JPS593401A - Device and method for producing mirror for beam scanning - Google Patents
Device and method for producing mirror for beam scanningInfo
- Publication number
- JPS593401A JPS593401A JP11207782A JP11207782A JPS593401A JP S593401 A JPS593401 A JP S593401A JP 11207782 A JP11207782 A JP 11207782A JP 11207782 A JP11207782 A JP 11207782A JP S593401 A JPS593401 A JP S593401A
- Authority
- JP
- Japan
- Prior art keywords
- core member
- mirror
- beam scanning
- mold
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000853 adhesive Substances 0.000 claims abstract description 12
- 230000001070 adhesive effect Effects 0.000 claims abstract description 12
- 238000002347 injection Methods 0.000 claims description 18
- 239000007924 injection Substances 0.000 claims description 18
- 239000005357 flat glass Substances 0.000 claims description 9
- 239000011521 glass Substances 0.000 abstract description 9
- 239000003822 epoxy resin Substances 0.000 abstract description 2
- 229920000647 polyepoxide Polymers 0.000 abstract description 2
- 239000011162 core material Substances 0.000 description 12
- 229920003002 synthetic resin Polymers 0.000 description 5
- 239000000057 synthetic resin Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
Description
【発明の詳細な説明】
この出願の発明はビームスキャニング用ミラの製造装置
及びその製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The invention of this application relates to a beam scanning mirror manufacturing apparatus and its manufacturing method.
近来レーザビームに関する研究が著しく進歩し、これに
伴い多種類のヒ１−ムスキャニノグ用ミラが製造される
に至った。従来より製造されているこの種のミラは、主
として光学ガラスを所定のブロックにカッティングし、
多角形に形成し、その反射面を研磨するか又はアルミニ
ュウム、銅等の金属をラソピノグ又は超精密切削加工等
を施して反射面として使用する方法等が一般に採用され
て込た。この様な方法で製作されたミラは、複雑な作業
工程を要するので生産コストは高く、特に使用するガラ
ス部材の脆弱性に起因してミラの回転数の高速化を計る
ことは困難であった。In recent years, research on laser beams has made remarkable progress, and as a result, many types of mirrors for laser beam scanning have been manufactured. This type of mirror, which has been traditionally manufactured, is mainly made by cutting optical glass into predetermined blocks.
Generally, a method has been adopted in which the reflective surface is formed into a polygon and the reflective surface is polished, or a metal such as aluminum or copper is subjected to laso-pinog or ultra-precision cutting to be used as the reflective surface. Mirrors manufactured using this method require complex work processes, resulting in high production costs.In particular, it has been difficult to increase the rotation speed of Mira due to the fragility of the glass components used. .
そこで本願の発明は従来例の欠陥を除去し、能率的なビ
ームスキャニング用ミラの製造装置及びその製造方法を
提供することを目的とする。Therefore, an object of the present invention is to eliminate the defects of the conventional example and provide an efficient beam scanning mirror manufacturing apparatus and its manufacturing method.
以下添付図面に基づいて本発明の詳細な説明する。本発
明の実施例は反射面を六面体となしたビームスキャニン
グ用ミラに関するものである。The present invention will be described in detail below based on the accompanying drawings. An embodiment of the present invention relates to a beam scanning mirror having a hexahedral reflecting surface.
ミラ２の六面体コア部材４表その反射面を形成する複数
の薄型板状ガラス部材６ａ 、 ６ｂ 、 ６ｃ 、
６ｄ 、 ６ｅ６「とは別々に製作し、後述する分割組
み立て自在の金型に組み込まれる。コア部材４ｉｌ−１
：通常高力アルミニュウム合金よりなりその中心部に中
心孔８全穿設する。六面体のコア部材４の各外周部に−
、狭い隙間部１０；Ｉ 、 １０１） 、 ＩＯｃ 、
１０（１、ＩＯｅ 、 ＩＯｆをへだて＼前記ガラス
部材６ａ・・・６ｆが配設される。A plurality of thin plate glass members 6a, 6b, 6c forming the reflective surface of the hexahedral core member 4 of Mira 2,
6d and 6e6" and are assembled into a mold that can be assembled separately as described later. Core member 4il-1
:Usually made of high-strength aluminum alloy, all 8 center holes are drilled in the center. At each outer periphery of the hexahedral core member 4 -
, narrow gap 10; I, 101), IOc,
10 (1, IOe, IOf) and the glass members 6a...6f are disposed.
第１図は、前記のように配設されたコア＋’ｌ（材４と
ガラス部材６ａ・・・６ｆとが一方向に開口１２シた金
型に組み込捷れた状朔を示す。FIG. 1 shows the state in which the core material 4 and the glass members 6a, .
