JPS595207A - Manufacture of color filter - Google Patents
Manufacture of color filterInfo
- Publication number
- JPS595207A JPS595207A JP57113634A JP11363482A JPS595207A JP S595207 A JPS595207 A JP S595207A JP 57113634 A JP57113634 A JP 57113634A JP 11363482 A JP11363482 A JP 11363482A JP S595207 A JPS595207 A JP S595207A
- Authority
- JP
- Japan
- Prior art keywords
- filter
- color
- transmission filter
- filters
- green
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 230000005540 biological transmission Effects 0.000 claims abstract description 57
- 230000003595 spectral effect Effects 0.000 claims abstract description 12
- 230000004888 barrier function Effects 0.000 claims abstract description 11
- 230000035945 sensitivity Effects 0.000 claims abstract description 11
- 239000003086 colorant Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 10
- 230000000007 visual effect Effects 0.000 claims description 4
- 238000000576 coating method Methods 0.000 abstract description 10
- 239000004065 semiconductor Substances 0.000 abstract description 9
- 239000011521 glass Substances 0.000 abstract description 6
- 239000000758 substrate Substances 0.000 abstract description 6
- 238000002834 transmittance Methods 0.000 abstract description 6
- 239000011248 coating agent Substances 0.000 abstract description 5
- 230000001681 protective effect Effects 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、半導体撮像素子な用いたカラービデオカメラ
に好゛適な色フィルタの製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a color filter suitable for a color video camera using a semiconductor image sensor.
近年、カラービデオカメラに用いる撮像管の半導体化が
進み、ＣＣＤ（Ｃｈａｒｇｅ Ｃ！ｏｕｐｌｅｄ Ｄｅ
ｖｉｃｅ）等の半導体撮像素子が実用化されるよう、に
なった０ＣＣＤ２次元イメージセンサは、赤、キ、緑の
三原色に感応する半導体撮像素子な、モザイク状に２次
元配列したものであり、第１図に示すフィルタパターン
なもつ色フィルタｌに組み合わせて使われることが多い
。この色フィルタｌは、透明なガラス基板２北に、図示
の如く、Ｒ−Ｇラインに赤色透過フィルタケと緑色透過
フィルタ３を交互に配設し、その隣りのＢ−Ｇラインに
青色透過フィルタｊと緑色透過フィルタ３を交互に配設
置２、全体としてこれらのＲ−ＧラインとＢ−Ｇライン
を交互に配列することにより、緑色透過フィルタ３が市
松模様化された２次元モザイク状のフィルタパターンに
什トげである。In recent years, the use of semiconductor image pickup tubes for color video cameras has progressed, and CCD (Charge C!
The 0CCD two-dimensional image sensor is a two-dimensional mosaic array of semiconductor image sensors that are sensitive to the three primary colors of red, yellow, and green. The filter pattern shown in Figure 1 is often used in combination with the color filter l. This color filter 1 has red transmission filters and green transmission filters 3 arranged alternately on the R-G line on the north side of a transparent glass substrate 2, as shown in the figure, and a blue transmission filter j on the adjacent B-G line. By alternately arranging the R-G lines and B-G lines as a whole, a two-dimensional mosaic filter pattern in which the green transmitting filters 3 are arranged in a checkered pattern is created. It is a tithe.
しかして、この種のＣＣＤ２次元イメージ七ンサ用色フ
ィルタ／は、従来の製造方法によれば、先ずガラス基板
２に赤色透過フィルタｑをフォトエツチングにより塗布
し、そのＬにバリア層６を形成し、次に緑色透過フィル
タ３を塗布１〜たのち、バリア１−７す介してＮ色透過
フィルタｊを塗布し、しかるのち保護膜ざな塗布して製
造されていた。According to the conventional manufacturing method, this type of color filter for a CCD two-dimensional image sensor/ is first coated with a red transmission filter q by photoetching on a glass substrate 2, and then a barrier layer 6 is formed on the glass substrate 2. Next, after applying the green transmission filter 3, the N color transmission filter j was applied through the barrier 1-7, and then a protective film was applied.
