JPS5953690A - Production of die for precision forming - Google Patents

Production of die for precision forming

Info

Publication number
JPS5953690A
JPS5953690A JP16221582A JP16221582A JPS5953690A JP S5953690 A JPS5953690 A JP S5953690A JP 16221582 A JP16221582 A JP 16221582A JP 16221582 A JP16221582 A JP 16221582A JP S5953690 A JPS5953690 A JP S5953690A
Authority
JP
Japan
Prior art keywords
stamper
chrome plating
thickness
hard chrome
plating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16221582A
Other languages
Japanese (ja)
Inventor
Takao Hattori
隆雄 服部
Kunio Matsuno
松野 邦雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP16221582A priority Critical patent/JPS5953690A/en
Publication of JPS5953690A publication Critical patent/JPS5953690A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a die transferred faithfully with the ruggedness of a matrix by depositing a metallic material by electroforming on the matrix deposited thereon with a hard chrome plating film having a prescribed thickness, releasing the metallic material from the matrix and depositing a hard chrome plating film having the thickness equal to the thickness of the matrix. CONSTITUTION:A hard chrome plating film 2 of a thickness C is formed on the transfer surface of a nickel matrix 1 having a pit width A and an inter-pit width B in a tracking direction. A nickel stamper 3 of a required thickness is formed by electroforming on the film 2. The stamper 3 is stripped from the film 2 and a hard chrome plating film 4 of a thickness C is formed on the transfer surface side of the stamper 3. The stamper 5 transferred faithfully with the ruggedness on the surface of the matrix 1 is obtd. and the surface hardness thereof is increased.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明は母型より転写して作製する金型の製造方法に
関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method for manufacturing a mold by transferring from a master mold.

〔発明の技術的背量とその問題点〕[Technical burden of the invention and its problems]

ビデオディスク等の情報記録盤を製造するには、まずフ
ォトレジストを塗布したガラス原盤に記録信号、トラッ
キング信号を凹凸形状にレーザーヒームで記録し原盤を
形成する。この原盤からニッケルメッキまだは銅メッキ
によってマスター、マザー、スタンパ−を順次作製する
。そしてスタンパ−を金4.(2としてj!Z ’It
性カーボン粒子を成形用a↓成物に分散させたものを圧
縮成形して静電8景方式の記録盤を製造するようにして
いる。
To manufacture an information recording disk such as a video disk, first, a recording signal and a tracking signal are recorded in an uneven shape on a glass master disk coated with photoresist using a laser beam to form a master disk. From this master disc, a master, mother, and stamper are sequentially produced by nickel plating or copper plating. And the stamper is gold 4. (2 as j!Z 'It
Electrostatic 8-view recording discs are manufactured by dispersing carbon particles in a molding material and compression molding the mixture.

ところで、導電性カーホンを分散させた該成形用組成物
中には、取金、1、!六カーホン粒子停の研摩付粒子が
含すれており、前記スタノパーを用いて圧縮成形を行な
うと、この1υf/’J性わl子によりスタンパ−表面
に傷が生じ、この傷が次の記録盤上に転写されて、記録
盤の再生中に不都合な電子的欠陥を生ずるという問題が
ある。この問題を解決するために通常はスタンパ−表面
にC1,] (/7111)以下の硬質クロムメッキを
施し、該表面を保歳するようにしている。また特開昭5
6−34430においてはり0ムを含む薄膜を母型表面
の凹凸を正確に転写しているスタンパ−表面に被着する
ことによりスタンパ−の耐傷性を向上させるという提業
がfよさノ1゜ている。
By the way, in the molding composition in which the conductive carphone is dispersed, there are 1,! It contains abrasive particles of 6 carton particles, and when compression molding is performed using the above-mentioned stamper, scratches are created on the surface of the stamper due to the 1υf/'J slag, and these scratches are used for the next recording disc. There is a problem in that they are transferred onto the disc, resulting in unwanted electronic defects during playback of the record. To solve this problem, the surface of the stamper is usually coated with hard chrome plating of C1,] (/7111) or less to preserve the surface. Also, JP-A-5
In 6-34430, the idea of improving the scratch resistance of the stamper by applying a thin film containing adhesive to the surface of the stamper, which accurately transfers the unevenness of the surface of the mother mold, is the best. There is.

