JPS5945104A - Cutter for hard and brittle member - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an improvement in a cutting device that cuts a hard and brittle member into thin pieces while rotating it.

[Technical background of the invention and its problems]

In the manufacturing process of semiconductor devices, a semiconductor ingot, which is a hard and brittle member, is cut into thin semiconductor members, so-called wafers. Various methods have been adopted for this, but one method that is generally widely adopted is to cut a cylindrical semiconductor member 1 (hereinafter referred to as the workpiece) along its longitudinal axis as shown in Figure 1. A method of obtaining a semiconductor flake-like member 4 by rotating the axis of the direction as the rotation axis 2, moving it relative to, for example, a high-speed rotating internal cutting wheel 3 to make a cut, and cutting at right angles to the rotation axis 2. There is. Furthermore, in contrast to the above-described rotary cutting method, there is a static cutting method in which the workpiece is cut without rotating it. This is a method in which the workpiece 1 is held without rotating, and is moved and cut with a cutting wheel 3. For this static cutting method,
7. The former rotary cutting method cuts from the entire outer periphery, so the depth of cut can be halved, and the contact length between the cutting wheel 3 and the workpiece 1 is short, resulting in less cutting resistance and other advantages. Excellent in that respect. However, if the rotational axis 2 of the workpiece 1 and the cutting surface 5 of the cutting wheel 3 are not perpendicular to each other, there is a disadvantage that the cutting accuracy is significantly reduced.

A conventional cutting device used in the above-mentioned rotary cutting method will be briefly explained with reference to FIG. 5 is provided with a cutting mechanism 13 that moves in parallel. This has an upright support section 14, and a vertical feed mechanism 18 is provided thereon, which includes a feed motor 15, a feed screw 16 rotated by the feed motor 15, and a vertical feed body 17 moved back and forth by the feed motor 15.

A rotary motor 20 for rotating the workpiece 1, a bearing 2I, and a rotating shaft 22 are coaxially attached to this vertically moving vertically moving body 17, and a single piece 2 is attached to the lower end surface of the rotating shaft 22.
One end portion 1a of the workpiece 1 is bonded via 3.

Then, after setting the cutting position (thickness of the wafer 4) of the workpiece 1 by the longitudinal feed mechanism 18 and rotating it by the rotary motor 2o, the workpiece 1 is moved by the operation of the cutting mechanism 13. , the wafer 4 is obtained by cutting as described above.

Now, as mentioned above, the perpendicularity between the rotational axis 2 and the cutting surface 5 is very important. Devices equipped with adjustment mechanisms have been considered. This is for cutting the workpiece 1 at an arbitrary angle with respect to its crystal axis, and as explained with reference to FIG. The entire cutting mechanism 13 is tilted in an arc shape in a direction perpendicular to the paper surface of this figure, centering on an axis (not shown) parallel to .
A shaft 14B through which the support portion 14 passes through its lower end at right angles to the plane of the paper.
It is designed so that it can be tilted in a plane parallel to the paper surface with . However, this mechanism not only does not have a fine movement mechanism, but also rotates the entire heavy cutting mechanism 13 or the entire support section 14, so the accuracy is around 10.5 degrees. It takes a lot of time to make the axis of rotation 2 and the cutting surface 5 perpendicular to each other with high precision, and therefore there has been a demand for a cutting device that can be adjusted with high precision.

[Purpose of the invention]

This invention is a hard brittle part 5 that can automatically adjust the right angle between the axis of rotation and the cutting surface with high accuracy to measure the slope of cutting accuracy.
,,.

An object of the present invention is to provide a material cutting device.

[Summary of the invention]

