JPS59209727A - Method for processing aluminum group material for ultra-high vacuum - Google Patents

Abstract

PURPOSE:To produce a tight aluminum oxide film, by cutting an aluminum group material while it is cooled by an inert gas and oxygen within a dehydrated vessel and forming a plasma on the cut surface. CONSTITUTION:An aluminum group workpiece W is set in a vessel 1 which is dehydrated by a vacuum pump 6 and cut by a cutting tool 4. At the cutting process, the portion to be cut is cooled by an inert gas and oxygen to be supplied from a gas cylinder 9 through a nozzle 8. On the cut surface 18, a plasma 17 is formed by means of a charging electrode 11, and an aluminum oxide film is formed by the plasma. Since such things as cutting oil and impure gas are not present in the vessel, a tight aluminum oxide film can be produced.

Description

DETAILED DESCRIPTION OF THE INVENTION The unexploded 1111 is a particle accelerator, etc., which is suitable for use in ultra-high vacuum applications, particularly for cutting the above-mentioned materials and treating the cut surfaces thereof. Regarding processing methods.

+ for containers that require ultra-high vacuum, such as conventional particle accelerators.
As the material, a material whose main component is aluminum is used, but the surface of such aluminum material generally has a thickness of about 100 to 1,0000, which absorbs dirt such as water and oil. There is an oxidized and degraded layer of
・There is a problem that when A class is closed, it is released as water, oil, or gas.

Therefore, it is conceivable to cut the above aluminum-based material 4 = table m of J material, but if the cutting process is simply carried out using a machine tool such as a lathe or slicing machine, the active cutting surface will immediately react with the dirty atmosphere. There is a problem that a clean surface cannot be obtained because the surface is raised or contaminated with cutting oil.

The present invention aims to solve these problems by cutting aluminum-based 4.1 material and appropriately treating the cut surface to create a stable surface suitable for ultra-high vacuum applications. The purpose is to reduce the aluminum-based (addition of 4 materials) method to 1 = 1 λ.

For this reason, the method of processing aluminum-based materials for ultra-high vacuum according to the present invention.

In this method, while cutting a piece of aluminum mainly composed of aluminum inside a reduced pressure container, the cut part is cooled by blowing inert gas and oxygen gas, and then the second cutting process is carried out. It is characterized by generating plasma along the cutting surface using a discharge electrode to form a dense thin layer of aluminum oxide on the cutting surface.

Below, a method for processing aluminum-based materials for ultra-high vacuum as an embodiment of the present invention will be explained with reference to the drawings. 2 is a perspective view, and FIG. 2 is an explanatory view showing the second stage of cutting and plasma treatment of the surface of the abrasive material.

As shown in ml [1, a workpiece (hereinafter referred to as a workpiece) W whose main component is aluminum is processed inside a metal container 1 having a window 1a in which a transparent material is hermetically fitted. This container 1 is attached to the main body of the lathe (not shown in V) so as to cover the workpiece receptacle (=1 part 3) of the rotating shaft 2 of a lathe or milling machine, and also cover the recess part 5 of the cutting tool 4. It is installed.

A vacuum pump 6 or a valve 7 is connected to the container 1 to reduce the pressure inside the container.

The rotating shaft 2 is rotationally driven by a motor (not shown) outside the container 1, and a bearing 2a which is airtightly sealed is provided at a portion where the rotating shaft 2 passes through the container 1.

Furthermore, seven nozzles 8 for cooling the cutting part of the workpiece are provided inside the container, and a gas cylinder 9 containing a cooling gas consisting of an inert gas such as argon or oxygen gas is provided in this nozzle 8.
are connected via a leak valve 10.

Further, a discharge electrode 11 that generates plasma along the cutting surface of the workpiece W is disposed in the container 1, and a high voltage is supplied to the electrode 1 from a power source 12 so that ν·Σ.

Note that an airtight seal 14 made of an insulating layer is applied to a portion where the high voltage line 1j3 from the power source 12 to the discharge electrode 1 penetrates the metal wall of the container 1.

Also, on the workpiece W, the workpiece mounting part 39 rotating shaft 21 bearing 2a
and a lead wire 1 connected through the metal wall of the container 1
5 is provided, and this lead wire is the ground wire 16 of the power supply]2.
It is connected to the.

Using the above-described apparatus, the method of processing an aluminum-based material for ultra-high vacuum according to the present invention is carried out as follows.

