JPS59114470U - 真空引き装置 - Google Patents
真空引き装置Info
- Publication number
- JPS59114470U JPS59114470U JP778683U JP778683U JPS59114470U JP S59114470 U JPS59114470 U JP S59114470U JP 778683 U JP778683 U JP 778683U JP 778683 U JP778683 U JP 778683U JP S59114470 U JPS59114470 U JP S59114470U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- vacuum
- evacuation device
- separator
- isolation member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002955 isolation Methods 0.000 claims description 11
- 239000012528 membrane Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 9
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP778683U JPS59114470U (ja) | 1983-01-21 | 1983-01-21 | 真空引き装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP778683U JPS59114470U (ja) | 1983-01-21 | 1983-01-21 | 真空引き装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59114470U true JPS59114470U (ja) | 1984-08-02 |
| JPH0118859Y2 JPH0118859Y2 (2) | 1989-06-01 |
Family
ID=30139304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP778683U Granted JPS59114470U (ja) | 1983-01-21 | 1983-01-21 | 真空引き装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59114470U (2) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4988541A (2) * | 1972-12-25 | 1974-08-23 |
-
1983
- 1983-01-21 JP JP778683U patent/JPS59114470U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4988541A (2) * | 1972-12-25 | 1974-08-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0118859Y2 (2) | 1989-06-01 |
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