A first adjustment mechanism having a first adjustment body and a first fine movement body for slightly rotating the first adjustment body is provided on the body of the cutting mechanism, and the first adjustment body of the first adjustment mechanism is A second adjustment mechanism having a second adjustment body and a second fine movement body for slightly rotating the second adjustment body is provided; The angle of the second adjustment body is detected by the angle detection mechanism, and this detection signal is used to detect the angle of the second adjustment body. The second fine moving bodies are respectively driven to set the rotational axis of the workpiece and the cutting surface of the cutting wheel at right angles.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to FIGS. 3 to 2. The cutting device according to the present invention includes a main body 31, a cutting mechanism 32, a cutting mechanism 33, a first adjustment mechanism 34, a second
% adjustment mechanism 35, first angle detection mechanism 90. It is composed of a @2-angle change detection mechanism 90a and a control circuit 107. To explain each part in detail, the main body 91 consists of a box-shaped member, with a surface 4I provided on the top surface for upper mounting (4I), and a lower surface 4I for mounting on the side thereof. is provided with a surface (not shown). The internal space accommodates a drive device for each mechanism, which will be described later. It consists of a cutting whetstone 3 mounted with the cutting surface 5 held horizontally, a whetstone driver (not shown) for rotating these, etc. These operations are the same as those described in the conventional example. The mechanism 33 is attached to the upper part by a guide member 44 having a dovetail groove provided on a surface 41, and a notch that is fitted and guided by the guide member 44 and is movable in the direction of an arrow 45 parallel to the cutting surface 5. Although not shown, it is comprised of a feeder 46 and a cutting drive body, which is housed in the main body 31 and consists of a hydraulic device that drives the cutting feeder 46.The cutting feeder 46 is fitted into the guide body 44. A pillar part 48 is provided at one end of a base part 42 that stands upright and extends vertically.The pillar part 48 is composed of two side walls 49 and 49 that are spaced apart from each other and extend vertically. .

A first rotating pin 50 is fixed through the upper end of these side walls 49 and 49, and a first adjusting body 55 constituting the first adjusting mechanism 34 is attached to the @1 rotating pin 50 at its upper end. It is rotatably supported. That is, the first adjusting body 55 is rotatable in a plane parallel to the moving direction of the cutting feed body 46, and can be released at any angle by the first air cylinder 51 attached to the side wall 49. It is now fixed to . Further, a mounting seat 52 is attached to the lower end of the side wall 49, 49, and a first fine movement mechanism 80 constituting the first m-section mechanism 34 is provided here. This first fine movement mechanism (80 pieces) is cut into the mounting seat 52 (l)
1 fine movement body 56 having an engagement recess 562 slidably provided in the same direction as the moving direction of the body 46, one end of which is screwed to the first fine movement body 56.
0, a pulse motor 101 for rotationally driving the lead screw 100, and a ball or shaped body hanging from the lower end of the first adjustment body 55 in the recess 56a of the first fine movement body 56. 102 are fitted. Therefore, the pulse motor 701
6 is driven, the first adjusting body 55 is rotated via the spherical body 102. Further, a first angular change detection mechanism 90 is provided on the side wall 49. As shown in FIG. 5, the first angle detector 111i90 is provided with a support part 92 on the top of a support plate 91 fixed to the first adjustment body 55, and a cross spring or a bearing is connected to the support part 92. A pendulum 94 is supported via a portion 93 so as to be swingable along the moving direction of the cut feeder 46 . At the lower part of the L support plate 91, there are 1. A pair of displacement detectors 95.9
5 is provided. These displacement detectors 95.95 are capacitor box type, eddy current type, differential transformer, etc.
A signal is output according to the inclination of the first adjusting body 55. That is, when the first adjustment body 55 is vertical, the opposing gaps between the pair of displacement detectors 9.5 and 95 and both sides of the pendulum 94 are equal, so the outputs from each displacement detector 95.95 are also equal, but If the first adjustment rest 55 is tilted, this first
Since the pendulum 94 is in a vertical state regardless of the inclination state of the adjustment body 55, the distance between one displacement detector 95 and the other displacement detector 95 with respect to both sides of the pendulum 94 is different.
These displacement detection? 'There is a difference in the output from g95.95. The difference between these outputs is then output as a change in the tilt angle of the @11 adjustment body 55 to a control circuit 107, which will be described later.

A second rotating pin 71 is protruded from the front surface of the first adjustment body 55 with its axis perpendicular to the axis of the first adjusting pin 5θ. 71 has the second
The adjusting body 72 is supported so as to be movable in a direction orthogonal to the rotation direction of the first adjusting member 550. This second adjustment stop 72 is fixed by a second air cylinder 74 provided on the first adjustment body 55 so as to be releasable at any angle. This second adjustment body 72 is similar to the first adjustment body 55
The second angle detection mechanism 90 is rotated by the second fine movement mechanism 73 constituting the second adjustment mechanism 35 provided at the bottom of the screen, and the second angle detection mechanism 90 is provided at the upper side surface as shown in FIG.
A change in the tilt angle is detected by a. Note that the second fine movement mechanism 73 and the second angle detection mechanism 90a are the same as the first fine movement mechanism 80 and the first angle detection mechanism 90.
Since the configurations are the same, the explanation will be omitted.