このため、例えば第１図に示した色フィルタｌのＲ−Ｇ
ラインとＢ−Ｇラインの断面は、夫々第２図ｆＡ）、
（Ｂ）Ｋ示した如く、緑色透過フィルタ３に関して組み
合わさるべぎ他の赤色透過フィルタ弘又は青色透過フィ
ルタｊの位置関係が、互いに逆の関係となる。その結果
、Ｒ−Ｇラインでは、緑色透過フィルタ３はバリア層６
の凹部とバリア層７の平坦部の間に、またＢ−Ｇライン
では、バリアＩＨ７の凸部とバリア層乙の平坦部の間に
存在することになる。For this reason, for example, R-G of the color filter l shown in FIG.
The cross sections of line and B-G line are respectively Fig. 2 fA),
As shown in (B)K, the positional relationship of the red transmission filter 1 or the blue transmission filter j combined with the green transmission filter 3 is opposite to each other. As a result, in the R-G line, the green transmission filter 3 has a barrier layer 6
It exists between the concave portion of the barrier layer B and the flat portion of the barrier layer 7, and between the convex portion of the barrier IH7 and the flat portion of the barrier layer B in the line B-G.
このため、緑色透過フィルタ３の光学的特性を左右する
その幾何形状については、Ｒ−ＧラインとＢ−Ｇライン
で同列に論ずことはできず、塗布過程の違いにもとづく
種々の要因が絡んで、両ラインの光透過率が異なってし
まうのが好適であった。従って、第２図（Ａ）、 （Ｂ
）に一点鎖線で示した如く、色フィルタｌな接着剤ワを
用いて半導体撮像素子１０に接着１〜、撮像装置（図示
せず）に組み込んで使用した場合、視覚的に最も高解像
度が要求される分光感度特性をもつ色が透過する緑色透
過フィルタ３の光透過率が、ｉ”Ａり合うラインで異な
るため、再生画像の色むらが避けられないという欠点が
あった。For this reason, the geometrical shape that affects the optical characteristics of the green transmission filter 3 cannot be discussed in the same way for the R-G line and the B-G line, and various factors based on differences in the coating process are involved. , it was preferable that the light transmittances of both lines were different. Therefore, Fig. 2 (A), (B
), the highest visual resolution is required when the color filter is attached to the semiconductor image sensor 10 using a special adhesive and used in an image sensor (not shown). Since the light transmittance of the green transmission filter 3 through which the color having the spectral sensitivity characteristic transmitted differs between i''A lines, color unevenness in the reproduced image is unavoidable.
また、色フィルタｌを半導体操１象素子ｌｏに接着する
際に、緑色透過フィルタ３が受ける光学的特性の変化は
、幾何形状に違いのある隣り合うラインで異なることが
十分考えられ、このことも、緑色透過フィルタ３の塗布
下１１［色透過フィルタ弘と青色透過フィルタｊの塗布
工程の中間に行なう、従来の製造方法による色フィルタ
ｌの欠点になっていた。Furthermore, when bonding the color filter 1 to the semiconductor processing element 1 lo, it is quite conceivable that the change in the optical characteristics of the green transmission filter 3 will be different between adjacent lines with different geometric shapes. This was also a disadvantage of the color filter 1 manufactured by the conventional manufacturing method, in which the coating step 11 of the green transmission filter 3 was carried out between the coating steps of the color transmission filter 3 and the blue transmission filter J.
