JPS595414A - Magnetic head and its manufacture - Google Patents

Abstract

PURPOSE:To obtain a titled magnetic head which has an excellent recording and reproducing characteristic and can be manufactured easily, by constituting a medium opposed face part except a metallic magnetic material film exposed part on a magnetic recording medium opposed face of a magnetic head, of a non- magnetic material which contacts with both sides of a metallic magnetic material film. CONSTITUTION:Metallic magnetic material films 10, 10' having a high saturation magnetic flux density, whose thickness forms a track width part of track width tw are constituted of a spattering film, etc. of sendust or an amorphous magnetic alloy. Also, the other end part against the end part of the butt part of a pair of left and right magnetic material films extends to the end part of core width l. Also, the magnetic material films 10, 10' reach at least the gap depth from the recording medium opposed face, and are connected to high magnetic permeability ferrite 12, 12' for forming a main body part of a core so as to be continued magnetically. Also, non-magnetic materials 13, 14 such as glass, resin, etc. are provided in order to protect the side of the magnetic material films 10, 10' and also to secure abrasion resisting strength of the recording medium opposed face of the magnetic head.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic head suitable for high-density magnetic recording, and particularly to a video magnetic head having performance suitable for high coercive force recording media.

In high-density magnetic recording and reproducing devices, it is known that it is advantageous to increase the coercive force I (C) of the magnetic recording medium, but in order to record information on a magnetic recording medium with high coercive force, a strong magnetic field is required. Is required.

However, the saturation magnetic flux density Bs of currently used ferrite materials is about 4,000 to 5,000 Gauss, so there is a limit to the strength of the recording magnetic field that can be obtained, and the coercive force 1 (,) of the magnetic recording medium is less than 1,000 oersteds. Overcome A
In some cases, there is a disadvantage that recording becomes insufficient.゛On the other hand, magnetism using crystalline magnetic alloys such as PE-HT-SI alloy (called Sendust), N1-re gold alloy permalloy, which are generically called metallic magnetic materials, or amorphous magnetic alloys Heads generally have excellent characteristics such as having a higher saturation magnetic flux density than ferrite materials and low sliding noise.

However, the generally used track width (10 μm or more)
, the effective permeability in the video frequency domain is lower than that of ferrite due to eddy current loss, which has the disadvantage of lowering reproduction efficiency. Also, in terms of wear resistance, it is several steps inferior to ferrite.

In order to solve the above-mentioned problems, a magnetic head has been proposed that combines ferrite and metal magnetic materials to take advantage of the advantages of both.

For example, as shown in FIG. 1(A), a cut groove is provided in a high magnetic permeability ferrite 1 which is the main body of the core, and a thin metal magnetic plate 2 is inserted into the cut groove and fixed with a non-magnetic material such as glass.

In this case, a notch is provided in the ferrite part near the working gap so that the working gap part is formed of a metal magnetic thin plate, and a non-magnetic material such as glass is used as a reinforcing material.
′ is filled. 4 is a window for coil winding. It is difficult to insert and fix a thin metal magnetic plate into the groove provided in the ferrite block with good adhesion, as shown in Fig. 1 (b), which shows the sliding surface of the magnetic tape. Gaps 5, 5' larger than microns are created, and the ferrite material is chipped. In addition, if the cut groove of the ferrite block is made several microns wider than the thickness of the metal magnetic thin plates, when many metal magnetic thin plates are inserted into one large ferrite block, pitch dimension errors will occur in the spacing between the metal magnetic thin plates. Therefore, when this ferrite block is cut into cores with multiple openings, processing errors occur, resulting in lower yields and a lack of mass productivity. Furthermore, since the cut groove is a closed groove, there are drawbacks such as the non-magnetic material not being filled sufficiently, which may cause holes or bubbles to form on the sliding surface of the magnetic tape, causing dirt to become clogged during sliding movement with the magnetic tape. This may cause chipping.

As a conventional example of a magnetic head, a magnetic head having a structure as shown in FIG. 2 (b) is known. As shown in FIG. 2(a), this magnetic head is made by sputtering or vacuum deposition a metal magnetic material having a high saturation magnetic flux density on a non-magnetic substrate 6 to form a metal magnetic film 7 having a thickness equal to the track width. After forming the entire structure and adhering the non-magnetic material 6' on top of it, it is divided and a series of steps such as polishing the gap abutting surface and forming a coil winding window are carried out. The magnetic head shown in FIG. 2(b) is obtained by bonding through the nonmagnetic film. A magnetic head with this structure has a major drawback in that it is not suitable for mass production.

In addition, a magnetic head has been proposed in which a metal magnetic film is formed only in the vicinity of the gap, and the other components are made of ferrite, but these have not been fully satisfactory in terms of tape sliding noise. , a metal magnetic film with a track width is
A magnetic head extending over the entire width (the distance from one end of the magnetic head to the other end in the recording medium running direction) is advantageous.