First, the pressure inside the container 1 is reduced by the operation of the vacuum pump 6.

Next, while rotating the rotary shaft 2 of the lathe or milling machine, the workpiece W is cut by the cutting tool 4.

At this time, as shown in FIGS. 1 and 2, a mixed gas of argon gas and oxygen gas is blown from the nozzle 8 onto the cutter 4 and the cutting portion of the workpiece W to effect cooling.

In this way, the cut surface of the work W is kept clean, and argon gas and oxygen gas are present in the container 1, so that plasma generated by arc discharge of the discharge electrode 11 along the cut surface of the work W is kept clean. When 17 is generated, aluminum-based element (
・On the cutting surface of the workpiece W as 4, aluminum oxide F'7JV118, which is as dense as sapphire, is shaped like rj.
i, it will be done.

The thin layer 18 formed on the surface of the workpiece W in two series is extremely stable and hardly reacts with gas, moisture, oil, etc. in the atmosphere, and adsorption of them is also extremely small. It is.

6 Addition of the present invention]-treated aluminum (・
The ultra-high vacuum properties of 4-2[ are extremely excellent, and unlike the conventional ultra-high vacuum A=A material, there is no need for long-term heating and degassing treatment in vacuum. It has the advantage of being able to achieve ultra-high vacuum.

In addition, a mixed gas of argon and oxygen gas is used as a workpiece W.
In order to prevent external pressure from building up inside the container 1 when blowing the gas into the cutting part to cool it, suction is performed by the vacuum pump 6 if necessary, and this suction gas is returned to the gas cylinder 9 by a compressor (not shown). It will be done.

Further, the thin layer 18 formed on the surface of the aluminum-based material 4.4 may be further coated with a desired coating using an ion blating device provided inside the container 1.

As detailed above, the ultra-high vacuum aluminum-based 4・
According to the processing method of 4 ingredients; Inside the coerced container,
Since we cut the metal material whose main component is aluminum,
The cutting part is cooled by spraying with inert gas and oxygen gas. Then, plasma is generated by a discharge electrode along the cutting surface of the cutting surface, and a dense aluminum oxide is formed on the cutting surface. By extremely simple means of forming a thin layer of
This has the effect of allowing aluminum-based abrasive materials, which have a surface with excellent ultra-high vacuum properties, to be easily and inexpensively polished.

[Brief explanation of the drawing]

：PJ1 is a perspective view showing the main parts of the equipment used for the addition of class 1-6 vacuum aluminum H material as an embodiment of the present invention, and FIG. Cutting on the surface of the material:
FIG. 1 is an explanatory diagram showing the steps of processing and plasma treatment. ]...Container, IIi...Window, 2...Jllll of lathe or milling machine ``L' axis, 2a...f'llll receiver, 3...
・Workpiece collection (=f section, ↓...High), 5...Bite mounting part, 6...Vacuum pump, 7...Valve, 2;...Nozzle, 5...Gas cylinder, ]()...Leak valve, 11
...discharge electrode, ]2.. electric) source, 13.. high voltage line, 1.
1...Airtight seal, 15...Lee: wire, ]6...Earth wire, 17...Plasma, 128...Support layer, ~■...
work. Agent Patent Attorney Yoshihiko Iinuma Figure 1 Procedure 711) Correct τ11 11? January 110, Shiloh 59, 1158 A. Patent application @83250 No. 2
Name of the invention Processing method of aluminum-based paulownia wood for ultra-high vacuum use 3 Supplementary J ``Relationship with the 11 cases Applicant postal code 305 11: Address 135 Oaza Daikakumame, Sakuramura, Niiharu-gun, Ibaraki Prefecture
2 Namiki 21-1] 1284me! No. 102 Name: Hajime Ishimaru 4 Agent Postal code: 160 +1- Address: 5-3+3- Minamimotomachi, Shinjuku-ku, Tokyo
6. Column for detailed explanation of the invention in the specification subject to amendment. 7. ``1-slice disk'' stated in line 214 of the statement of contents of the amendment.
-Correct to milling machine-1. □

Claims (1)

[Claims] While cutting a material whose main component is aluminum inside a reduced pressure container, the cut part is cooled by blowing inert gas and oxygen gas, and then the cut part of the material is A method for processing an aluminum-based material for ultra-high vacuum use, which is characterized by generating plasma along the discharge electrode and forming a layer of N-rich aluminum oxide on the cutting surface.