本発明は、視覚的に最も高解像度が要求される分光感度
特性をもつ色の透過フィルタの塗布工程を、他の色の透
過フィルタの塗布工程の前又は後で行なうようにするこ
とにより、Ｊ：記従来の欠点を除去したものであり、製
造工程が透過フィルタの光学的特性に与える悪影響な排
し、特に輝度な左右する色の透過フィルタが、どの部分
も均一な光透過率をもつ色フィルタな製造できるように
することを目（杓とする。According to the present invention, by performing the coating process of the transmission filter of the color having the spectral sensitivity characteristic that visually requires the highest resolution before or after the coating process of the transmission filter of other colors, : This method eliminates the disadvantages of the conventional filter, and eliminates the negative impact that the manufacturing process has on the optical properties of the transmission filter.In particular, it eliminates the negative impact that the manufacturing process has on the optical characteristics of the transmission filter. The goal is to be able to manufacture filters.
この目的を達成するため、本発明は視覚的に最も高解像
度が要求される分光感度・（￥性をもつ色の透過フィル
タの塗布工程な、他の色の透過フィルタの塗布工程の中
間で行なわず、それらの前又は後に行なうようにしたこ
とを要旨とするものであろＯ
以ド、本発明の実施例につい′〔、第３図（Ａ）、 （
Ｂ）を参照して説明する。第３図（Ａ）、 （Ｂ）は、
夫々第１図に示した色フィルタを本発明になる製造方法
に従って製侍した場合の、第１図中Ｘ−Ｘ線、Ｙ−Ｘ線
に沿う縦断矢視図を示す。In order to achieve this objective, the present invention is designed to apply the coating process of the transmission filter of the color with the spectral sensitivity and characteristics that require the highest visual resolution, or between the coating process of the transmission filter of other colors. First, the gist is what is done before or after the above.
This will be explained with reference to B). Figures 3 (A) and (B) are
1A and 1B are longitudinal sectional views taken along lines X-X and Y-X in FIG. 1, respectively, when the color filters shown in FIG. 1 are manufactured according to the manufacturing method of the present invention.
本実施例では、視覚的に亮Ｍ＋＊度の分）′Ｃ，感度特
性を必要としない色な透１尚する赤色透過フィルタグと
Ｗ色透過フィルタｌを、ガラス基板λ上の所定の箇所に
塗布したあと、視覚的に高解像度の分光感度特性を必要
とする色を透過する緑色透過フィルタ３な、バリア層乙
の上に塗布する製造方法によっている。このため、緑色
透過フィルタ３についてみれば、第３図（Ａ）、 （Ｂ
）に示した如く、Ｒ−ＧラインもＢ−Ｇラインも、とも
に緑色透過フィルタ３が、バリア層乙の凹部とバリア層
７の平坦部との間に挾まれた状態で、保護ｊ換ｇに接す
ることになる。従って、両ラインでの緑色透過フィルタ
３は、その光透過面積も光透過率も、その他製造過程で
決定される光学的緒特性が全く同一であり、このため色
むらの原因となる光学的特性のばらつきはみられない。In this embodiment, a red transmission filter 1 and a W color transmission filter 1, which are visually bright (M+*degrees)'C and which do not require sensitivity characteristics, are placed at predetermined locations on the glass substrate λ. After coating, a manufacturing method is adopted in which a green transmission filter 3, which transmits a color requiring visually high-resolution spectral sensitivity characteristics, is coated on top of the barrier layer B. Therefore, if we look at the green transmission filter 3, Figs. 3(A) and (B
) As shown in FIG. will be in contact with. Therefore, the green transmission filters 3 in both lines have exactly the same light transmission area, light transmittance, and other optical characteristics determined in the manufacturing process, and therefore, the optical characteristics that cause color unevenness are completely the same. No variation is observed.
この光学的諸！庁性には、色フィルタｌを半導体操１象
素子１０に接着するとぎに生ずる緑色透過フィルタ３の
幾何形状の微妙な変形といった、−姑しただけでは定ｌ
的把握の困難な特性影響因子に関係した光学的特性も含
むものである。従って、従来の製造方法の如く、Ｒ，−
ＧラインとＢ−Ｇラインで緑色透過フィルタ３の光学的
特性に与える影響が異なるために、色むらな生ずるとい
った不都合はない。All this optical stuff! From the standpoint of government, there are cases where subtle deformation of the geometric shape of the green transmission filter 3 occurs when the color filter 1 is bonded to the semiconductor processing element 10, and it cannot be determined by just looking at it.
