JPS59171812A - 光学検査装置及び方法 - Google Patents

光学検査装置及び方法

Info

Publication number
JPS59171812A
JPS59171812A JP59025290A JP2529084A JPS59171812A JP S59171812 A JPS59171812 A JP S59171812A JP 59025290 A JP59025290 A JP 59025290A JP 2529084 A JP2529084 A JP 2529084A JP S59171812 A JPS59171812 A JP S59171812A
Authority
JP
Japan
Prior art keywords
light
light beam
lens
focal plane
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59025290A
Other languages
English (en)
Japanese (ja)
Inventor
エメツト・ミツチエル・フルカ−ソン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of JPS59171812A publication Critical patent/JPS59171812A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/46—Indirect determination of position data
    • G01S17/48—Active triangulation systems, i.e. using the transmission and reflection of electromagnetic waves other than radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/28—Systems for automatic generation of focusing signals
    • G02B7/30—Systems for automatic generation of focusing signals using parallactic triangle with a base line
    • G02B7/32—Systems for automatic generation of focusing signals using parallactic triangle with a base line using active means, e.g. light emitter

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
  • Measurement Of Optical Distance (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP59025290A 1983-02-15 1984-02-15 光学検査装置及び方法 Pending JPS59171812A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US46675783A 1983-02-15 1983-02-15
US466757 1983-02-15

Publications (1)

Publication Number Publication Date
JPS59171812A true JPS59171812A (ja) 1984-09-28

Family

ID=23852982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59025290A Pending JPS59171812A (ja) 1983-02-15 1984-02-15 光学検査装置及び方法

Country Status (5)

Country Link
JP (1) JPS59171812A (fr)
DE (1) DE3404901A1 (fr)
FR (1) FR2541002A1 (fr)
GB (1) GB2135150A (fr)
IT (1) IT1175938B (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63167315A (ja) * 1986-12-29 1988-07-11 Tsubosaka Denki Kk レンズ変位量検出装置
JPS63199310A (ja) * 1987-02-16 1988-08-17 Mitaka Koki Kk 非接触多点自動焦点位置決め方法及び装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0723844B2 (ja) * 1985-03-27 1995-03-15 オリンパス光学工業株式会社 表面形状測定器
JPH0231337A (ja) * 1988-07-21 1990-02-01 Mitsubishi Electric Corp 焦点誤差検出装置
US5061062A (en) * 1990-07-02 1991-10-29 General Electric Company Focus spot size controller for a variable depth range camera
FR3106003B1 (fr) * 2020-01-06 2022-02-18 Ijinus Capteur de niveau

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1477625A (en) * 1974-10-15 1977-06-22 Secr Defence Focussing of optical systems
NL7809635A (nl) * 1978-09-22 1980-03-25 Philips Nv Inrichting voor het uitlezen van een optische registra- tiedrager bevattende een stralingsreflekterende infor- matiestruktuur.
GB2057218B (en) * 1979-06-25 1984-02-29 Olympus Optical Co Detecting focussing error
US4505584A (en) * 1981-01-22 1985-03-19 Olympus Optical Co., Ltd. Method and apparatus for detecting focussing error signal of objective lens
JPS57195634U (fr) * 1981-06-05 1982-12-11
US4417330A (en) * 1981-10-15 1983-11-22 Burroughs Corporation Optical memory system providing improved focusing control
NL8202058A (nl) * 1982-05-19 1983-12-16 Philips Nv Opto-elektronisch fokusfout-detektiestelsel.
DE3219503C2 (de) * 1982-05-25 1985-08-08 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum selbsttätigen Fokussieren auf in optischen Geräten zu betrachtende Objekte

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63167315A (ja) * 1986-12-29 1988-07-11 Tsubosaka Denki Kk レンズ変位量検出装置
JPS63199310A (ja) * 1987-02-16 1988-08-17 Mitaka Koki Kk 非接触多点自動焦点位置決め方法及び装置

Also Published As

Publication number Publication date
IT8419586A0 (it) 1984-02-13
GB2135150A (en) 1984-08-22
IT1175938B (it) 1987-08-12
FR2541002A1 (fr) 1984-08-17
DE3404901A1 (de) 1984-08-16
GB8403402D0 (en) 1984-03-14

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