc., having a cross-sectional shape such as b). By aligning the periphery of the base 4-6-2 or 4-6-b such as a cap with the periphery of the weld link 5-4 as shown in FIG. Welding is performed by pressing the opposing electrodes 5-7 against opposing peripheries of the iE square or rectangle and moving the stage of the welding device on which the wiring board 5-1 is mounted straight ahead.
By doing so, the entire package was hermetically sealed.

しかしながら、この様な方法では、前記パッケージを実
装する筐体等の基体が、パッケージの外形が正方形ある
いは長方形であっても何等支障の無い場合は問題ないが
、前記パッケージを実装する筐体等の基体の内周形状が
、円形あるいは楕円形に形成し、少なくとも1個以上の
できるだけ多くのIC等のチップ部品5−8を塔載する
必要があるつじか1〜ながら正方形あるいは長方形形状
に前記ウェルドリンク2−4を形成したのでは、例えば
前記配線基板1−1の外周形状が円形の場合はそれに内
接する正方形形状のウェルドリングとなるため、IC等
のチップ部品5−8を塔載する事のできないデッドスペ
ースが前記配線基板1−1上にかなりの面積で存在する
事と成り、ひいては高密度実装をさまたげる事と成る。
However, with this method, there is no problem if the outer shape of the package is square or rectangular, but if the base body such as the casing on which the package is mounted is square or rectangular, there is no problem. The inner periphery of the base body must be formed into a circular or elliptical shape, and at least one or more chip components 5-8 such as ICs must be mounted thereon. When the link 2-4 is formed, for example, if the outer periphery of the wiring board 1-1 is circular, the weld ring becomes a square-shaped weld ring inscribed therein, so it is difficult to mount the chip component 5-8 such as an IC. A considerable area of dead space exists on the wiring board 1-1, which in turn impedes high-density mounting.

また外形形状が円形の配線基板では、前記ウェルドリン
グを配線基板の外周よりも多少小さな外周を有する円形
形状に形成する事も可能であるが、この場合は前記溶接
装置の配線基板5−1を支持1足しているステージが回
転運動が可能な様に改造しなければならず、その費用と
手間はたいへんなものであった。また円形の場合は、溶
接装置の配線基板を支持固定しているステージを回転運
動可能に改造する事により対処できるが、様々な形の楕
円形形状を有する様な場合は成すすべも無かった、発明
の目的 本発明はこの様な事情を考慮して成されたものであり、
その目的とする所は、【正方形あるいは長方形以外の例
えば円ハそあるいは楕円形等の特殊な外形形状を有する
アルミナセラミック等の配線基板上に少なくとも1個以
上のIC等のチップ部品を実装し、その実装可能な面積
を効率良く確保し、高密度に実装し、全体を気密封止す
る事の可能な気密封止パッケージを提供する事にある。
Further, in the case of a wiring board having a circular external shape, it is possible to form the weld ring into a circular shape having a slightly smaller outer periphery than the outer periphery of the wiring board, but in this case, the wiring board 5-1 of the welding device is The stage, which had one additional support, had to be modified so that it could rotate, which required a great deal of cost and effort. In addition, in the case of a circular shape, it is possible to deal with it by modifying the stage that supports and fixes the wiring board of the welding device so that it can rotate, but in the case of a shape that is oval in various shapes, there is nothing that can be done. Purpose of the Invention The present invention has been made in consideration of these circumstances,
The purpose is to mount at least one chip component such as an IC on a wiring board made of alumina ceramic or other material that has a special external shape other than a square or rectangle, such as a circular or oval shape. The object of the present invention is to provide an airtight package that can efficiently secure a mounting area, be densely mounted, and hermetically seal the entire package.