It also includes optical properties related to characteristic influencing factors that are difficult to grasp. Therefore, as in the conventional manufacturing method, R, -
Since the G line and the BG line have different effects on the optical characteristics of the green transmission filter 3, there is no problem such as color unevenness.
なお、上記実施例では、赤色透過フィルタケとに色透過
フィルタｊな塗布した最後に、緑色透過フィルタ３を塗
布する製造方法を採ったが、赤色透過フィルタｑやＨ色
透過フィルタＳを塗布するよりも、先ず最初に緑色透過
フィルタ３を全面塗布する製造方法によってもよく、そ
の場合も、緑色透過フィルタ３についての光学的特性が
Ｒ−ＧラインとＢ−Ｇラインで異なることはなく、従っ
て色むらは生じない。In the above embodiment, a manufacturing method was adopted in which the green transmission filter 3 was applied after applying the color transmission filter j to the red transmission filter q, but it is better to apply the green transmission filter 3 to the red transmission filter q and the H color transmission filter S. Alternatively, a manufacturing method may be used in which the green transmission filter 3 is first applied to the entire surface.In that case as well, the optical characteristics of the green transmission filter 3 will not differ between the R-G line and the B-G line, and therefore the color will be different. No unevenness occurs.
また、上記実施例では、色フィルタｔとして赤。Further, in the above embodiment, the color filter t is red.
青、緑の３原色に対応する透過フィルタな設ける場合を
例にとったが、視覚的に華も解像度が要求される分光感
度特性をもつ色として白色光を採用した場合は、他の色
として黄色光やシアン色光の組み合わせが考えられ、こ
れらの色に対応する透過フィルタも、前記実施例で説明
した工程にならって塗布すればよい。We have taken as an example the case of installing transmission filters corresponding to the three primary colors of blue and green, but if white light is adopted as a color with spectral sensitivity characteristics that require high visual resolution, A combination of yellow light and cyan light can be considered, and transmission filters corresponding to these colors may also be applied following the process described in the previous embodiment.
また、色フィルタｌ−上の各透過フィルタの２次元配列
は、使用する半導体操ＩＩ！素子ｉｏの素子の配列パタ
ーンに応じて前記実施例と異なる配列としてもよく、そ
の場合、透過光の輝度な左右する緑色透過フィルタ３
（又は白色透過フィルタ等）については、色フイルタｌ
上に均一に分布するようにしておくとよい。In addition, the two-dimensional array of each transmission filter on the color filter l- is the semiconductor operation II! Depending on the arrangement pattern of the elements of the element io, the arrangement may be different from that of the above embodiment, and in that case, the green transmission filter 3 which affects the brightness of transmitted light
(or white transmission filter, etc.), color filter l
It is best to make sure that it is evenly distributed on the top.
以上説明したように、本発明になる色フィルタの製造方
法によれば、視覚的に最も高解１＃！度が安来される分
光感度特性なもつ色の透過フィルタの塗布工程を、他の
色の透過フィルタの塗布工程の中間で行なわず、それら
の前又は後で行なうようにしたので、視覚的に最も高解
像度が要求される分光感度特性をもつ色の透過フィルタ
の幾何形状が、どの部分をとっても同一の条件で決定さ
れ、従ってこの透過フィルタの一部だけが製造過程で特
殊な光学的特性をもつに至る確率は極めて低く、これに
より輝度な左右することになる色の透過フィルタが、ど
の部分をとっても均一な光透過率をもち得、例えば半導
体撮像素子と組み合わせて撮像装置に用いることにより
、色むらの少ない画面再生が可能である等の優れた効果
を奏する。As explained above, according to the color filter manufacturing method of the present invention, the visually highest resolution is 1#! The process of applying the transmission filter of a color with a spectral sensitivity characteristic that increases the brightness is not performed in the middle of the process of applying the transmission filter of other colors, but is performed before or after the application process of the transmission filter of other colors, so it is visually the most The geometry of a color transmission filter with spectral sensitivity characteristics that require high resolution is determined under the same conditions for all parts, and therefore only a portion of this transmission filter has special optical characteristics during the manufacturing process. The probability of this occurring is extremely low, and as a result, a color transmission filter that affects brightness can have uniform light transmittance in any part.For example, by using it in an imaging device in combination with a semiconductor image sensor, it is possible to This provides excellent effects such as being able to reproduce the screen with less unevenness.
