JPS5936247U - Silicon wafer processing jig - Google Patents

Silicon wafer processing jig

Info

Publication number
JPS5936247U
JPS5936247U JP10589383U JP10589383U JPS5936247U JP S5936247 U JPS5936247 U JP S5936247U JP 10589383 U JP10589383 U JP 10589383U JP 10589383 U JP10589383 U JP 10589383U JP S5936247 U JPS5936247 U JP S5936247U
Authority
JP
Japan
Prior art keywords
silicon wafer
silicon
processing jig
wafer processing
support part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10589383U
Other languages
Japanese (ja)
Inventor
伴　一成
長浜　敏夫
Original Assignee
東芝セラミツクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝セラミツクス株式会社 filed Critical 東芝セラミツクス株式会社
Priority to JP10589383U priority Critical patent/JPS5936247U/en
Publication of JPS5936247U publication Critical patent/JPS5936247U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図は本考案の一実施例を示すもので、第１図は組立てた
状態を示す斜視図、第２図Ａ、　Ｂは支持部の側面図と
平面図、第３図Ａ、　Ｂは固定部の正面図と平面図であ
る。 １・・・支持部、２・・・溝、３・・・ピン穴、４・・
・固定部、５・・・弧又は穴。The figures show one embodiment of the present invention, in which Fig. 1 is a perspective view showing the assembled state, Fig. 2 A and B are side views and plan views of the support part, and Fig. 3 A and B are the fixed part. They are a front view and a plan view. 1...Support part, 2...Groove, 3...Pin hole, 4...
- Fixed part, 5... arc or hole.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 炭化珪素又は炭化珪素−金属珪素よりなり、シリコンウ
ェハーを挿入するための溝を有するシリコンウェハー支
持部と、石英ガラス又は金属珪素よりなり該支持部に嵌
合して該支持部を固定するための固定部とよりなること
を特徴とするシリコンウェハー処理用治具。A silicon wafer support part made of silicon carbide or silicon carbide-metallic silicon and having a groove for inserting a silicon wafer, and a silicon wafer support part made of quartz glass or metal silicon to fit into and fix the support part. A silicon wafer processing jig characterized by consisting of a fixed part.
JP10589383U 1983-07-07 1983-07-07 Silicon wafer processing jig Pending JPS5936247U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10589383U JPS5936247U (en) 1983-07-07 1983-07-07 Silicon wafer processing jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10589383U JPS5936247U (en) 1983-07-07 1983-07-07 Silicon wafer processing jig

Publications (1)

Publication Number Publication Date
JPS5936247U true JPS5936247U (en) 1984-03-07

Family

ID=30248027

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10589383U Pending JPS5936247U (en) 1983-07-07 1983-07-07 Silicon wafer processing jig

Country Status (1)

Country Link
JP (1) JPS5936247U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398123A (en) * 1986-10-15 1988-04-28 Tokai Kounetsu Kogyo Kk Manufacturing method of wafer boat for semiconductor manufacturing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398123A (en) * 1986-10-15 1988-04-28 Tokai Kounetsu Kogyo Kk Manufacturing method of wafer boat for semiconductor manufacturing

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