金型の一方向開口部１２に位置するコア部材４［は、中
心孔８と並列にコア部′＋Ａ４を貫通してその底部にお
いて前記隙間１０ａ・・・１０「にそれぞれ連通する複
数の注入孔１４ａ 、 １４ｂ 、 １４ｃ 、 １４
ｄ 、 １４ｅ。The core member 4 located in the one-way opening 12 of the mold has a plurality of injection holes that pass through the core part'+A4 in parallel with the center hole 8 and communicate with the gaps 10a...10' at the bottom thereof. 14a, 14b, 14c, 14
d, 14e.
１４「を穿設する。とれらの注入孔にはそれぞれ開閉自
在のパイプ１６ａ 、 １６ｂ 、 １６ｃ 、 １６
ｄ 、 １６ｃ 。14" are bored. Pipes 16a, 16b, 16c, 16, which can be opened and closed, are installed in these injection holes, respectively.
d, 16c.
１６ｆが取り付けられる。これらのパイプば１図示して
ないが、ホース等により合成樹脂等の接着剤注入用ポツ
プに連結される。金型１８は、上型２ｏ、横型２２、下
ｍ２４ Ｋ、より分割組み立て自在に構成される。金型
１８は、前述のように上型２ｏに一方開口部１２が設け
られる以外は、第２図に図示のように、コア部材４の外
周に組み立てられる。上型２ｏには前記隙間１０ａ・・
・１０ｆのそれぞれに連通する吸７出孔２６ａ、 ２６
ｂ 、 ２６ｃ 、 ２６ｄ 、 ２６ｅ 、 ２６（
を設け、これらの吸出孔の入口にはそれぞれ開閉自在の
パイプ２８ａ、 ２８ｂ 、 ２８ｃ 、 ２８ｄ 、
２８ｅ 、 ２８ｆを取り付ける。16f is attached. Although these pipes are not shown, they are connected to a pot for injecting an adhesive such as synthetic resin through a hose or the like. The mold 18 is composed of an upper mold 2o, a horizontal mold 22, and a lower mold 24K, which can be assembled into parts. The mold 18 is assembled around the outer periphery of the core member 4 as shown in FIG. 2, except that the upper mold 2o is provided with one opening 12 as described above. The upper die 2o has the gap 10a...
・Suction 7 outlet holes 26a, 26 communicating with each of 10f
b, 26c, 26d, 26e, 26(
are provided, and at the inlets of these suction holes are pipes 28a, 28b, 28c, 28d, which can be opened and closed, respectively.
Install 28e and 28f.
又これらのパイプを図示してないが、ホース等により吸
出用真空ボノグに連結する。Although these pipes are not shown, they are connected to a suction vacuum bonog via a hose or the like.
次に本発明の作用について説明する。先ず吸出孔２６ａ
・０２６ｆにパイプ２８ａ” ２８ｆ、ホース等を介
して連結している真空ポツプ（図示せず）を操作して、
注入孔１４ｔ・・・１４ｆ、隙間１０ａ…１０ｆ並に吸
出孔２６，１・・・２６「の内部を真空状態に維持する
。この操作を行う際は注入孔パイプ１６ａ・・・１６「
を閉鎖状態に置いてもよい。Next, the operation of the present invention will be explained. First, the suction hole 26a
・Operate the vacuum pop (not shown) connected to 026f via pipe 28a" 28f, hose, etc.
The insides of the injection holes 14t...14f, the gaps 10a...10f, and the suction holes 26, 1...26'' are maintained in a vacuum state.When performing this operation, the injection hole pipes 16a...16'' are maintained in a vacuum state.
may be kept closed.
次に注入孔１４ａ”ａ１４ｆ Ｋ、パイプ１６ａ”・１
６ｆ 。Next, injection hole 14a"a14f K, pipe 16a"・1
6f.
ホース等を介して連結している注入用ポツプ（図示せず
）を作動させて、合成樹脂等の接着剤例えばエポキシ樹
脂３０を徐々に注入すれば真空吸入作用により前記接着
剤は、矢印の方向へ移動し、注入孔１４ａ・・・１４Ｆ
をへてコア部材４０面と板状ガラス部材６ａ・・・６ｆ
との隙間１０ａ・・・ＩＯｆ Ｋ吸入充填され、前記充
填完了と同時に関係手段であるポンプ等の作動を停止す
る。充填された合成樹脂接着剤は所定時間経過後硬化す
ることにより、ガラス部材６ａ・・・６ｆはコア部材４
の外周に接着される。その後関係部４ｎである金型１８
、注入用パイプ１６３・・・１６ｆ。By operating an injection pot (not shown) connected via a hose or the like, and gradually injecting an adhesive such as a synthetic resin, for example, an epoxy resin 30, the adhesive will be drawn in the direction of the arrow by the vacuum suction action. Move to injection hole 14a...14F
After passing through, the core member 40 side and the plate glass members 6a...6f
The gap 10a . . . IOf K is suctioned and filled, and at the same time as the filling is completed, the operation of the related means such as the pump is stopped. The filled synthetic resin adhesive is cured after a predetermined period of time, and the glass members 6a...6f are bonded to the core member 4.