第１図は撮像管用色フィルタの一例の平面図、第２図（
Ａ）、 （Ｂ）ｉ？夫々第１図に示した色フィルタを、
従来の製造方法に従って製造した場合の、第を図中Ｘ−
Ｘ線、Ｙ−Ｙ線に沿う縦断矢視図、第３図（Ａ）、 （
Ｂ）は夫々第１図に示した色フィルタを、本発明になる
戦遣方法に従って製造した場合の、第１図中Ｘ−Ｘ＠、
Ｙ−Ｙ線に沿う縦断矢視図である。
ｌ・・・色フィルタ、２・・・ガラス基板、３・・・緑
色透過フィルタ、ｑ・・・赤色透過フィルタ、５・・・
青色透過フィルタ、６，７・・・バリア層。Figure 1 is a plan view of an example of a color filter for an image pickup tube, and Figure 2 (
A), (B)i? The color filters shown in Figure 1 are
When manufactured according to the conventional manufacturing method, No.
Longitudinal arrow view along X-ray and Y-Y line, Figure 3 (A), (
B) is the case where the color filters shown in FIG. 1 are manufactured according to the combat method of the present invention, X-X@ in FIG. 1,
FIG. 3 is a longitudinal cross-sectional view taken along the YY line. l...Color filter, 2...Glass substrate, 3...Green transmission filter, q...Red transmission filter, 5...
Blue transmission filter, 6, 7... barrier layer.
Claims (1)
透）１４フイルタを、互いにバリヤ層を介して夫々所定
の２次元配列に従って塗布することにより製造される色
フィルタの製造方法において、視覚的に最も高解像度が
要求される分光感度特性なもつ色の透過フィルタの塗布
工程は、他の色の透過フィルタの塗布工程の中間で行な
わず、それらの前又は後に行なうようにしたことを％徴
とする色フィルタの製造方法。A method for manufacturing a color filter, which is manufactured by applying 3 (14 filters of each color in the @ class) having different spectral sensitivity characteristics to a transparent plate, each in a predetermined two-dimensional arrangement, with a barrier layer interposed between them. In this method, the process of applying the transmission filter of the color having the spectral sensitivity characteristic that requires the highest visual resolution is not performed in the middle of the process of applying the transmission filter of other colors, but is performed before or after them. A method of manufacturing a color filter that takes this as a % characteristic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57113634A JPS595207A (en) | 1982-06-30 | 1982-06-30 | Manufacture of color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57113634A JPS595207A (en) | 1982-06-30 | 1982-06-30 | Manufacture of color filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS595207A true JPS595207A (en) | 1984-01-12 |
Family
ID=14617201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57113634A Pending JPS595207A (en) | 1982-06-30 | 1982-06-30 | Manufacture of color filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS595207A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62127310A (en) * | 1985-11-26 | 1987-06-09 | Hitachi Chem Co Ltd | Production of thermosetting resin composition |
-
1982
- 1982-06-30 JP JP57113634A patent/JPS595207A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62127310A (en) * | 1985-11-26 | 1987-06-09 | Hitachi Chem Co Ltd | Production of thermosetting resin composition |
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