JPS5925154A - 荷電粒子アナライザ素子の整列装置 - Google Patents

荷電粒子アナライザ素子の整列装置

Info

Publication number: JPS5925154A
Authority: JP; Japan
Prior art keywords: charged particle; particle analyzer; hole; plate; aligning
Prior art date: 1982-08-02
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP58122461A

Other languages

English (en)

Japanese (ja)

Inventor

ロバ−ト・エル・ゲルラツハ

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Applied Biosystems Inc

Original Assignee

Perkin Elmer Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1982-08-02

Filing date

1983-07-07

Publication date

1984-02-09

1983-07-07 Application filed by Perkin Elmer Corp filed Critical Perkin Elmer Corp

1984-02-09 Publication of JPS5925154A publication Critical patent/JPS5925154A/ja

Status Pending legal-status Critical Current

Links

239000002245 particle Substances 0.000 title claims description 23
239000000565 sealant Substances 0.000 claims description 4
230000002093 peripheral effect Effects 0.000 claims description 2
238000000034 method Methods 0.000 description 7
238000010894 electron beam technology Methods 0.000 description 3
230000008569 process Effects 0.000 description 3
241000251468 Actinopterygii Species 0.000 description 1
241000272814 Anser sp. Species 0.000 description 1
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
230000004075 alteration Effects 0.000 description 1
229910052802 copper Inorganic materials 0.000 description 1
239000010949 copper Substances 0.000 description 1
238000010304 firing Methods 0.000 description 1
239000003574 free electron Substances 0.000 description 1
238000003754 machining Methods 0.000 description 1
239000000463 material Substances 0.000 description 1
230000007246 mechanism Effects 0.000 description 1
239000000203 mixture Substances 0.000 description 1
230000004048 modification Effects 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000005855 radiation Effects 0.000 description 1
230000004044 response Effects 0.000 description 1
238000007493 shaping process Methods 0.000 description 1
238000004513 sizing Methods 0.000 description 1
239000007921 spray Substances 0.000 description 1
239000013077 target material Substances 0.000 description 1
238000003466 welding Methods 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Electron Tubes For Measurement (AREA)
Analysing Materials By The Use Of Radiation (AREA)

JP58122461A 1982-08-02 1983-07-07 荷電粒子アナライザ素子の整列装置 Pending JPS5925154A (ja)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
US40493282A	1982-08-02	1982-08-02
US404932		1999-09-24

Publications (1)

Publication Number	Publication Date
JPS5925154A true JPS5925154A (ja)	1984-02-09

Family

ID=23601618

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP58122461A Pending JPS5925154A (ja)	1982-08-02	1983-07-07	荷電粒子アナライザ素子の整列装置

Country Status (2)

Country	Link
EP (1)	EP0100525A2 (fr)
JP (1)	JPS5925154A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2012009290A (ja) *	2010-06-25	2012-01-12	Hitachi High-Technologies Corp	質量分析装置

1983
- 1983-07-07 JP JP58122461A patent/JPS5925154A/ja active Pending
- 1983-07-27 EP EP19830107403 patent/EP0100525A2/fr not_active Withdrawn

Also Published As

Publication number	Publication date
EP0100525A2 (fr)	1984-02-15

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