JPS5918475B2 - coated high speed steel - Google Patents

coated high speed steel

Info

Publication number
JPS5918475B2
JPS5918475B2 JP51110535A JP11053576A JPS5918475B2 JP S5918475 B2 JPS5918475 B2 JP S5918475B2 JP 51110535 A JP51110535 A JP 51110535A JP 11053576 A JP11053576 A JP 11053576A JP S5918475 B2 JPS5918475 B2 JP S5918475B2
Authority
JP
Japan
Prior art keywords
speed steel
coated
ion plating
plating method
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51110535A
Other languages
Japanese (ja)
Other versions
JPS5334813A (en
Inventor
「みつ」徳 小林
良彦 土井
正明 飛岡
孝春 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP51110535A priority Critical patent/JPS5918475B2/en
Publication of JPS5334813A publication Critical patent/JPS5334813A/en
Priority to KR7801099A priority patent/KR820000249B1/en
Publication of JPS5918475B2 publication Critical patent/JPS5918475B2/en
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/18Layered products comprising a layer of metal comprising iron or steel

Landscapes

  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)
  • Reduction Rolling/Reduction Stand/Operation Of Reduction Machine (AREA)
  • Ceramic Products (AREA)
  • Chemical Vapour Deposition (AREA)

Description

【発明の詳細な説明】 本発明は被覆高速度鋼に関するものである。[Detailed description of the invention] The present invention relates to coated high speed steel.

高速度鋼、WC基超硬合金を母材とし、その表面にIV
−a族金属(チタン、ジルコニウム、ノ、、フニウム)
の炭化物、窒化物、あるいは炭窒化物(いずれの場合も
酸素を含んでいても良い)を数ミクロンの厚さに被覆し
たいわゆるコーティングチップは、母材の靭性と、皮膜
の耐摩耗性を兼備しており、切削工具として従来の未被
覆の高速度鋼、WC基超硬合金よりも優れた特性を示す
事は広く知られている。本発明の目的は、この様な被覆
高速度鋼の特性を一段と向上させたものを提供する事に
ある。
The base material is high-speed steel and WC-based cemented carbide, and the IV
- Group A metals (titanium, zirconium, fernium)
So-called coated chips coated with carbides, nitrides, or carbonitrides (which may contain oxygen) to a thickness of several microns have both the toughness of the base material and the wear resistance of the film. It is widely known that it exhibits better properties as a cutting tool than conventional uncoated high-speed steel and WC-based cemented carbide. An object of the present invention is to provide such a coated high-speed steel with further improved properties.

一般にX線回折により、物質の結晶構造等を分析する方
法が行なわれているが、X線回折曲線の半価幅がいかな
る意味を持つかは異論のあるところである。一説による
と、試料中のディスロケーション密度によるとされてお
り、半価幅の広いもの程、ディスロケーション密度は高
いとされている。そこで、発明者らは、被覆高速度鋼の
皮膜中のディスロケーション密度が高いと、切削時に工
具切刃の皮膜に発生する摩耗及び亀裂の進行による皮膜
の剥離及び母材の損傷はおさえられると考えた。このよ
うな考えに従つて形成した一定以上の半価幅を示す被覆
高速度鋼は、通常の被覆高速度鋼と比較すると、予想ど
おり非常に優れた靭性と耐摩耗性を示すことが判明した
。第1図は、本発明の被覆高速度鋼を作成する為に用い
たイオンブレーティング装置の概略を示す。
X-ray diffraction is generally used to analyze the crystal structure of substances, but there is some controversy as to what the half-width of an X-ray diffraction curve means. According to one theory, it is said that it depends on the dislocation density in the sample, and it is said that the wider the width at half maximum, the higher the dislocation density. Therefore, the inventors believe that if the dislocation density in the coating of coated high-speed steel is high, peeling of the coating and damage to the base material due to wear and crack progression that occur in the coating of the cutting edge of the tool during cutting can be suppressed. Thought. It was found that the coated high-speed steel formed according to this idea, which exhibits a half-value width above a certain level, exhibits extremely superior toughness and wear resistance when compared with ordinary coated high-speed steel. . FIG. 1 schematically shows an ion brating apparatus used to produce the coated high-speed steel of the present invention.