発明の実施例 以下、本発明の一実施例を図面を参照しながら説明する
。第6図((a)平面図、(b) M UfJ図)は、
前記アルミナセラミック等の配線基板6−1の外形形状
が円形の場合の例であり、6−4が本発明によるウェル
ドリングの外形形状構造を示すものである。この場合は
正八角形形状としているが、この様に相対向する外周辺
が平行な多角形形状に形成する事により、対向電極5−
7及び直進するステージを有する前記溶接装置を何等改
造する事もなく円形外形形状を有す配線基板6−1上に
効率良く多数のチップ部品を塔載し全体を気密封止する
事が可能な気密封止パッケージを提供する事が可能とな
ったっ6−5はウェルドリング6−4を配線基板6−を
上に支持固定するだめの銀ロー等の接着剤を示す。また
化7図は、本発明による他の実施例であり、7−1は外
形が長方形形状の配線基板を示しており、7−9はそれ
を筐体等の基体に取り付けるべき取り付は用の通孔を示
しており、長方形の配線基板7−1の4すみに当該通孔
7−9が存在している。7−4は、相対向する外周辺が
平行な四角形形状を有する本発明によるウェルドリング
外形形状構造を示すものである。7−5は、ウェルドリ
ンク7−4を配線基板7−1上に支持固定するだめの銀
ロー等の接着剤を示す。
Embodiment of the Invention An embodiment of the present invention will be described below with reference to the drawings. Figure 6 ((a) top view, (b) M UfJ diagram) is
This is an example in which the wiring board 6-1 made of alumina ceramic or the like has a circular outer shape, and 6-4 shows the outer shape structure of the weld ring according to the present invention. In this case, the shape is a regular octagon, but by forming the opposing electrode 5-
It is possible to efficiently mount a large number of chip components on the wiring board 6-1 having a circular external shape and hermetically seal the whole without modifying the welding device having a stage that moves in a straight line. It has become possible to provide a hermetically sealed package. 6-5 shows an adhesive such as silver solder for supporting and fixing the weld ring 6-4 on top of the wiring board 6-. Figure 7 shows another embodiment of the present invention, in which 7-1 shows a wiring board with a rectangular outer shape, and 7-9 shows how to attach it to a base such as a casing. The through holes 7-9 are present in the four corners of the rectangular wiring board 7-1. 7-4 shows a weld ring outer shape structure according to the present invention in which opposing outer peripheries have parallel quadrangular shapes. 7-5 indicates an adhesive such as silver solder for supporting and fixing the weld link 7-4 on the wiring board 7-1.

発明の効果 本発明を採用する事により対向成極及び直進する配線基
板を支持固定するステージを有する溶接装置は何等改造
する事無く、正方形あるいは長方形以外の特殊外形形状
を有する配線基板に効率良く高密度に多くのチップ部品
を実装し、全体を非常に信頼性良く気密封止する事が可
能な気密封止パッケージを提供する事が可能となった0
Effects of the Invention By adopting the present invention, a welding device having a stage for supporting and fixing a wiring board that is oppositely polarized and moving in a straight line can be efficiently welded to a wiring board that has a special outer shape other than a square or rectangle without any modification. It has become possible to provide a hermetically sealed package that can mount a large number of chip components at a high density and hermetically seal the entire package with high reliability.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図〜第5図は従来例を説明する図、第6図は本発明
の一実施例を示す図、第7図は本発明による他の実施例
を示す図である。 1−1.1−1.5−1.6−1.7−1・・アルミナ
セラミック等の配線基板、 2−4.3−4.5−4.6−4.7−4・・ウェルド
リング。 4−6−a 、 4−6−b 、 5−6 ・ キャッ
プ等の基体、3−5 、5−5 、6−5 、7−5・
・銀ロー等のウェルドリンクと配線基板との接着層、 5−8 ・IC等のチップ部品、 5−7・・溶接装置の相対向する電極、1−2・・チッ
プ部品搭載用の導電パターン、1−3 ・ウェルドリン
グ搭載用の導電バター7、■−9・・パッケージの入出
力端子取付は導電パターンっ代理人 弁理士 則 近 
憲 佑 (ほか1名) c12cv″ll ← 法 213− 寸            の 麩        法
1 to 5 are diagrams explaining a conventional example, FIG. 6 is a diagram showing one embodiment of the present invention, and FIG. 7 is a diagram showing another embodiment according to the present invention. 1-1.1-1.5-1.6-1.7-1... Wiring board of alumina ceramic etc., 2-4.3-4.5-4.6-4.7-4... Weld ring. 4-6-a, 4-6-b, 5-6・Substrate such as cap, 3-5, 5-5, 6-5, 7-5・
・Adhesive layer between weld link such as silver solder and wiring board, 5-8 ・Chip components such as IC, 5-7. Opposing electrodes of welding equipment, 1-2. Conductive pattern for mounting chip components. , 1-3 ・Conductive butter for mounting weld ring 7,■-9...Package input/output terminals are installed with conductive pattern Patent attorney Nori Chika
Kensuke (and 1 other person) c12cv″ll ← Law 213- Measurement method