is glued to the outer periphery of the After that, the mold 18 which is the related part 4n
, injection pipe 163...16f.
吸出用パイプ２８ａ・・・２８丁、−ホース等を取り外
し硬化した合成樹脂接着剤３０の不要部分を除去、整形
すれば本発明のビームスキャニング用ミラが完成する。The beam scanning mirror of the present invention is completed by removing 28 suction pipes 28a, hoses, etc., removing unnecessary portions of the hardened synthetic resin adhesive 30, and shaping.
本願発明は、製造工程が簡単であり且つ量産化が可能で
あるから製造コストの低減を招く等の効果の外に、比較
的研磨し易い板状ガラス部材を反射面とし採用して、こ
れを接着剤により、コア部材と接着固定した構成であり
、板状ガラス部材を極めて薄く形成することによりミラ
の重量軽減を計り、ガラス接着面にか＼る遠心力の低下
によってミラの高速回転化が可能となり、接着剤を流入
せしめるコア部材とガラス部材との隙間を極めて小さく
なし、安定什のある高精度のミラをうることができる。The present invention has advantages such as reducing manufacturing costs because the manufacturing process is simple and mass production is possible. In addition, the present invention employs a relatively easy-to-polish plate glass member as a reflective surface. It is configured to be fixed to the core member with an adhesive, and by making the plate glass member extremely thin, the weight of the mirror is reduced, and the reduction in centrifugal force exerted on the glass bonding surface allows the mirror to rotate at high speed. This makes it possible to make the gap between the core member and the glass member into which the adhesive flows extremely small, and to obtain a stable and highly accurate mirror.
第１図は本発明の金型に組み適寸れた一実施例の正面図
。
第２図は第１図のＸ−Ｘの線にそった断面図。
第３図は完成したミラの一部断面図。
第４図は完成したミラの正面図。
第５図は第４図の側面図。
２はミラ、４はコア部材、６ａ 、 ６１） 、 ６ｃ
、 （３ｃｌ 。
５ｅ 、 ６ｆはガラス部材、８は中心孔、１０．＋
、 １０ｂ、 １０ｃ 、 １０（１、ＩＯｅ 、 Ｌ
Ｏｆは隙間、１２は開口、１４ａ 、 １４１）、 ！
４ｃ 、 １４ｄ 、 １４ｅ 、Ｉ４（は注入孔、１
６ａ１．１６ｂ 、托ｃ 、 ］、６ｄ 、 １６ｅ
、 １６ｆは注入孔バイブ、１８は金型、２０は上型、
２２は横型、２４は下型、２６ａ 、 ２６＋） 、
２６ｃ 、 ２６ｄ 、２６ｅ、２６「は吸出孔、２８
ａ 、 ２８１） 、 ２８ｃ 、 ２８（１。
２８ｅ 、 ２８ｒは吸入孔パイプ、３０は合成樹脂接
着剤。
特 許 出 願 人 株式会社コパルエレクトラ代 理
人 弁理士 小 林 末弟１図
箔２図FIG. 1 is a front view of an embodiment of the present invention assembled into a mold and suitably sized. FIG. 2 is a sectional view taken along the line XX in FIG. 1. Figure 3 is a partial cross-sectional view of the completed Mira. Figure 4 is a front view of the completed Mira. FIG. 5 is a side view of FIG. 4. 2 is Mira, 4 is Core member, 6a, 61), 6c
, (3cl. 5e, 6f is a glass member, 8 is a center hole, 10.+
, 10b, 10c, 10(1, IOe, L
Of is a gap, 12 is an opening, 14a, 141), !