図において1は真空槽であつて、排気管2により排気さ
れる。前記真空槽1内には、基板電源3により負の電圧
が印加される基板4と、イオン化電源5により正の電圧
がかけられるイオン化電極6と、反応ガス導入パイプ7
と、電子ビームにより加熱される蒸発源8が配置されて
いる。いま電子ビームを蒸発源8に照射し、これを溶解
・蒸発させると、金属蒸気はイオン化電極6との間でイ
オン化して正イオンとなり、負の高電圧のかかつた基板
に向かい、反応ガスと反応しながら基板に支持された高
速度鋼に付着して被膜を形成するのである。
In the figure, reference numeral 1 denotes a vacuum chamber, which is evacuated through an exhaust pipe 2. Inside the vacuum chamber 1, there are a substrate 4 to which a negative voltage is applied by a substrate power source 3, an ionization electrode 6 to which a positive voltage is applied by an ionization power source 5, and a reaction gas introduction pipe 7.
and an evaporation source 8 heated by an electron beam. Now, when the electron beam is irradiated to the evaporation source 8 to melt and evaporate it, the metal vapor will be ionized between the ionization electrode 6 and become positive ions, which will head toward the substrate to which a high negative voltage is applied, and will be combined with the reaction gas. While reacting, it adheres to the high-speed steel supported by the substrate, forming a coating.

なお2θを0.C以上に限定した理由は、2θが0.4
以下の場合には工具としての耐摩耗性が不十分であり、
実用上有効でなく、2θが0.4゜以上特に0.5゜以
上で優れた切削性能を示すためである。
Note that 2θ is 0. The reason for limiting it to C or higher is that 2θ is 0.4
In the following cases, the wear resistance as a tool is insufficient,
This is because it is not practically effective and exhibits excellent cutting performance when 2θ is 0.4° or more, especially 0.5° or more.

以下に実施例を示す。Examples are shown below.

なお実施例中の半価幅は、銅ターゲツト、ニツケルフイ
ルタを用いたデイフラクトメータによりCu−Kα線の
回折曲線を測定し、この回析曲線のバツクグランドとピ
ークとの1/2の高さの部分の回折曲線の幅をもつてし
た。第2図は本発明品のTi礪(200)面からの回折
曲線の例であり、第3図は「般的なCVD法によるTl
C膜の回折曲線の例である。
Note that the half-width in the examples is determined by measuring the diffraction curve of Cu-Kα rays using a diffractometer using a copper target and a nickel filter, and determining the height of 1/2 between the background and the peak of this diffraction curve. The width of the diffraction curve in the part of . Figure 2 shows an example of the diffraction curve from the Ti (200) plane of the product of the present invention, and Figure 3 shows a typical diffraction curve of the product of the present invention.
This is an example of a diffraction curve of a C film.

第2図及び第3図共に横軸は回折角度(2θ)であり、
1目盛りは0.2はである。
In both Figures 2 and 3, the horizontal axis is the diffraction angle (2θ),
One scale is 0.2.

縦軸は回折強度を示し、無次元である。第2図の本発明
品の半価幅は0.8゜、第3図の一般的なCVD法によ
るものの半価幅は0.25゜となつている。
The vertical axis shows the diffraction intensity and is dimensionless. The half-width of the product of the present invention shown in FIG. 2 is 0.8°, and the half-width of the product manufactured by the general CVD method shown in FIG. 3 is 0.25°.

実施例 1 高速度鋼(材質SKH4)を型番SNu432に加工し
、第1図に示すイオンプレーテイング装置により、電子
ビームにて加熱蒸発せしめたチタンをイオン化電圧+6
0Vでイオン化し、−1KVの基板電圧をかけ、アセチ
レンガス雰囲気中4X10−4T0rrにて2時間保持
した。
Example 1 High-speed steel (material SKH4) was processed into model number SNu432, and titanium was heated and evaporated with an electron beam using an ion plating apparatus shown in Fig. 1 at an ionization voltage of +6.
Ionization was carried out at 0 V, a substrate voltage of -1 KV was applied, and the sample was maintained for 2 hours at 4×10 −4 T 0 rr in an acetylene gas atmosphere.

得られたチツプを切断して調べたところ5μの炭化チタ
ンが被覆されており、母材の硬度はHRC=65.2と
殆んどなまつていなかつた。このチツプの被覆膜(20
0)面からのCu−Ka線による回折曲線は半価幅2θ
で0.6uであつた。比較例として同じく高速度鋼(材
質SKH4)のなま材を型番SNu432に加工し、通
常の化学蒸着法により炭化チタンを被覆し、熱処理した
When the resulting chip was cut and examined, it was found that it was coated with 5 μm titanium carbide, and the hardness of the base material was HRC = 65.2, which was almost unchanged. The coating film of this chip (20
0) The diffraction curve of the Cu-Ka line from the plane has a half-width of 2θ
It was 0.6u. As a comparative example, a blank piece of high-speed steel (material SKH4) was processed into model number SNu432, coated with titanium carbide by the usual chemical vapor deposition method, and heat-treated.

