JPS6242995B2 - - Google Patents
Info
- Publication number
- JPS6242995B2 JPS6242995B2 JP10265980A JP10265980A JPS6242995B2 JP S6242995 B2 JPS6242995 B2 JP S6242995B2 JP 10265980 A JP10265980 A JP 10265980A JP 10265980 A JP10265980 A JP 10265980A JP S6242995 B2 JPS6242995 B2 JP S6242995B2
- Authority
- JP
- Japan
- Prior art keywords
- speed steel
- titanium
- coating
- carbonitride
- titanium carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000997 High-speed steel Inorganic materials 0.000 claims description 23
- 238000000576 coating method Methods 0.000 claims description 20
- 239000011248 coating agent Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 14
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 12
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 239000010936 titanium Substances 0.000 description 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 9
- 229910052719 titanium Inorganic materials 0.000 description 9
- 239000010410 layer Substances 0.000 description 8
- 238000005520 cutting process Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000005240 physical vapour deposition Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 101100008046 Caenorhabditis elegans cut-2 gene Proteins 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 101150105594 SCM3 gene Proteins 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
従来、高速度鋼に対してチタンの炭化物、窒化
物または炭窒化物を被覆し、耐摩耗性の向上をは
かる事が行われているが、その手段としては
CVD法（化学蒸着法）が用いられてきた。しか
しながらCVD法は、900〜1100℃の高温にて反応
させなければならない事から、高速度鋼が焼鈍さ
れてしまい、被覆後に焼入れ、焼戻しを行う必要
があつた。そのため、被覆膜に亀裂を生じたり、
剥離したり、寸法が変化したりする事があり、安
定した精度の良い製品を製造する事が困難であつ
た。またCVD法は反応の際に高速度鋼表層の炭
素を被覆膜中に奪う現象があり、高速度鋼自体の
性能を損う事なく被覆膜を形成する事は極めて困
難であつた。[Detailed Description of the Invention] Conventionally, high-speed steel has been coated with titanium carbide, nitride, or carbonitride to improve its wear resistance.
CVD (chemical vapor deposition) has been used. However, since the CVD method requires the reaction to take place at a high temperature of 900 to 1100°C, the high-speed steel is annealed, making it necessary to perform quenching and tempering after coating. As a result, cracks may occur in the coating film,
It has been difficult to manufacture products with stable precision because they may peel off or change dimensions. Furthermore, in the CVD method, carbon on the surface layer of high-speed steel is removed into the coating film during the reaction, and it has been extremely difficult to form a coating film without impairing the performance of the high-speed steel itself.
この現象も同じく反応温度が高いため、炭素原
子の拡散速度が大きくなる事に起因している。こ
れらの欠点があるためにCVD法による高速度鋼
への炭化チタン、炭窒化チタン、窒化チタンの被
覆の実用化は難しかつた。 This phenomenon is also caused by the fact that the reaction temperature is high, which increases the diffusion rate of carbon atoms. Due to these drawbacks, it has been difficult to commercialize coating high-speed steel with titanium carbide, titanium carbonitride, and titanium nitride using the CVD method.
そこで次に考えられたのがPVD法（物理蒸着
法）である。炭化チタン、炭窒化チタン、窒化チ
タンのPVD法には反応スパツタリング法、ARE
法（活性化反応蒸着法）、反応イオンプレーテイ
ング法などがある。これらのPVD法によれば高
速度鋼が焼鈍する600℃以下の低い温度で被覆膜
を形成する事が可能になる。中でも反応イオンプ
レーテイング法が他の方法にくらべ最も密着強度
も強く、切削性能も安定し、性能もいいことがわ
かつたので実施例は全てこの方法によつた。 The next method that was considered was the PVD method (physical vapor deposition method). PVD methods for titanium carbide, titanium carbonitride, and titanium nitride include reactive sputtering method and ARE.
method (activated reactive vapor deposition method), reactive ion plating method, etc. These PVD methods make it possible to form coatings at temperatures as low as 600°C or lower, which is the temperature at which high-speed steel is annealed. Among them, the reactive ion plating method was found to have the strongest adhesion strength, stable cutting performance, and good performance compared to other methods, so all Examples were conducted using this method.