The present invention aims to eliminate the drawbacks f:s of the above-mentioned prior art, provide a magnetic head that exhibits excellent recording and reproducing characteristics even when using a high coercivity magnetic recording medium, and is easy to manufacture, as well as a method for manufacturing the same. It is something to do.

In order to achieve the above object, the magnetic head of the present invention has a pair of metal magnetic films having a thickness corresponding to the track width and having a high saturation magnetic flux density, each end of which faces each other to form an operating gap. , the other end of the metal magnetic film on the working gap side reaches the end of the magnetic head in the magnetic recording medium running direction, and the one end of the metal magnetic film on the magnetic recording medium facing side reaches the magnetic head. exposed to the surface facing the recording medium,
and the other end of the metal magnetic film with respect to one end of the surface facing the recording medium reaches at least the coil winding window, and is connected to and magnetically continuous with the high magnetic permeability ferrite that is the core body in the vicinity thereof; Further, a portion of the surface of the magnetic recording medium facing surface of the magnetic head other than the exposed portion of the metal magnetic film is made of a nonmagnetic material that is in contact with both side surfaces of the metal magnetic film.

In order to obtain good characteristics in the magnetic head of the present invention, at least a portion of the bonding surface between the metal magnetic film and the high magnetic permeability ferrite opposite to the surface facing the recording medium must be It is preferable that the bonding surface is non-perpendicular to the opposing surface and that the area of the bonding surface is larger than the area of the exposed portion of the metal magnetic film.

In this case, the bonding surface between the metal magnetic film and the high magnetic permeability ferrite is a plane that is substantially perpendicular to the recording medium facing surface, and is a flat surface that is substantially perpendicular to the recording medium facing surface, and is a flat surface that is substantially perpendicular to the recording medium facing surface, and is a flat surface that is substantially perpendicular to the recording medium facing surface, and is a flat surface that is substantially perpendicular to the recording medium facing surface. It is common that the surface is non-perpendicular to the opposing surface. This non-perpendicular surface is usually a plane that is oblique to the surface facing the recording medium, a plane that is somewhat parallel to the surface, or a plane that is a mixture of both, but it is not limited thereto.

Further, it is preferable that one end of the metal magnetic film on the side opposite to the surface facing the recording medium is exposed on the side surface of the core of the magnetic head, since the bonding area becomes large and manufacturing is easy.

The metal magnetic film is made of F'e-8i alloy, pe-ht-s
It is normal to use at least one of the t-gold alloy FC-Ni alloy and an amorphous magnetic alloy, but in order to prevent a decrease in effective permeability due to eddy current loss, magnetic layers and non-magnetic layers are alternately laminated. It may also be a laminate. In this latter case, the magnetic layer is made of at least one of Fe-8i alloy, Fe-Al-B1 alloy, Fe-Ni alloy, and amorphous magnetic alloy as described above, and the non-magnetic layer is made of SiG or At20. It is often used as a non-magnetic insulating layer such as.

As described above, in the magnetic head of the present invention, the surface facing the magnetic recording medium is made of non-magnetic material except for the exposed portion of the metal magnetic film, and this non-magnetic material is present in contact with both sides of the metal magnetic film. are doing. Due to manufacturing reasons, this non-magnetic material is
Different materials, especially materials with different softening points, are often used for each of the two sides, but since the surfaces are slid against the magnetic recording medium, the wear characteristics are the same on both sides. It is desirable that there be.

As described above, in the magnetic head of the present invention, most of the core is made of high permeability M n -7,n ferrite or H
It is made of a bulk material of l-2n ferrite, and the portion constituting the operating gear portion and the track width portion are formed of a metal magnetic film. The metal magnetic film is made of a crystalline magnetic material or a high permeability amorphous alloy magnetic material such as M, pe-, 9i alloy, Fe-Al-, 9i alloy, Ni-pe alloy, etc. It is not necessary to limit the material to these materials, and any high permeability magnetic material with a high saturation magnetic flux density such as high permeability ferrite may be used, and can be obtained by physical vapor deposition such as sputtering or vacuum deposition. Depending on the case, chemical vapor deposition, plating, etc. may also be used.

The above-mentioned PE-8i alloy is a Fe-Si alloy containing 2.5% (hereinafter, % indicates weight %) to 7.5% Si,
Furthermore, a small amount of other elements may be added, Fe-ht-s
It is called gold alloy sendust and usually has an A content of 3% to 10%.
It is an At alloy containing A and 5% to 12% Si, and in this case, a small amount of other elements may also be added, and when adding additional elements as mentioned above, the amount of Ss, At spear, st adhesion may differ slightly from the above. N1=pe alloy is called permalloy, and is usually set to Ntits%. All of these alloys are well-known crystalline alloys, but well-known high permeability amorphous magnetic alloys, which have recently been in the spotlight, may also be used.

The metal magnetic film extends substantially perpendicularly from the surface facing the recording medium to at least the coil winding window, so that the connecting portion between the metal magnetic film and the ferrite is in close contact with a ferrite surface having a step or an inclined surface. It is desirable that the surface of the metal magnetic material is wider than the track width formed by the metal magnetic material.