4c, 14d, 14e, I4 (injection hole, 1
6a1.16b, c, ], 6d, 16e
, 16f is an injection hole vibe, 18 is a mold, 20 is an upper mold,
22 is horizontal type, 24 is lower type, 26a, 26+),
26c, 26d, 26e, 26" are suction holes, 28
a, 281), 28c, 28 (1. 28e and 28r are suction hole pipes, 30 is a synthetic resin adhesive. Patent applicant Copal Electra Co., Ltd. Agent Patent attorney Kobayashi Youngest brother 1 figure foil 2 figures
Claims (1)
並列に複数の貫通注入孔を設け、上型に設けた複数の貫
通吸出孔をコア部材面と板ガラス部材とで形成する複数
の隙間と連通せ・しめ、更に前記隙間と貫通注入孔とを
それぞれ連通せしめてなり、前記貫通注入孔より注入さ
れた接着剤が前記隙間に吸入充填後硬化しコア部材の面
に板状ガラス部材を接着せしめることを特徴とするビー
ムスキャニング用ミラの製造装置。 ２、連通する前記注入孔、隙間、駅用孔内部を真空状態
に保持する装置を具えた特許請求の範囲第１項に記載の
ビームスキャニング用ミラの製造装置。 ３、前記注入孔、吸出孔の入口にパイプ部Ｈ”を取り付
け、それぞれ注入ポンプ真空ボノグに連結した特許請求
の範囲第２項に記載のビームスキャニング用ミラの製造
装置。 ４、金型に＃１み込まれた状態で互に連通ずるコア部材
の貫通注入孔、コア部材と板状ガラス部材の隙間、上型
の貫通吸出孔を真空状態に保持し、前記真空状態のま＼
で、注入孔より注入された接着剤がコア部材と板状ガラ
ス部材との隙間に吸入充填され、硬化後板状ガラス部材
はコア部材に接着されることを特徴とするビームスキャ
ニング用ミラの製造方床。 ５、前記金型は分割組み立て自在の上型、横型、下型よ
りなる特許請求の範囲第１項に記載のビームスキャニン
グ用ミラの製造装置。[Claims] 1. A plurality of through injection holes are provided in parallel in the center hole of the polyhedral core member incorporated in the mold, and a plurality of through suction holes provided in the upper mold are connected to the core member surface and the sheet glass. The core member is made to communicate with and tighten a plurality of gaps formed by the core member, and the gaps are communicated with through-injection holes, respectively, and the adhesive injected through the through-injection holes is sucked into the gaps and hardened after being filled. 1. An apparatus for manufacturing a mirror for beam scanning, characterized in that a plate glass member is adhered to the surface of the mirror. 2. The apparatus for manufacturing a mirror for beam scanning according to claim 1, further comprising a device for maintaining the inside of the communication injection hole, gap, and station hole in a vacuum state. 3. The apparatus for manufacturing a mirror for beam scanning according to claim 2, wherein a pipe portion H" is attached to the inlet of the injection hole and the suction hole, and each is connected to an injection pump vacuum bonog. 4. 1. The injection hole in the core member, the gap between the core member and the sheet glass member, and the suction hole in the upper mold, which communicate with each other in the filled state, are maintained in a vacuum state, and the
Manufacturing a mirror for beam scanning, characterized in that the adhesive injected from the injection hole is sucked and filled into the gap between the core member and the plate glass member, and after curing, the plate glass member is bonded to the core member. Square bed. 5. The apparatus for manufacturing a mirror for beam scanning according to claim 1, wherein the mold comprises an upper mold, a horizontal mold, and a lower mold, which can be assembled separately.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11207782A JPS593401A (en) | 1982-06-29 | 1982-06-29 | Device and method for producing mirror for beam scanning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11207782A JPS593401A (en) | 1982-06-29 | 1982-06-29 | Device and method for producing mirror for beam scanning |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS593401A true JPS593401A (en) | 1984-01-10 |
Family
ID=14577492
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11207782A Pending JPS593401A (en) | 1982-06-29 | 1982-06-29 | Device and method for producing mirror for beam scanning |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS593401A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02262105A (en) * | 1989-03-31 | 1990-10-24 | Matsushita Electric Ind Co Ltd | Rotary polyhedral mirror and production thereof |
| JPH03215814A (en) * | 1990-01-19 | 1991-09-20 | Fujitsu Ltd | Polygon mirror |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55140801A (en) * | 1979-03-28 | 1980-11-04 | Tropel | Multiple face mirror* producing same* and mounting device for producing same |
-
1982
- 1982-06-29 JP JP11207782A patent/JPS593401A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55140801A (en) * | 1979-03-28 | 1980-11-04 | Tropel | Multiple face mirror* producing same* and mounting device for producing same |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02262105A (en) * | 1989-03-31 | 1990-10-24 | Matsushita Electric Ind Co Ltd | Rotary polyhedral mirror and production thereof |
| JPH03215814A (en) * | 1990-01-19 | 1991-09-20 | Fujitsu Ltd | Polygon mirror |
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