JPS59176151A - Elevated type conveyor - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an elevated transport device used for transporting products such as LS wafers that need to be handled in a clean environment.

2. Description of the Related Art Conventionally, as a device for transporting products such as LSI wafers within a factory, a transport device as shown in the figure is usually used. In FIG. 1, reference numeral 1 denotes a vehicle body, 2 a wheel, 8 an axle, and 4 a track. It is supported and does not have a so-called steering mechanism. Therefore, in this conveyance device, when the car body l passes through a curved track, the JIL wheels 2 advance while colliding with the side surfaces of the track 4, and the JIL wheel 2 advances while colliding with the side surface of the track 4, and the angle of rotation θ of the claw l and the wheel pace length h17) are expressed as the product. This caused wheel 2 to slip sideways. As a result, when the wheels 2 and the track 4 rub against each other, there is an inconvenience in that dust is scattered. For this reason, in order to actually use the above-mentioned conveyance device, it was necessary to take dust-proof measures such as covering the track with a duct cover and suctioning the dust generated from the area around the wheel.

The invention was made in view of the above circumstances, and the purpose is to provide an elevated transport device that can completely prevent the generation of dust from around the wheels. Runs and stops on a type track, unloads the load at any one station, and unloads at another station? In the elevated transport system, a clutch mechanism is provided in the drive system of the left and right TL wheels to drive both the left and right wheels when traveling on a straight track, and to drive only the wheels located on the outer peripheral side of the curved track when traveling on a curved track, When traveling on a curved track, the wheels are equipped with an axle rotation mechanism that rotates the car in the same direction as the track extends? This is a characteristic feature.

Hereinafter, one example of the present invention will be explained with reference to FIGS. 2 to 6.

FIG. 2 is a plan view of the elevated transport device according to the present invention, in which 9 is the transport device body, 10 is a DC motor, 11 is a worm and a worm wheel, and 12 is a running latch (clutch i structure). , 18 is the ML wheel, 14.1
4' is the chassis, 15 is the bushing, 16 is the elastic universal joint,
17 is a guide wheel, and 18 is a curve detection switch. In this device, from the vehicle body 9, the motor lO, the worm mechanism 11
, and clutch 12t-built-in JIL wheel 1B? Only the driving chassis 14 and wheels 18? Driven chassis 14'
and? Constructed by dividing, the protrusion m of the chassis 14.14'
l 4 a + l 4 a'k are each connected to the vehicle body 9 via a bushing l FIT I F+, and both chassis 14, 14' are connected by an elastic universal joint 16.

Here, the bush 15 moves the truck 14 or 14' to the car body 9.
axis perpendicular to? The axle L8a of the RL wheel is connected so that it can rotate around the center, and the axle L8a of the RL wheel is connected so that the m wheel 18 faces the direction in which the track 4 extends when the N integral 90 curved track is running.
It constitutes an axle rotation mechanism that allows full rotation.

Guide wheels 17Th are provided on both sides of the vehicle body 9 and the chassis 14, 14' in contact with the track 4 to prevent lateral displacement in the lock direction.
Be prepared.

When running the If body 9, in the case of running on a straight gravel track, both clutches 12 are connected and the two wheels drive the drive 11II.
At the same time, the movement of the six guide wheels 17r in the four lateral directions is completely restricted. On the other hand, in the case of running on a curved track, when approaching a curved track from a straight line, the guide wheel 17 on the traffic side, which is arranged in a direction cut from the wheel axle, causes the chassis 14 or 14' of the track σ to bend in the direction along the curve. At the same time, the elastic universal joint 16 extends and bends, causing the rear chassis 14' or 14 to follow the tangential direction of the track. That is, the chassis 14 and 14' are bushes 15.1fi'? The vehicle Wit1B rotates horizontally around the center and faces in the direction in which the track 4 extends. At this time, the curve detection switch 18 is operated and the inner wheel side clutch 12? The vehicle runs in single-wheel drive using only the outer wheels, leaving the inner wheels free. In addition, when returning from a curved line to a straight track, the elastic universal joint 16
It also provides restoring force in the 4,14'Krt-x forward direction.

By operating in this manner, the conveyance device does not lose its straightness on a straight track, and even on a curved track, the curvature matches the track at the center position of the front and rear single wheel axles and the wheel base, and the traveling direction of the wheels 18 is maintained. It is possible to eliminate the slip between the two sides. Therefore, generation of dust can be prevented.

FIG. 3 is a diagram showing the configuration of the current collector of this device.

In the figure, 19 is a current collector, and 20 is a power transmission rail.

The collector 16 element 19 is configured as a rolling Suginai α element, and is attached to the frame body 19a and the collector 1 [11 ring 19b and the rotating eye. Outside of ball bearing @VC
Is the installed current collecting ring 19b on the outer periphery? Power transmission rail 20
A brush (not shown) is brought into contact with the inner periphery? Power is supplied to the fixed polarization on the transfer device side through the brush, and the brush portion is sealed.