得られたチツプを切断して調べたところ母材の硬度はH
C=65.5であり、炭化チタン膜の厚みは5μであつ
た。また皮膜の(200)面からのCu−Ka線による
回折曲線は半価幅2θで0.2゜であつた。本発明のチ
ツプと前記した通常の被覆高速度鋼のチツプの両者を用
い、外径20011の被削材(SCM3)を切削速度4
0m/Minl切込21も送り0.3611/Revで
40分間切削したところ、本発明のチツプの逃げ面摩耗
は0.22111クレータ摩耗は0.051!であつた
When the obtained chips were cut and examined, the hardness of the base material was H.
C=65.5, and the thickness of the titanium carbide film was 5 μm. Further, the diffraction curve of the Cu--Ka line from the (200) plane of the film had a half-width 2θ of 0.2°. Using both the tip of the present invention and the above-mentioned ordinary coated high-speed steel tip, a workpiece (SCM3) with an outer diameter of 20011 was cut at a cutting speed of 4.
When cutting 0m/Minl depth of cut 21 for 40 minutes at a feed rate of 0.3611/Rev, the flank wear of the chip of the present invention was 0.22111, and the crater wear was 0.051! It was hot.

一方通常の被覆高速度鋼チツプは逃げ面摩耗0.401
!11クレータ摩耗は0.15龍であり、本発明のチツ
プが一段と優れた耐摩耗性を示した。実施例 2 高速度鋼(材質SKH9)を型番SNu432に加工し
、第1図に示すイオンプレーテイング装置により、電子
ビームにて加熱蒸発せしめたチタンをイオン化電圧+5
0Vでイオン化し、−0.9KVの基板電圧を印加し、
窒素ガス雰囲気中6×10−4T0rrにて3時間保持
した。
On the other hand, ordinary coated high-speed steel chips have flank wear of 0.401
! 11 crater wear was 0.15 dragons, indicating that the chip of the present invention had even better wear resistance. Example 2 High-speed steel (material SKH9) was processed into model number SNu432, and titanium was heated and evaporated with an electron beam using the ion plating apparatus shown in Fig. 1 at an ionization voltage of +5
Ionize at 0V, apply a substrate voltage of -0.9KV,
It was held for 3 hours at 6×10 −4 T0rr in a nitrogen gas atmosphere.

得られたチツプを切断して調べたところ8μの窒化チタ
ンが被覆されており、母材の硬度はHBC−64.2と
殆んどなまつていなかつた。このチツプの被覆膜((2
00)面からのCu−Kα線による回折曲線は半価幅2
θで0.6゜であつた。比較例として同じく高速度鋼(
材質SKH4)のなま材を型番SNu432に加工し、
通常の化学蒸着法により窒化チタンを被覆し、熱処理し
た。
When the resulting chip was cut and examined, it was found that it was coated with 8μ titanium nitride, and the hardness of the base metal was HBC-64.2, which was almost the same. The coating film of this chip ((2
The diffraction curve of Cu-Kα rays from the 00) plane has a half width of 2
The angle θ was 0.6°. As a comparative example, high-speed steel (
The raw material SKH4) is processed into model number SNu432,
Titanium nitride was coated by conventional chemical vapor deposition and heat treated.