A feed motor 58 is provided above the second adjusting body 72, and a feed screw 59 rotated by the feed motor 58 is connected to the feed motor 58. This feed screw 59 is
It is screwed into a sending piece 60 provided on the front surface of the second adjusting body 72 so as to be slidable in the vertical direction. This sending piece 60
A rotary motor 75 and a bearing 76 are mounted coaxially with the rotary motor 75 on the front surface of the motor.
is attached. The rotary shaft 77 of the rotary motor 75 is rotatably supported by the bearing 76, and a flange 77a is formed at the lower end protruding from the bearing 76, and a mounting piece 78 is fixed to the flange 77a. . The workpiece 1 is held by the attachment piece 78 with its end surface adhered. That is, the rotation axis 2 of the rotation shaft 77 is
When the first adjustment member 55 and the second adjustment body 72 are in a perpendicular state, they are perpendicular to the cutting surface 5 of the cutting mechanism 32.

On the other hand, the control circuit 107 is constructed as shown in FIG. That is, each pair of displacement detectors 95.9 from the first angle detection mechanism 90 and the second angle detection mechanism 90a
5 is input to the amplifier circuit 10B.

An arithmetic circuit 109 is connected to this amplifier circuit 108, and this arithmetic circuit 109 calculates the difference between the signals from each pair of displacement detectors 95.95. Further, the set value set by the correction circuit 110 is input to the arithmetic circuit 109, and the difference amount of the detection signal and the set value are compared. Then, a signal corresponding to the difference between the comparison values is outputted to the pulse motor drive circuit 111, and the drive circuit 111 causes the first adjustment mechanism, ? The pulse motors 101 of 4 and the second adjustment mechanism 35 are respectively driven. In other words, the correction circuit
.

110 and the displacement detector 95.
Pulse motor I according to the difference in comparison value with the detection signal of 95
'01 is driven, the first. The second adjusting bodies 55 and 72 can be rotated at a predetermined angle with respect to the cutting surface 5.

Furthermore, an air cylinder operating circuit 112 is connected to the input side of the arithmetic circuit 109.
When the output from the pulse motor drive circuit 111 becomes zero, that is, when the angle adjustment of the first and second adjusting bodies 55 and 72 is completed, the first and second adjusting bodies 55 and 72 are adjusted. Second air cylinder 51.
74 to perform the above-mentioned No. 1. Fix the second adjustment body 55.72. Note that the correction circuit 110 can also input a warpage value for cutting the workpiece 1 with an arbitrary warp.

Next, a procedure for adjusting the angle between the rotational axis 2 and the cutting surface 5 of the apparatus configured as described in section 5 will be explained. First, the flange 77a of the rotating shaft 77 to which the workpiece I is not attached
and a mounting rod (not shown) extending perpendicular to its axis of rotation 2.
is fixed, a non-contact type displacement meter is attached to the tip thereof, and the cutting wheel 3 is gently rotated around the center of the cutting wheel 3 as the rotation center. As a result, 2
The inclination of the direction, that is, the inclination with respect to the moving direction of the incision feeder 46 (this is defined as the X direction) and the inclination in the direction perpendicular to this (this is defined as the Y direction) are detected.

Once the inclination of the rotational axis 2 in the X and Y directions has been detected in this way, when these values are input as set values to the correction circuit 110, the set values in the X direction and the pair of the first angle detection mechanism 90 are first The signals from the displacement detectors 95.95 are input to the arithmetic circuit 109, these values are compared, and the pulse motor 101 of the first adjustment mechanism 94 is driven in accordance with the difference between the comparison values. When the pulse motor 101 is driven, the first adjustment body 5 is moved through the first fine movement body 56.
5 is rotated in the X direction.

Then, when the comparison value between the setting value of the Urasa circuit 110 and the pair of displacement detectors 95.95 becomes zero, that is, when the inclination of the rotation axis 2 in the X direction with respect to the cut plane 5 becomes a right angle, the pulse When the motor 01 is stopped, the first air cylinder 51 is operated by the air cylinder operating circuit 112, and the first adjustment body 55 is fixed so as not to rotate.