高速度鋼に対する最適被覆膜について述べる。
高速度鋼はその用途が切削条件の変動が大きく且
つ低速重切削の分野である。このためこすり摩耗
及び溶着に強い被覆膜が適し、この点で炭化チタ
ン及び炭窒化チタンが優れている。窒化チタンは
耐溶着性には最も優れているが、通常の高速度鋼
使用条件においては炭化チタン及び炭窒化チタン
との差は認められず、こすり摩耗に弱いので適さ
ない。 This article describes the optimal coating film for high-speed steel.
High-speed steel is used in the field of low-speed, heavy-duty cutting where cutting conditions vary widely. For this reason, a coating film that is resistant to abrasion and welding is suitable, and titanium carbide and titanium carbonitride are excellent in this respect. Titanium nitride has the best welding resistance, but under normal high-speed steel usage conditions there is no discernible difference between titanium carbide and titanium carbonitride, and it is susceptible to rubbing and wear, so it is not suitable.
さて、以上述べた様に前述のPVD法を用いて
高速度鋼に最適な炭化チタンまたは炭窒化チタン
を被覆するのが最も性能向上を達成する上で最良
である事が明きらかであるが、しかしながら高速
度鋼が焼鈍されない200〜600℃の温度範囲に於い
て炭化チタンまたは炭窒化チタンを被覆した場合
高速度鋼と被覆膜の接着強度が工具用としては不
充分である事が試験の結果判明した。しかるに、
試験の過程に於いて、窒化チタンの場合は600℃
以下の低温でも、実用に耐える接着強度を有する
事を発見した。ここで、窒化チタンと炭窒化チタ
ンまたは炭化チタン界面の接着強度もまた大き
く、また窒化チタンから炭窒化チタンを経て炭化
チタンまで連続に組成を変化させる事も、反応ガ
ス組成を連続に変化させる事が容易に実施でき
る。 Now, as stated above, it is clear that coating high-speed steel with titanium carbide or titanium carbonitride using the PVD method described above is the best way to achieve the highest performance improvement. However, tests have shown that when high-speed steel is coated with titanium carbide or titanium carbonitride in the temperature range of 200 to 600℃, where it is not annealed, the adhesive strength between the high-speed steel and the coating is insufficient for use in tools. The results were revealed. However,
During the testing process, titanium nitride was heated to 600°C.
It was discovered that it has adhesive strength that can withstand practical use even at low temperatures below. Here, the adhesive strength at the interface between titanium nitride and titanium carbonitride or titanium carbide is also large, and it is also possible to continuously change the composition from titanium nitride to titanium carbonitride to titanium carbide. can be easily implemented.
即ち高速度鋼にチタン化合物を被覆し、有効な
性能を得るにおいて、本発明によりまず高速度鋼
上に0.01〜２μ望ましくは0.5〜１μの極めて薄
い窒化チタン膜を形成し、その上に炭化チタンま
たは窒化チタンの皮膜を１μ〜10μ望ましくは２
μ〜４μの厚みに被覆する事が必要となる。 That is, in order to obtain effective performance by coating high-speed steel with a titanium compound, according to the present invention, an extremely thin titanium nitride film of 0.01 to 2μ, preferably 0.5 to 1μ, is formed on the high-speed steel, and then titanium carbide is coated on top of the titanium nitride film. Or apply a titanium nitride film of 1μ to 10μ, preferably 2
It is necessary to coat it to a thickness of μ to 4 μ.
ここで第一層の窒化チタン膜の厚みが２μを越
えると耐摩耗性の向上の寄与よりも靭性の劣化が
大きくなるので不適当であり、また第二層の炭化
チタンまたは炭窒化チタン膜の厚みが１μを下回
ると耐摩耗性が不充分となり、10μを越えると靭
性の劣化が甚しく、やはり不適当である。 If the thickness of the titanium nitride film in the first layer exceeds 2μ, the deterioration in toughness will be greater than the contribution to improvement in wear resistance, so it is unsuitable. If the thickness is less than 1μ, the wear resistance will be insufficient, and if it exceeds 10μ, the toughness will be severely degraded, which is also inappropriate.