得られたチツプを切断して調べたところ母材の硬度はH
B,C=64.6であり、窒化チタン膜の厚みは8μで
あつた。また皮膜の(200)面からのCu−Ka線に
よる回折曲線は半価幅2θで0.2みであつた。本発明
のチツプと前記の通常の被覆高速度鋼のチツプの両者を
用い、被削材SCM3に対するフライス耐摩耗性を調べ
た。切削条件は切削速度30m/Min,切込21』送
り0.169n/Revl切削時間30とした。その結
果本発明のチツプのブランク摩耗は0.10詣であつた
のに対し、通常の被覆高速度鋼のチツプのブランク摩耗
は0.20jE1であり、本発明のチツプが一段と優れ
た耐摩耗性を示した。実施例 3 高速度鋼SKH4(硬度HRC65.l)を型番SNU
432に加工し第1図に示すイオンプレーテイング装置
に更に基板加熱ヒーターを追加したものを用いて第1表
に示す条件で被覆し、実施例1と同じ切削試験を行つた
結果を第1表に示す。
When the obtained chips were cut and examined, the hardness of the base material was H.
B, C=64.6, and the thickness of the titanium nitride film was 8 μm. Further, the diffraction curve of the Cu-Ka line from the (200) plane of the film had a half width 2θ of only 0.2. Using both the chip of the present invention and the conventional coated high-speed steel chip described above, the milling wear resistance of the work material SCM3 was investigated. The cutting conditions were a cutting speed of 30 m/min, a depth of cut of 21'', a feed of 0.169 n/Revl, and a cutting time of 30. As a result, the blank wear of the chip of the present invention was 0.10JE1, whereas the blank wear of the chip of conventional coated high-speed steel was 0.20jE1, indicating that the chip of the present invention has even better wear resistance. Indicated. Example 3 High speed steel SKH4 (hardness HRC65.l) with model number SNU
Table 1 shows the results of the same cutting test as in Example 1. Shown below.

尚、基板に加速電圧を印加した場合の測温は測定装置の
機構上不可能であつた。本発明である試料腐1,5,6
,7,8,10は本発明に属さない試料腐2,3,4,
9,11に比較してすぐれた切削性能を示すことがわか
る。以上の各実施例における様に本発明の被覆高速度鋼
は優れた耐摩耗性を示すことが分つたが、このことは高
速度鋼に限られるものではなく、炭素鋼、合金鋼等の各
種鋼種においても同様である。
Note that it was impossible to measure the temperature when an accelerating voltage was applied to the substrate due to the mechanism of the measuring device. Sample rot 1, 5, 6 according to the present invention
, 7, 8, 10 are sample rots 2, 3, 4, which do not belong to the present invention.
It can be seen that this shows superior cutting performance compared to No. 9 and No. 11. As shown in the above examples, it was found that the coated high-speed steel of the present invention exhibits excellent wear resistance, but this is not limited to high-speed steel, and is applicable to various types of steel such as carbon steel and alloy steel. The same applies to steel types.

従つて本発明の説明は一般の鋼種を対象とするものであ
る。尚、何れの材料に被覆した場合においても被覆膜(
200)面からのCu−Ka線による回折曲線の半価幅
が、2θで0.4゜以下になれば従来品との比較におけ
る靭性と耐摩耗性の向上は見られなかつた。上記実施例
においては何れもイオンプレーテイング法による場合を
示したが、この方法によらなくても低い温度で高いエネ
ルギーの粒子で蒸着出来ればよいので、物理蒸着法であ
れば他の方法によつても実施出来る。
Therefore, the description of the present invention is directed to general steel types. In addition, when coating any material, the coating film (
When the half width of the diffraction curve of the Cu-Ka line from the 200) plane was 0.4° or less at 2θ, no improvement in toughness and wear resistance was observed compared to conventional products. In the above examples, the ion plating method was used, but it is not necessary to use this method as long as the vapor deposition can be performed using high energy particles at a low temperature. It can be implemented even if

なお本発明は、実施例と異なる組成の被覆膜を有するも
の、或は被覆膜が多重層の場合にも適用できることはい
うまでもない。
It goes without saying that the present invention can also be applied to a device having a coating film having a composition different from that of the embodiments, or to a case where the coating film is multilayered.

本発明によれば、以上の様に、被覆高速度鋼における被
覆膜(200)面からのCu−Kα線による回折曲線の
半価幅が2θで0.4゜以上のものを形成することによ
り、従来のものよりも優れた靭性を示す被覆高速度鋼を
得ることができたのである。
According to the present invention, as described above, it is possible to form a coated high-speed steel in which the half-width of the diffraction curve of Cu-Kα rays from the coating film (200) surface is 0.4° or more at 2θ. As a result, we were able to obtain coated high-speed steel that exhibits superior toughness to conventional steels.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はイオンブレーテイング装置を示す線図第2図及
び第3図はCu−Ka線図による回折曲線を示すグラフ
。 1・・・・・・真空槽、3・・・・・・基板電源、4・
・・・・・基板、5・・・・・・イオン化電源、6・・
・・・・イオン化電極、7・・・・・・反応ガス導入パ
イプ、8・・・・・・蒸発源。
FIG. 1 is a diagram showing an ion brating device, and FIGS. 2 and 3 are graphs showing diffraction curves based on Cu-Ka diagrams. 1... Vacuum chamber, 3... Board power supply, 4.
... Substrate, 5 ... Ionization power supply, 6 ...
... Ionization electrode, 7 ... Reaction gas introduction pipe, 8 ... Evaporation source.

