JPS5922387Y2 - 質量分析装置におけるガス導入装置 - Google Patents

質量分析装置におけるガス導入装置

Info

Publication number
JPS5922387Y2
JPS5922387Y2 JP14389876U JP14389876U JPS5922387Y2 JP S5922387 Y2 JPS5922387 Y2 JP S5922387Y2 JP 14389876 U JP14389876 U JP 14389876U JP 14389876 U JP14389876 U JP 14389876U JP S5922387 Y2 JPS5922387 Y2 JP S5922387Y2
Authority
JP
Japan
Prior art keywords
gas
gas introduction
universal joint
gas source
airtight chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14389876U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5360883U (2
Inventor
達次 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP14389876U priority Critical patent/JPS5922387Y2/ja
Publication of JPS5360883U publication Critical patent/JPS5360883U/ja
Application granted granted Critical
Publication of JPS5922387Y2 publication Critical patent/JPS5922387Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Joints Allowing Movement (AREA)
  • Electron Tubes For Measurement (AREA)
JP14389876U 1976-10-26 1976-10-26 質量分析装置におけるガス導入装置 Expired JPS5922387Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14389876U JPS5922387Y2 (ja) 1976-10-26 1976-10-26 質量分析装置におけるガス導入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14389876U JPS5922387Y2 (ja) 1976-10-26 1976-10-26 質量分析装置におけるガス導入装置

Publications (2)

Publication Number Publication Date
JPS5360883U JPS5360883U (2) 1978-05-24
JPS5922387Y2 true JPS5922387Y2 (ja) 1984-07-04

Family

ID=28752570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14389876U Expired JPS5922387Y2 (ja) 1976-10-26 1976-10-26 質量分析装置におけるガス導入装置

Country Status (1)

Country Link
JP (1) JPS5922387Y2 (2)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11328919B2 (en) * 2018-05-11 2022-05-10 Leco Corporation Two-stage ion source comprising closed and open ion volumes

Also Published As

Publication number Publication date
JPS5360883U (2) 1978-05-24

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