また本発明に於いて、被覆膜が第一層と第二層
の組合せの多重層であつても、被覆膜中に少量の
鉄族金属が含まれても良いのは勿論である。 Further, in the present invention, even if the coating film is a multilayer combination of the first layer and the second layer, it goes without saying that the coating film may contain a small amount of iron group metal.
以下に実施例を記す。 Examples are described below.
実施例 １
高速度鋼（SKH4A）をSNP432の形状に加工
し、第１図に示す反応イオンプレーテイング装置
を用いて、電子ビームにて加熱蒸発せしめたチタ
ンをイオン化電圧＋60Vでイオン化し、−0.5KV
の基板電圧を印加した。ここで試料No.１は窒素ガ
ス雰囲気中３×10-4Torrにて14分間保持し次に
アセチレンガス雰囲気中４×10-4Torrにて90分
間保持した所、高速度鋼に焼鈍は起きておらず、
TiN層0.5μ、TiC層4.5μの被覆膜を得た。Example 1 High-speed steel (SKH4A) was processed into the shape of SNP432, and titanium heated and evaporated with an electron beam was ionized at an ionization voltage of +60 V using the reactive ion plating apparatus shown in Fig. 1. KV
A substrate voltage of was applied. Here, sample No. 1 was held at 3 x 10 -4 Torr in a nitrogen gas atmosphere for 14 minutes, and then held at 4 x 10 -4 Torr in an acetylene gas atmosphere for 90 minutes, and no annealing occurred in the high-speed steel. Not yet,
A coating film was obtained with a TiN layer of 0.5μ and a TiC layer of 4.5μ.
次に試料No.２としてアセチレンガス雰囲気中４
×10-4Torrにて100分間保持したところ、高速度
鋼に焼鈍は起きておらず、TiC層５μの被覆膜を
得た。また被覆していない高速度鋼を試料No.３と
して旋削耐摩耗性試験を行つた。被削材SCM3工
具FN11R−44Aを用い、切削速度30ｍ／min、切
込２mm、送り0.1mm／revの条件で試験したところ
第２図の結果を得た。 Next, as sample No. 2, 4 in an acetylene gas atmosphere was prepared.
When held at ×10 -4 Torr for 100 minutes, no annealing occurred in the high-speed steel, and a TiC layer of 5 μm coating was obtained. A turning wear resistance test was also conducted using uncoated high-speed steel as sample No. 3. A test was conducted using a SCM3 workpiece tool FN11R-44A under the conditions of cutting speed 30 m/min, depth of cut 2 mm, and feed rate 0.1 mm/rev, and the results shown in Figure 2 were obtained.
試料No.２は10分間切削後被覆膜が剥離してしま
い、20分後には試料No.３の高速度鋼そのものの性
能になつてしまつたが、本発明の被覆高速度鋼で
ある試料No.１は優れた耐摩耗性を維持している。 In sample No. 2, the coating peeled off after 10 minutes of cutting, and after 20 minutes, the performance reached the same level as the high-speed steel of sample No. 3, but the coated high-speed steel of the present invention did not. No. 1 maintains excellent wear resistance.
実施例 ２
実施例１において、同じくSKH4Aを用い試料
No.４として窒素ガス雰囲気中３×10-4Torrにて
20分間保持した後、窒素ガス分圧１×10-4Torr
アセチレンガス分圧３×10-4Torrの雰囲気中に
て80分間保持したところ、高速度鋼に焼鈍は起き
ておらず、TiN層１μ、Ti（CN）層４μの被覆
膜を得た。Example 2 In Example 1, a sample was also prepared using SKH4A.