しかし、母型表面の凹凸を正確に転写しているスタンパ
−表面に硬質膜を被着すると、信号の正確な転写が著し
く妨げられデユーティ−比等の特性が低下する。さらに
、0.1(μm)以下の硬質クロムメッキ厚さでは十分
な硬度を得ることができなG)。
However, if a hard film is applied to the surface of the stamper, which has accurately transferred the unevenness of the mother die surface, the accurate transfer of signals will be significantly hindered, and characteristics such as duty ratio will be degraded. Furthermore, sufficient hardness cannot be obtained with a hard chromium plating thickness of 0.1 (μm) or less (G).

そこで、特開昭49−103846では硬質合金メッキ
膜を、また特開昭50−23453ではニッケル棚床合
金メッキ膜を、それぞれ母型表面に形成した後、該合金
メッキ膜上に電鋳により金型本体を肉づけし、該合金メ
ッキ膜と母型との間で剥離することにより金型を製造す
る方法が提案されている。
Therefore, in JP-A-49-103846, a hard alloy plating film was formed, and in JP-A-50-23453, a nickel shelf alloy plating film was formed on the mother mold surface, and then gold was electroformed on the alloy plating film. A method has been proposed in which a mold is manufactured by thickening the mold body and peeling between the alloy plating film and the mother mold.

しかし、とれらの方法で得られるスタンパ−表面、すな
わち合金膜は成形用組成物中に含すれる安定剤による汚
染を受は易いという欠点を有する。
However, the stamper surface, that is, the alloy film obtained by these methods, has the disadvantage that it is easily contaminated by the stabilizer contained in the molding composition.

このため信号の転写性を損ねることなくスタンパ−表面
の硬度を大きくする方法の実現が望まれている。まだ、
この方法の確立はビデオディスクのスタンパ−に限らず
表面硬化を必要とする他の精密成形用金型の製造分野で
も強く要求されている。
Therefore, it is desired to realize a method of increasing the hardness of the stamper surface without impairing signal transferability. still,
Establishment of this method is strongly required not only in the field of manufacturing video disk stampers but also in other precision mold manufacturing fields that require surface hardening.

〔発明の目的〕[Purpose of the invention]

不発明は上i己欠点を解決するために成さizだもので
、精密成形用金型表面の凹凸が、母型上の凹凸を忠実に
転写し、しかもその表面硬度を犬ならしめる精密成形用
金型の製造方法を提供することを目的とするものである
The invention was made in order to solve the above defects, and the unevenness on the surface of the precision molding die faithfully transfers the unevenness on the mother mold, and the surface hardness is made to match. The purpose of the present invention is to provide a method for manufacturing a mold for use in the present invention.

〔発明の、概要〕[Summary of the invention]

不発明は母型に形成されているビット部分の幅をA、ビ
ット間の幅をBとするとき、母型に硬質クロメツキ膜を
厚さCだけ被着し、次いで該硬質クロムメッキ膜上へ電
鋳によりスタンパ−を厚く被着し、該スクンパーを前記
硬質クロムメッキj模より剥離した後、該スタンパ−の
転写面側へ硬質クロムメッキ膜を厚ざCだけ被着して母
型のビット部分に対する突起部の幅をA1母型のピット
間に相当する部分の幅をBとすることを特徴としている
The non-inventive method is to apply a hard chrome plating film to a thickness of C on the mother mold, where the width of the bit part formed on the mother mold is A, and the width between the bits is B, and then to coat the hard chrome plating film on the mother mold. After depositing a stamper thickly by electroforming and peeling off the stamper from the hard chrome plating pattern, a hard chrome plating film with a thickness of C is deposited on the transfer surface side of the stamper to form the bit of the master mold. It is characterized in that the width of the projection with respect to the portion is A1, and the width of the portion corresponding to between the pits of the matrix is B.