For this reason, the collector 19 does not slide when traveling, and can supply power to the conveyance device by rolling contact.

Is this why dust is generated? It can be prevented.

By attaching this to the center of the wheel base of the conveyance device or to the rear axis of the vehicle, side slips can also be prevented. Roughly speaking, for f power transmission rails 20, K 24*
By placing the BLR at the joint of the power transmission rail
! tr'.

Figures ψ and 5 are a side view and a front view of the device Rg). In these figures, 21 is a motor drive shaft, 22 is a beam drive shaft, 28a and 28b are gears, 24 is a lift clutch, 25.25' is a worm mechanism, 2 fl is a reel, and 27 is a lift belt. A clutch 24 is also provided on the lift drive shaft 2z so that the rotation of the motor shaft 21 for driving the vehicle is transmitted to the drive shaft 22 via the gears 28a and 93b. Furthermore, inside the bases 14° 14' at both ends of this shaft 22, there are worm mechanisms 25° 257? which are oriented in left and right directions. Attach. And this worm mechanism 2
The reel 26 is rotated through 5°25' to move the belt 117. With this configuration),
While the conveyance device is running, the clutch 24Tt is disengaged and the clutch 12t- is engaged to rotate the motor shaft. When the vehicle stops at the station, the clutch 12 is fully disengaged. Then, the clutch 24 is engaged to drive the motor 10 until the lift mechanism is operated. Then, the wheel 18 does not rotate,
The motor shaft 21 and the 1J foot drive shaft 22 rotate, and the reel 26 after MIJ rotates in the opposite direction at the same speed via the worm mechanism 25, 25'.
7? 6 is a diagram showing the configuration of the travel control circuit mounted on the conveyance device, where z8 is a rotary encoder, and 29 is a -i
Counter A180 for giving a speed command is a counter B1131 for giving an 8-bit deceleration command, 82 is a +JO gate, and 8; 3.84 is a deceleration gate. In order to operate this, driving commands are given through digital transmission and storage temperature feedback control is performed. To do this, motor l [J@21 and rotary encoder 28? Install, output signal to y/
v is converted and used for speed control, and the acceleration/deceleration command value is determined by the number of pulses corresponding to the rotation angle of the motor IO. When the transport device receives a start command, it applies starting torque to the motor 10. To give a constant initial value mr counter A29 is launched, and counter B130 is set to υ0 speed step @
Latch n) Noro continuous game) 81.

Open 82. Therefore, the pulse from the rotary enhancer 28 is used as a count pulse, and the number of shifts of the counter B80 decreases, the value of the counter A29 increases by IJ, and the motor 10 is increased in speed by IJD. And if the value of counter B130 becomes 0, game)! 32 closes, the counter A29 becomes a constant value and enters constant speed control. Next, when the transport device receives a stop command, the deceleration game (88, 84) is opened,
The value of the counter A29 decreases, the motor lO is decelerated, and when the value of the counter A29 reaches 0, it stops.

like this'! ! tt[1I21, so the conveyance device can start and stop suddenly and run without giving any vibration to the load, and after receiving a stop command, it can move at a fixed distance according to 100 rotation angles of the motor, and the rotary encoder It is possible to stop at a station with high precision depending on the number of 280 divisions.

As explained above, according to the present invention, when traveling on a straight track, the drive system of the left and right wheels drives both the left and right i-wheels, and when traveling on a curved track, only the wheels located on the outer peripheral side of the curved track are driven by T.
A clutch mechanism is provided to drive the vehicle, and an axle rotating machine 61 is provided to rotate the axle in the direction in which the wheels extend when traveling on a curved track, so that the wheels always follow the trajectory of straight and curved tracks. As a result, it is possible to prevent the ring and the track from rubbing against each other with strong force, and thereby to prevent dust from being generated around the wheels while the vehicle is running. This has the effect of keeping the environment inside the factory clean.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram showing the general structure of a conventional conveyance device and its running state, and FIGS. 2 to 6 are examples of the present invention. FIG. 2 is a plan view of production and removal, FIG. 3 is a perspective view of the current collector, and FIG. ψ is a device W. Side 110, Figure 5 is the front view of the device [m, and Figure 6 is the circuit diagram of the traveling control circuit.
2... Running latch (clutch mechanism), 18.
...Wheels, 14°14' ...Main stand, 15
...Butush (single axis rotation mechanism).

Claims (1)

[Claims] On an elevated track consisting of straight lines and curves? Running. In an elevated transport device that stops, loads cargo at one arbitrary station, and unloads the cargo at another station, the drive system for the left and right wheels has the drive system for both the left and right wheels vi-vJ when running on a straight track. MF located on the outer circumference side of the curved track when traveling on the curved track! A main shaft rotation mechanism is provided with a clutch @ mechanism that drives only the axle t so that the 14L wheel faces the direction in which the track extends when traveling on a curved track. Elevated conveyance equipment with all the features provided.