JPS59145781A - 被覆硬質部材の製造方法 - Google Patents

被覆硬質部材の製造方法

Info

Publication number: JPS59145781A
Authority: JP; Japan
Prior art keywords: reaction; coating; coated; oxynitride; nitrogen
Prior art date: 1983-02-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP1890783A

Other languages

English (en)

Japanese (ja)

Other versions

JPS6214220B2 (de

Inventor

Minoru Nakano

稔中野

Akira Doi

陽土居

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Sumitomo Electric Industries Ltd

Original Assignee

Sumitomo Electric Industries Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1983-02-09

Filing date

1983-02-09

Publication date

1984-08-21

1983-02-09 Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd

1983-02-09 Priority to JP1890783A priority Critical patent/JPS59145781A/ja

1984-08-21 Publication of JPS59145781A publication Critical patent/JPS59145781A/ja

1987-04-01 Publication of JPS6214220B2 publication Critical patent/JPS6214220B2/ja

Status Granted legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title claims description 6
239000011248 coating agent Substances 0.000 claims abstract description 13
238000000576 coating method Methods 0.000 claims abstract description 13
238000000034 method Methods 0.000 claims abstract description 9
229910052735 hafnium Inorganic materials 0.000 claims abstract description 6
229910052726 zirconium Inorganic materials 0.000 claims abstract description 6
229930195733 hydrocarbon Natural products 0.000 claims abstract description 4
150000002430 hydrocarbons Chemical class 0.000 claims abstract description 4
239000004215 Carbon black (E152) Substances 0.000 claims abstract description 3
150000004820 halides Chemical class 0.000 claims abstract description 3
MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 16
239000000758 substrate Substances 0.000 claims description 9
JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 claims description 8
MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 claims description 5
229910052739 hydrogen Inorganic materials 0.000 claims description 4
239000001257 hydrogen Substances 0.000 claims description 4
UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
150000002431 hydrogen Chemical class 0.000 claims description 2
VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims 1
BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 claims 1
IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 14
229910052760 oxygen Inorganic materials 0.000 abstract description 12
229910052757 nitrogen Inorganic materials 0.000 abstract description 11
QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 8
239000001301 oxygen Substances 0.000 abstract description 8
238000006243 chemical reaction Methods 0.000 abstract description 6
229910052719 titanium Inorganic materials 0.000 abstract description 6
150000004767 nitrides Chemical class 0.000 abstract description 5
239000000956 alloy Substances 0.000 abstract description 4
229910045601 alloy Inorganic materials 0.000 abstract description 4
239000007787 solid Substances 0.000 abstract 2
CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract 1
229910002090 carbon oxide Inorganic materials 0.000 abstract 1
239000010936 titanium Substances 0.000 description 8
239000007789 gas Substances 0.000 description 6
239000000463 material Substances 0.000 description 5
QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
239000000919 ceramic Substances 0.000 description 4
239000000203 mixture Substances 0.000 description 4
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
239000011247 coating layer Substances 0.000 description 3
150000001247 metal acetylides Chemical class 0.000 description 3
238000002441 X-ray diffraction Methods 0.000 description 2
239000011230 binding agent Substances 0.000 description 2
239000010410 layer Substances 0.000 description 2
229910052751 metal Inorganic materials 0.000 description 2
239000002184 metal Substances 0.000 description 2
230000003647 oxidation Effects 0.000 description 2
238000007254 oxidation reaction Methods 0.000 description 2
239000012495 reaction gas Substances 0.000 description 2
238000000682 scanning probe acoustic microscopy Methods 0.000 description 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
229910052581 Si3N4 Inorganic materials 0.000 description 1
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
229910021529 ammonia Inorganic materials 0.000 description 1
238000004458 analytical method Methods 0.000 description 1
229910052799 carbon Inorganic materials 0.000 description 1
150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
239000011195 cermet Substances 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
238000009792 diffusion process Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
229910052738 indium Inorganic materials 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
229910000069 nitrogen hydride Inorganic materials 0.000 description 1
230000001590 oxidative effect Effects 0.000 description 1
230000000737 periodic effect Effects 0.000 description 1
230000009257 reactivity Effects 0.000 description 1
239000002356 single layer Substances 0.000 description 1
239000006104 solid solution Substances 0.000 description 1
-1 titanium oxycarbide Chemical class 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides

Landscapes

Chemical & Material Sciences (AREA)
Inorganic Chemistry (AREA)
General Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Chemical Vapour Deposition (AREA)

JP1890783A 1983-02-09 1983-02-09 被覆硬質部材の製造方法 Granted JPS59145781A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1890783A JPS59145781A (ja)	1983-02-09	1983-02-09	被覆硬質部材の製造方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1890783A JPS59145781A (ja)	1983-02-09	1983-02-09	被覆硬質部材の製造方法

Publications (2)

Publication Number	Publication Date
JPS59145781A true JPS59145781A (ja)	1984-08-21
JPS6214220B2 JPS6214220B2 (de)	1987-04-01

Family

ID=11984666

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1890783A Granted JPS59145781A (ja)	1983-02-09	1983-02-09	被覆硬質部材の製造方法

Country Status (1)

Country	Link
JP (1)	JPS59145781A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
SG137681A1 (en) *	2003-05-23	2007-12-28	Air Prod & Chem	Process for cvd of hf and zr containing oxynitride films

1983
- 1983-02-09 JP JP1890783A patent/JPS59145781A/ja active Granted

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
SG137681A1 (en) *	2003-05-23	2007-12-28	Air Prod & Chem	Process for cvd of hf and zr containing oxynitride films

Also Published As

Publication number	Publication date
JPS6214220B2 (de)	1987-04-01

Publication	Publication Date	Title
JP3418066B2 (ja)	2003-06-16	アルミナ被覆工具とその製造方法
JPS6389666A (ja)	1988-04-20	表面被覆炭化タングステン基超硬合金製切削工具
EP0120632A1 (de)	1984-10-03	Oxid-Bindemittel für mit Aluminiumoxid beschichtete Schneidwerkzeuge
JPS605883A (ja)	1985-01-12	被覆炭化物合金製切削工具植刃
JPS60502245A (ja)	1985-12-26	コ−テイング付き複合窒化珪素切削工具
JPH03150364A (ja)	1991-06-26	アルミナ被覆物品とその被覆方法
JPS58161770A (ja)	1983-09-26	多重被覆切削工具およびその製造方法
JPS58211862A (ja)	1983-12-09	コ−テイング付き複合窒化珪素切削工具
JP2775955B2 (ja)	1998-07-16	耐摩耗性に優れたコーティングサーメットの製造法
JPH068008A (ja)	1994-01-18	耐チッピング性にすぐれた表面被覆炭化タングステン基超硬合金製切削工具
JPS6214220B2 (de)	1987-04-01
JPS586969A (ja)	1983-01-14	切削工具用表面被覆超硬合金部材
JPH0397866A (ja)	1991-04-23	被覆超硬合金工具
JPS6360831B2 (de)	1988-11-25
JPH09125249A (ja)	1997-05-13	被覆超硬合金工具
JPS60159171A (ja)	1985-08-20	被覆硬質部材の製造方法
JPS5935872B2 (ja)	1984-08-31	被覆超硬合金部品
JPS5940223B2 (ja)	1984-09-28	被覆超硬合金部材
JPS62274003A (ja)	1987-11-28	粉末材料の焼結方法
JPH0394062A (ja)	1991-04-18	ダイヤモンド被覆超硬合金
JPH0234733B2 (de)	1990-08-06
JPH01208381A (ja)	1989-08-22	ＡｌＮ被覆窒化珪素基切削工具
JPS59129776A (ja)	1984-07-26	被覆硬質部材の製造法
JPS6324067B2 (de)	1988-05-19
JPS5914544B2 (ja)	1984-04-05	表面被覆超硬質合金

JPS59145781A - 被覆硬質部材の製造方法 - Google Patents

Info

Links

Classifications

Landscapes

Priority Applications (1)

Applications Claiming Priority (1)

Publications (2)

Family

ID=11984666

Family Applications (1)

Country Status (1)

Cited By (1)

Cited By (1)

Also Published As

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