〔開明の効果〕[Effect of enlightenment]

この発明によれば、母型lの表面(凹凸のそれぞれの幅
A、Bを正確に転写し、しかも表面硬度をニッケルメッ
キまたは銅メッキ力)ら成るスタンパ−の場合よりも高
めることができる。このためビデオディスク用のスタン
パ−の製造に不発明を適用した場合、成形用組成物中の
研厚性粒子による掻傷の発生を抑えることが可能となり
、また転写性も損なわずに済む。従来は、母型表面の凹
凸を忠実に転写したスタンパ−向上に硬質クロムメッキ
等の硬質膜を形成しているため、硬質膜の厚さ分だけデ
ユーティ−比が変化してし菫うという欠点があったが、
本発明によればこの問題を解決できる。また、硬質クロ
ムメッキ膜は、成形用組成物中に含抜れる安定剤による
汚染を受けにくい。
According to the present invention, it is possible to accurately transfer the widths A and B of the irregularities on the surface of the matrix l, and to increase the surface hardness compared to the case of a stamper formed by nickel plating or copper plating. Therefore, when the invention is applied to the production of stampers for video discs, it is possible to suppress the occurrence of scratches caused by the abrasive particles in the molding composition, and the transferability is not impaired. Conventionally, a hard film such as hard chrome plating is formed on the stamper, which faithfully transfers the unevenness of the surface of the mother die, so the duty ratio changes by the thickness of the hard film, which is a drawback. There was, but
According to the present invention, this problem can be solved. In addition, hard chrome plating films are less susceptible to contamination by stabilizers contained in molding compositions.

従って、以上の点からスタンパ−の寿命を著しく延ばす
ことができる。
Therefore, from the above points, the life of the stamper can be significantly extended.

また、不発明では技術的に確立された硬質クロムメッキ
装置を使用するので、条件出しが容易である。しかも転
写を目的とする通常の電鋳工程ではムクロム敵カリウム
等による剥離皮膜処理が必要であるのに対し、クロムメ
ッキ而にニッケルメッキあるいは銅メッキを施した場合
には剥離性が良いため、本発明による電鋳工程では特に
剥R「皮膜処理をせずに済み、実施に際しての有用性が
高い0 〔発明の実施例〕 以下、図面を参照して本発明の詳細な説明する。
Furthermore, since the invention uses a technically established hard chrome plating equipment, it is easy to set the conditions. Moreover, in the normal electroforming process for the purpose of transfer, it is necessary to treat the peeling film with chromium, potassium, etc., but when nickel plating or copper plating is applied to the chromium plating, the peelability is good, so this method is suitable. The electroforming process according to the invention particularly eliminates the need for peeling R' film treatment, and is highly useful in practice. [Embodiments of the Invention] Hereinafter, the present invention will be described in detail with reference to the drawings.

第1図乃至第5図は本発明に従って、母型7I)ら転写
により謂苫成形用金型を製造する工程を呈す断面図であ
る。まず、第1図のように、トラソ+ングカ回のビンへ
幅がA1ビット間の幅がBである断面形状のニッケルマ
ザーの転写面に丁d己組成のメッキ浴を用いて、温度あ
〔℃バ旭流密1fJ5(A/dm”J 、アノード:ア
ンチモン宮市゛鉛の榮件ドで第2図に示すようにクロム
メッキ膜2を厚さC(0,3≠))だけ形成した。
1 to 5 are cross-sectional views showing the steps of manufacturing a so-called molding die by transfer from a master die 7I) according to the present invention. First, as shown in Fig. 1, a plating bath of a self-composition is applied to the transfer surface of a nickel mother having a cross-sectional shape of A1 width and B bit width. As shown in FIG. 2, a chromium plating film 2 was formed to a thickness of C (0,3≠)) at a temperature of 1 fJ5 (A/dm"J) and an anode of antimony and lead.

クロムメソ+浴組成: 仄いで、第3図に示すように該クロムメッキ膜2の上に
、下記組成のメッキ浴を用いて、温度50じC〕、電流
密1及7(A/dl++’) 、PH4の条件でスルフ
ァミン酸−ソゲルメッキを施し、所要厚さのニノウ゛ル
スクノバー3を形成した。
Chromium meso+ bath composition: As shown in FIG. 3, a plating bath having the following composition was used on the chromium plating film 2 at a temperature of 50 degrees C] and a current density of 1 and 7 (A/dl++'). , sulfamic acid-sogel plating was performed under the conditions of PH4 to form a new glass cover 3 of the required thickness.