Claims (1)

【特許請求の範囲】 1 高速度鋼の表面をイオンプレーティング法によつて
被覆した高速度鋼において、イオンプレーティング法が
反応性イオンプレーティング法であつて、蒸着物質中の
金属元素成分のイオン化が主として金属元素蒸着自身の
放電によつてなされ、反応ガスの分圧が1×10^−^
4〜9×10^−^4Torrの範囲内で生成されたも
のであり、被覆膜の組成が主としてM(Cu,Nv,O
W)z(但し、MはIV−a族金属(チタン、ジルコニウ
ム、ハフニウム)、C、N、Oは夫々炭素、窒素、酸素
を示し、u、v、wは夫々C、N、Oの原子比を示し、
かつu+v+w=1、u、v、w≧0であり、zは金属
成分に対する非金属成分の化学量論比を示しz≦1であ
る。 )なるB I 型固溶体の被覆膜の(200)面からのC
u−Kα線による回折曲線の半価幅が2θで0.4゜以
上である事を特徴とする被覆鋼。
[Claims] 1. In a high-speed steel whose surface is coated by an ion plating method, the ion plating method is a reactive ion plating method, and the metal element components in the vapor deposited material are Ionization is mainly done by the discharge of the metal element itself, and the partial pressure of the reaction gas is 1 x 10^-^.
It was generated within the range of 4 to 9 × 10^-^4 Torr, and the composition of the coating film was mainly M (Cu, Nv, O
W) z (However, M is a group IV-a metal (titanium, zirconium, hafnium), C, N, and O represent carbon, nitrogen, and oxygen, respectively, and u, v, and w are C, N, and O atoms, respectively. shows the ratio,
and u+v+w=1, u, v, w≧0, and z represents the stoichiometric ratio of the non-metal component to the metal component, and z≦1. ) from the (200) plane of the coating film of B I type solid solution
A coated steel characterized in that the half width of the diffraction curve by u-Kα rays is 0.4° or more at 2θ.
JP51110535A 1976-09-13 1976-09-13 coated high speed steel Expired JPS5918475B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP51110535A JPS5918475B2 (en) 1976-09-13 1976-09-13 coated high speed steel
KR7801099A KR820000249B1 (en) 1976-09-13 1978-04-15 Machining tool formed from the coated tool steel

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP51110535A JPS5918475B2 (en) 1976-09-13 1976-09-13 coated high speed steel
KR7801099A KR820000249B1 (en) 1976-09-13 1978-04-15 Machining tool formed from the coated tool steel

Publications (2)

Publication Number Publication Date
JPS5334813A JPS5334813A (en) 1978-03-31
JPS5918475B2 true JPS5918475B2 (en) 1984-04-27

Family

ID=26450144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51110535A Expired JPS5918475B2 (en) 1976-09-13 1976-09-13 coated high speed steel

Country Status (2)

Country Link
JP (1) JPS5918475B2 (en)
KR (1) KR820000249B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170165A (en) * 1987-01-06 1988-07-14 Nippon Plast Co Ltd Steering column cover

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546876A (en) * 1977-06-17 1979-01-19 Shinko Seiki Method of forming colored coat over metal surface
JPH0780083B2 (en) * 1986-09-30 1995-08-30 三菱マテリアル株式会社 Surface coated hard alloy cutting tool with stable service life
JPH01255657A (en) * 1988-04-02 1989-10-12 Sumitomo Electric Ind Ltd Coated hard alloy and its production
JP6026157B2 (en) * 2012-07-06 2016-11-16 トーヨーエイテック株式会社 Hard film formation method

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JPS51107287A (en) * 1975-03-18 1976-09-22 Fujikoshi Kk KOSHITSUHIMAKUKEISEISOCHI
JPS52130488A (en) * 1976-04-27 1977-11-01 Ulvac Corp Evaporation of titanium carbide on tip
JPS5333984A (en) * 1976-09-10 1978-03-30 Hitachi Metals Ltd Process for coating cemented carbide alloy with film

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JPS63170165A (en) * 1987-01-06 1988-07-14 Nippon Plast Co Ltd Steering column cover

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KR820000249B1 (en) 1982-03-10

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