Next, the setting value in the Y direction set in the correction circuit 110 and the pair of displacement detectors 9 of the @2 angle detection mechanism 90a are determined.
The signal from 5.95 is compared in the arithmetic circuit 109, and the @22 adjustment mechanism 35 is operated according to the difference between the comparison values, and the second adjustment body 72 is rotated in the X direction. and,
When the inclination of the rotational axis 2 in the Y direction with respect to the cut plane 5 becomes perpendicular, the pulse motor 01 of the second adjustment mechanism 35 stops, and the operating circuit 112 operates the air cylinder 74 of @2, thereby causing the second adjustment mechanism 35 to stop. The adjustment body 72 is fixed so as not to rotate.

Once the perpendicularity between the cutting surface 5 and the rotational axis 2 in the X and Y directions is set in this way, the workpiece 1 is adhesively fixed to the lower end flange 772 of the rotational shaft 77, and the feed zero motor 58 is turned on. The cutting thickness is set by rotating the workpiece l downward by -L. Thereafter, the workpiece I is rotated by the rotation of the rotary motor 75, and the cutting grindstone 3 is also rotated to drive the cutting feed/pause 46 to perform cutting.

Note that the present invention is not limited to the above embodiment; for example, the cutting device may be of a horizontal type instead of a vertical type, and the positional relationship between the workpiece and the cutting wheel is not limited. Also, the first
．． The second adjusting body may be fixed by an electromagnet, a lever-type locking mechanism, a hydraulic cylinder, etc. instead of an air cylinder, and in short, it only needs to be semi-submerged so that it can be fixed releasably.

Furthermore, the first. The configuration of the second adjustment mechanism may also be of a lever type instead of a slide type.

〔Effect of the invention〕

As described above, the present invention can automatically set the perpendicularity between the rotational axis of the workpiece and the cutting surface of the cutting wheel with high precision. Therefore, not only can the warpage of the flaky member cut from the workpiece be minimized, improving machining accuracy, but also the perpendicularity can be set automatically, greatly shortening the operating time. Cutting work can be automated. Further, it has the advantage that it is easy to align the direction of warpage of the flaky member and to adjust the amount of warpage.

[Brief explanation of drawings]

Fig. 1 is an explanatory diagram of a rotary cutting method, Fig. 2 is a front view of main parts of a conventional cutting device, Figs. 3 to 6 show an embodiment of the present invention, and Fig. 3 is a diagram of a cutting device 4 is a side view of the same, FIG. 5 is a block diagram of the angle detection mechanism, and FIG. 6 is a block diagram of the control circuit. l...Workpiece, 2...Rotation axis 3...
Cutting grindstone, 5... Cutting surface 33... First adjustment mechanism, 34... Second λIM node mechanism 46... Cut feeder, 55... First adjustment body 56... Fine movement element,
72... Second adjustment body 90... First angle detection mechanism 90a... Second angle detection mechanism, 107... Control circuit.

Claims (1)

[Claims] A rotation mechanism that holds one end of a columnar workpiece and rotates it with a straight line passing through both ends as a rotation axis, and a rotation mechanism that is provided near the other end of the workpiece and has a plane perpendicular to the rotation axis as a cutting surface. a cutting mechanism having a cutting wheel for cutting, and a cutting feeder that moves along a plane parallel to the cutting surface;
a cutting mechanism for cutting and separating the flaky member from the workpiece; a first adjustment body rotatably attached to the cutting feeder in a fixed and releasable manner within a plane perpendicular to the cutting surface; I] a first adjustment mechanism having a first fine movement body that is attached to the body and slightly rotates the first adjustment body;
A second adjustment member that is rotatably and fixedly and releasably attached to the first adjustment member within a plane perpendicular to the cut plane and perpendicular to the rotation plane of the first adjustment member, and to which the rotation mechanism is attached. a second adjustment mechanism having a second fine movement body attached to the body and the first adjustment body to slightly rotate the second adjustment body; The angle detection mechanism detects the angular deviation of the second adjustment body, and the detection signal from this angle detection mechanism is used as described in the first section. A cutting device for a hard and brittle member, comprising control means for driving each of the second fine moving bodies to set the rotational axis perpendicular to the cutting surface.