スルファミノ酸ニッケルメッキ浴: ニッケルスタンパ−3の形成が終”つた淡、クロムメッ
キ膜2とニッケルスタンパ−3の間で剥離を行ない、第
4図に示すスタンパ−3をi4)る。さら(lこ、第5
図に示すように該ニッケルスタンパ−3の転写向上に、
下記組成の硬質クロムメッキ浴を用いて、温度/IQ 
(℃〕、i亀流密度加(A/dイ〕、アノード:アンチ
七ン宮有鉛の条件の下で硬質クロムメッキ膜4を厚さC
だけ被着することにより、スタンパ−5を作製した。
Nickel sulfamic acid plating bath: After forming the nickel stamper 3, peeling is performed between the chromium plating film 2 and the nickel stamper 3 to form the stamper 3 shown in FIG. T-fifth
As shown in the figure, to improve the transfer of the nickel stamper 3,
Using a hard chrome plating bath with the following composition, the temperature/IQ
(°C), i Torrent density addition (A/d I), anode: under the conditions of anti-silicon lead, the hard chrome plating film 4 was coated to a thickness of C.
A stamper 5 was prepared by depositing only the following materials.

硬質クロムメッキ浴組成二 尚、本実施例においては、中心から半径1ooc+xi
)でA = 0.6 (μ)、n=Q、5(μ〕となる
ように記録を調整した。以上のようにして作製したスタ
ンパ−5から、塩ビ酢ビ共重合体ioo重址部と、ジブ
チルスズラウレート4重量部およびカーボンブラック加
屯量部よりなる記録媒体を圧縮成形して谷1−j、変換
型の情報記録盤を得た。その時の傷発生によるライフお
よび硬質クロム厚さを表1に示した。また、比較例1と
して、マザー1の転写面にJクロム酸カリウム0.1〔
チ〕 溶液による剥離皮膜処、Ljllを施し、この而
に対して先と同条件でスルファミン酸ニッケル浴中でニ
ッケルメッキを行ないニッケル’tu、 u層を形成し
た後、これをマザー1より剥離してスタンパ−とした。
Hard chrome plating bath composition 2 In this example, the radius from the center is 1 ooc + xi
), the recording was adjusted so that A = 0.6 (μ), n = Q, 5 (μ). From the stamper 5 produced as above, the vinyl chloride-vinyl acetate copolymer ioo polymer part A recording medium consisting of 4 parts by weight of dibutyltin laurate and 4 parts by weight of carbon black was compression molded to obtain a conversion type information recording disc with valley 1-j.The life and hard chromium thickness due to the occurrence of scratches at that time are shown in Table 1. In addition, as Comparative Example 1, 0.1 [J potassium chromate] was applied to the transfer surface of Mother 1.
H] After applying a peeling film treatment using a solution, Ljll was applied, and then nickel plating was performed in a nickel sulfamate bath under the same conditions as before to form a nickel 'tu, u layer, and this was then peeled off from the mother 1. and used it as a stamper.

比較例2として、比較1+ll lで得たスタンパ−を
下記組成のメッキ浴に浸漬し1.晶度50(’O)、電
流密度30(A/dぜ〕の条件でクロJ・メッキを行な
った。
As Comparative Example 2, the stamper obtained in Comparative 1+11 was immersed in a plating bath having the following composition.1. Black J plating was performed under the conditions of crystallinity 50 ('O) and current density 30 (A/dze).

クロムメッキ浴組成: 比較例11比較例2で得られたスタンパ−を用いて、実
施例の場合と同組成の成形用組成物を圧縮成形して谷量
変換型の情報記録盤を作製したときの、傷発生によるラ
イフおよびクロム厚さを表1に示した。
Chrome plating bath composition: Comparative Example 11 Using the stamper obtained in Comparative Example 2, a molding composition having the same composition as in the example was compression molded to produce a valley amount conversion type information recording disc. Table 1 shows the life and chrome thickness according to scratch occurrence.

表1より、比較例1に対して実施例、比較例2ともスタ
ンパ−ライフが向上しているのが認められる。
From Table 1, it can be seen that the stamper life is improved in both Examples and Comparative Example 2 compared to Comparative Example 1.