Claims (1)

【特許請求の範囲】[Claims] (1)配線基板上に、電子的機能要素であるチップ部品
を少なくとも1個以上塔載1〜.前記配線基板周辺部に
該配線基板と熱膨張係数のほぼ等しい気密封止用のウェ
ルドリングを接着剤にて装着し、該ウェルドリング上に
前記配線基板及び前記ウェルドリングと熱膨張係数のほ
ぼ等しい基体の周辺部を前記ウェルドリングの周辺部に
位置合わせして装着し、全体を気密封止した気密封止パ
ッケージに於て、前記ウェルドリングの外周部の形状を
正方形又は長方形以外の相対向する外周辺が平行な多角
形形状にしたことを特徴とする気密封止パッケージ。
(1) At least one chip component, which is an electronic functional element, is mounted on the wiring board. A weld ring for airtight sealing having a coefficient of thermal expansion approximately equal to that of the wiring board is attached to the peripheral portion of the wiring board using an adhesive, and a weld ring having a coefficient of thermal expansion approximately equal to that of the wiring board and the weld ring is mounted on the weld ring. In a hermetically sealed package in which the periphery of the base is aligned with the periphery of the weld ring and the whole is hermetically sealed, the shape of the outer periphery of the weld ring is opposite to each other in a shape other than square or rectangular. A hermetically sealed package characterized by a polygonal shape with parallel outer peripheries.
JP56194429A 1981-12-04 1981-12-04 Airtightly sealed package Granted JPS5896754A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56194429A JPS5896754A (en) 1981-12-04 1981-12-04 Airtightly sealed package

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56194429A JPS5896754A (en) 1981-12-04 1981-12-04 Airtightly sealed package

Publications (2)

Publication Number Publication Date
JPS5896754A true JPS5896754A (en) 1983-06-08
JPH0216585B2 JPH0216585B2 (en) 1990-04-17

Family

ID=16324447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56194429A Granted JPS5896754A (en) 1981-12-04 1981-12-04 Airtightly sealed package

Country Status (1)

Country Link
JP (1) JPS5896754A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6167941A (en) * 1984-09-11 1986-04-08 Fujitsu Ltd Sealing method for hybrid integrated circuit
WO2006080048A1 (en) * 2005-01-25 2006-08-03 Fujitsu Limited Semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6167941A (en) * 1984-09-11 1986-04-08 Fujitsu Ltd Sealing method for hybrid integrated circuit
WO2006080048A1 (en) * 2005-01-25 2006-08-03 Fujitsu Limited Semiconductor device
JPWO2006080048A1 (en) * 2005-01-25 2008-06-19 富士通株式会社 Semiconductor device
JP4593616B2 (en) * 2005-01-25 2010-12-08 富士通株式会社 Semiconductor device

Also Published As

Publication number Publication date
JPH0216585B2 (en) 1990-04-17

Similar Documents

Publication Publication Date Title
US5501003A (en) Method of assembling electronic packages for surface mount applications
JPS63128736A (en) Semiconductor element
JPH03225854A (en) Semiconductor device and manufacture thereof
JPH05283460A (en) Semiconductor device
JPH1117064A (en) Semiconductor package
JPH03102862A (en) Semiconductor device
US3105868A (en) Circuit packaging module
JPH02237053A (en) Packaging of semiconductor chip
JPH11176993A (en) Semiconductor device and its manufacturing method, circuit board, and electronic equipment
JP2849479B2 (en) Package structure of semiconductor device
JPS58219757A (en) Semiconductor device
JPH01168045A (en) Hermetically sealed circuit device
JPH0216585B2 (en)
JPH1074887A (en) Electronic component and method of manufacturing the same
JP2668995B2 (en) Semiconductor device
JPS617656A (en) Package for multi-chip
GB2098398A (en) Electronic packaging system
JP2002231761A (en) Electronic component mounts and electronic components
JPS59111350A (en) Semiconductor device
JP2737332B2 (en) Integrated circuit device
JP2944586B2 (en) BGA type semiconductor device and manufacturing method thereof
JPH01173747A (en) Resin-sealed semiconductor device
JPS6236385B2 (en)
JPS61225827A (en) Mounting structure of semiconductor element
JPH06132445A (en) Electronic component package