JPS59119836A - アライメント方法 - Google Patents
アライメント方法Info
- Publication number
- JPS59119836A JPS59119836A JP57227086A JP22708682A JPS59119836A JP S59119836 A JPS59119836 A JP S59119836A JP 57227086 A JP57227086 A JP 57227086A JP 22708682 A JP22708682 A JP 22708682A JP S59119836 A JPS59119836 A JP S59119836A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- wafer
- pattern
- alignment
- alignment mark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Control Of Position Or Direction (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57227086A JPS59119836A (ja) | 1982-12-27 | 1982-12-27 | アライメント方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57227086A JPS59119836A (ja) | 1982-12-27 | 1982-12-27 | アライメント方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59119836A true JPS59119836A (ja) | 1984-07-11 |
| JPH0468766B2 JPH0468766B2 (2) | 1992-11-04 |
Family
ID=16855279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57227086A Granted JPS59119836A (ja) | 1982-12-27 | 1982-12-27 | アライメント方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59119836A (2) |
-
1982
- 1982-12-27 JP JP57227086A patent/JPS59119836A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0468766B2 (2) | 1992-11-04 |
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