さらに、実施例、比較例1.比較例2で得られたスタン
パ−における中心から半径100 (鼎〕(7)位置で
のデユーティ−比の測定値を表2に示した0(以下余白
) 表  2 デユーティ−比はニッケルスタンバ−表面へ、さらにク
ロムメッキ膜を施した比較例2で高くなっていることが
判る。実施例、比較例1は50〔%)に近い値を示して
おり、記録転写性に優れている。
Furthermore, Examples, Comparative Example 1. Table 2 shows the measured value of the duty ratio at the 100 radius (7) position from the center of the stamper obtained in Comparative Example 2 (blank below). Furthermore, it can be seen that the value is higher in Comparative Example 2 in which a chromium plating film was applied.Example and Comparative Example 1 show a value close to 50%), and are excellent in recording transferability.

このように、本実施例の方法によれば、記録転写性から
生じる信号再生特性を低下さぜることなくスタンパ−の
表面硬度を上昇させ、ライフを向上させることが可能と
なる。
As described above, according to the method of this embodiment, it is possible to increase the surface hardness of the stamper and improve its life without deteriorating the signal reproduction characteristics resulting from the recording transferability.

なお、本発明は上記実施例に限定されるものではなく、
種々に変形して実施することが可能である。例えば、硬
質クロムメッキ膜の厚さは適宜変更できるが、ビット部
を著しくクロムによって埋めない程度の厚さ0.25〜
0.35 (71)できることが望ましい。また、本発
明による方法は、ビデオディ    □スフに限らず、
表面の硬化を必要とし、しかも転写性精度を要求とする
各種の精密成形用金型の製造に適用できる。
Note that the present invention is not limited to the above embodiments,
It is possible to implement various modifications. For example, the thickness of the hard chrome plating film can be changed as appropriate, but the thickness should be 0.25 to 0.25 to a level that does not significantly bury the bit part with chromium.
0.35 (71) It is desirable to be able to do so. Furthermore, the method according to the present invention is applicable not only to video display.
It can be applied to the production of various precision molds that require surface hardening and transfer accuracy.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図乃至第5図はそれぞれ、本発明になるスパンバー
製造工程の断面図である。 l・・・マザー、     2・・・クロムメッキ膜、
3・・・ニッケル電鋳層、4・・・硬質クロムメッキ膜
、5・・・スタンパ−0 A・・・ビットの幅、   B・・・ビット間の幅、C
・・・クロムメッキ膜厚。 代理人弁理士 則近憲佑(ばか1名) 第  1 図 第  2 因 第  3 図 第  4 図 第5図
1 to 5 are cross-sectional views of the span bar manufacturing process according to the present invention. l...Mother, 2...Chromium plating film,
3... Nickel electroformed layer, 4... Hard chrome plating film, 5... Stamper-0 A... Bit width, B... Width between bits, C
...Chrome plating film thickness. Representative Patent Attorney Kensuke Norichika (one idiot) Figure 1 Figure 2 Figure 3 Figure 4 Figure 5

Claims (1)

【特許請求の範囲】[Claims] 転写により金型を製造するに際し、母型表向に所定の膜
厚で硬質クロムメッキ膜を被着し、次いで該硬質クロム
メッキ膜上に電鋳にて金属体を被着した後、前記金属体
を該硬質クロムメッキ膜より剥離し、次に前記金属体の
転写面Iluへ硬質クロムメッキを前記母型表面に被着
した硬質クロムメッキ膜と等しい膜厚で施すことを特数
とする〃金型表面に硬質膜を有する精密成形用金型の製
造方法。
When manufacturing a mold by transfer, a hard chrome plating film is deposited on the surface of the mother mold with a predetermined thickness, and then a metal body is deposited on the hard chrome plating film by electroforming, and then the metal The special feature is that the metal body is peeled off from the hard chrome plating film, and then hard chrome plating is applied to the transfer surface Ilu of the metal body in a thickness equal to that of the hard chrome plating film deposited on the surface of the matrix. A method for manufacturing a precision molding mold having a hard film on the mold surface.
JP16221582A 1982-09-20 1982-09-20 Production of die for precision forming Pending JPS5953690A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16221582A JPS5953690A (en) 1982-09-20 1982-09-20 Production of die for precision forming

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16221582A JPS5953690A (en) 1982-09-20 1982-09-20 Production of die for precision forming

Publications (1)

Publication Number Publication Date
JPS5953690A true JPS5953690A (en) 1984-03-28

Family

ID=15750150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16221582A Pending JPS5953690A (en) 1982-09-20 1982-09-20 Production of die for precision forming

Country Status (1)

Country Link
JP (1) JPS5953690A (en)

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