At 3×10 -4 Torr in nitrogen gas atmosphere as No.4
After holding for 20 minutes, nitrogen gas partial pressure 1×10 -4 Torr
When held in an atmosphere with an acetylene gas partial pressure of 3×10 -4 Torr for 80 minutes, no annealing occurred in the high-speed steel, and a coating film with a TiN layer of 1μ and a Ti(CN) layer of 4μ was obtained.
この試料No.４を実施例１の切削条件で試験した
結果も第２図に示す様に優れたものであつた。 The results of testing this sample No. 4 under the cutting conditions of Example 1 were also excellent as shown in FIG.
第１図は本発明の実施例方法を示す説明図で、
図中１は真空槽、２は排気管、３は基板電源、４
は基板、５はイオン化電源、６はイオン化電極、
７は反応ガス導入パイプ、８は蒸発源、９は試料
を示す。
第２図は切削試験結果を示す図表である。
FIG. 1 is an explanatory diagram showing an example method of the present invention,
In the figure, 1 is a vacuum chamber, 2 is an exhaust pipe, 3 is a board power supply, and 4
is a substrate, 5 is an ionization power source, 6 is an ionization electrode,
7 is a reaction gas introduction pipe, 8 is an evaporation source, and 9 is a sample. FIG. 2 is a chart showing the cutting test results.
Claims (1)
物もしくは炭窒化物の被覆膜を形成せしめるに際
し、予め600℃以下の温度でチタンの窒化物を0.1
μ以上２μ以下の厚みに被覆した後、600℃以下
の温度でチタンの炭化物もしくは炭窒化物を被覆
する事を特徴とする被覆高速度鋼の製造法。1. When forming a coating film of titanium carbide or carbonitride on high-speed steel by the PVD method, 0.1% of titanium nitride is coated in advance at a temperature of 600°C or less.
A method for producing coated high-speed steel, which comprises coating titanium carbide or carbonitride at a temperature of 600° C. or less after coating the steel to a thickness of μ to 2 μ.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10265980A JPS5629670A (en) | 1980-07-25 | 1980-07-25 | Preparation of coated high speed steel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10265980A JPS5629670A (en) | 1980-07-25 | 1980-07-25 | Preparation of coated high speed steel |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15913276A Division JPS5382672A (en) | 1976-12-28 | 1976-12-28 | Coated high speed steel and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5629670A JPS5629670A (en) | 1981-03-25 |
| JPS6242995B2 true JPS6242995B2 (en) | 1987-09-10 |
Family
ID=14333351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10265980A Granted JPS5629670A (en) | 1980-07-25 | 1980-07-25 | Preparation of coated high speed steel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5629670A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0639398U (en) * | 1992-10-30 | 1994-05-24 | ぺんてる株式会社 | Punching device for paper stacks |
| JPH0639396U (en) * | 1992-10-30 | 1994-05-24 | ぺんてる株式会社 | Punching blade of paper bundle punching device |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4670172A (en) * | 1985-03-29 | 1987-06-02 | Borg-Warner Corporation | Process and kit for working metals |
| FR2596775B1 (en) * | 1986-04-07 | 1992-11-13 | Univ Limoges | MULTI-LAYER HARD COATING MADE BY ION DEPOSITION OF TITANIUM NITRIDE, TITANIUM CARBONITRIDE AND I-CARBON |
| PT1598456E (en) * | 2004-05-17 | 2008-12-29 | Braecker Ag | Ring traveller and method for producing the same. |
| CN103158296B (en) * | 2013-03-15 | 2014-10-15 | 烟台鲁东泵业有限公司 | Titanium carbide/titanium nitride nano multi-coating impeller and preparation method thereof |
-
1980
- 1980-07-25 JP JP10265980A patent/JPS5629670A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0639398U (en) * | 1992-10-30 | 1994-05-24 | ぺんてる株式会社 | Punching device for paper stacks |
| JPH0639396U (en) * | 1992-10-30 | 1994-05-24 | ぺんてる株式会社 | Punching blade of paper bundle punching device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5629670A (en) | 1981-03-25 |
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