The above-mentioned magnetic head of the present invention includes the following steps: 1) forming a plurality of mutually parallel first grooves on a surface of a large block made of high magnetic permeability ferrite that will be the recording medium facing surface; 11) forming the first grooves; 111) filling a first groove deeper than the first groove so as to also remove a side wall portion of the non-magnetic material adjacent to the first groove and filled in the first groove; 1) Step of providing a second groove; 1) A step of depositing a metal magnetic film having a thickness that corresponds to a predetermined track width on at least the side wall surface of the second groove;
) filling the second groove that has completed step 1v) with a non-magnetic material; vi) processing and flattening the surface of the large block that will be the surface facing the recording medium that has completed step V); Step of removing the metal magnetic film parallel to the tangent surface and the non-magnetic material protruding on the surface and exposing the metal magnetic film corresponding to the track width, Vtl) A pair of small blocks from the B large block cutting out the metal magnetic material, polishing the surface that will become the gap abutment surface, and providing a groove for coil winding on at least one of the small blocks; A step of abutting the pair of small blocks and integrating them so that the edges rM of the films coincide, IX) Step v+1+ The small blocks integrated in step 3 are placed between the metal magnetic films Cut it parallel to the metal magnetic film and have a predetermined core thickness.
#F: can be easily manufactured by a manufacturing method comprising the steps of obtaining a plurality of magnetic head cores, and (X) attaching a coil to the magnetic head core.

In addition, the above steps: The process may be replaced by providing a second groove having a depth greater than the thickness of the second groove.

The above steps l) and il+), or the above step I)
, the first groove and the second groove (in the case of step (3), only the second groove) are connected to the end surface of the large block (the surface that becomes the gap abutting surface and the surface perpendicular to the surface facing the recording medium).
The integrated small block is cut parallel to the metal magnetic film in step 81x), and the coil is fully wound in step X). , a magnetic head having a predetermined azimuth angle θ is obtained.

In step 11) d, glass is used as the non-magnetic material,
By using glass having a lower softening temperature than the glass used in step 11) as the non-magnetic material in step V), step V can be carried out without damaging the glass deposited in step 11). ) can be further coated with glass.

As mentioned above, if the metal magnetic film to be deposited in step IV) is made of an amorphous magnetic alloy, in step It is necessary to fill the non-magnetic material with. Otherwise,
The amorphous alloy crystallizes, making it impossible to obtain desired properties.

Note that the cutting of the small block in step vii) K is performed by cutting the large block at right angles to the first and second grooves, but in the case of a head having an azimuth angle, cutting out the small blocks from the right angle to the azimuth angle is performed. Try to cut only θ.

Further, the surface on which the coil winding groove is provided is also usually
Alternatively, it is a side surface that is orthogonal to the second groove, but in the case of a head having an azimuth angle, it is a side surface that is inclined by an azimuth angle θ from the orthogonal surface.

Furthermore, the depth of the first groove is from an operating gap depth of 50 to
The depth should be about 200/1 m or more, that is, about the depth that reaches the coil winding window. This depth is calculated by adding the daily labor cost to the thickness of the non-magnetic material 22 on the side opposite to the direction in which the metal magnetic film curves, of the non-magnetic material provided on the surface facing the recording medium of the manufactured magnetic head. corresponds to the added value. The width of the first and second grooves is usually about half the width of the core thickness minus the track width.

The depth of the second groove is at least deeper than the first groove, and preferably about 50 μm or more deeper than the first groove. This depth is determined by the thickness of the non-magnetic material 25 on the side in the direction in which the metal magnetic film curves among the non-magnetic materials provided on the surface facing the recording medium of the manufactured magnetic head. Corresponds to the value including the thickness and machining allowance. As this depth increases, the area of the joint surface between the metal magnetic film and the high magnetic permeability ferrite increases, the magnetic continuity becomes good VC, and the magnetic resistance at the joint surface decreases, but on the other hand,
Since the proportion of the main body of the core composed of ferrite decreases and the proportion of the core composed of non-magnetic material increases, the magnetic resistance of the core as a whole increases beyond a certain depth. Therefore, this depth is preferably 500 μm or less.

Hereinafter, the present invention will be explained in more detail with reference to Examples.

FIG. 3 shows a typical example of the structure of a magnetic head according to the present invention. In the figure, 10.10' is a metal magnetic film that forms a track width portion with a thickness of tw (track width) and has a high saturation magnetic flux density, and is made of a sputtered film of sendust or an amorphous magnetic alloy. ing. In addition, a non-magnetic gap 11 is formed at the abutting portion of the pair of left and right magnetic films, and the other end of the abutting portion has a core width (
The width (width in the track direction) of the core extends to the end of the core.

In addition, this magnetic film reaches at least the gap depth d (gap depth d refers to the tip of the coil winding window) from the surface facing the recording medium, and the high magnetic permeability ferrite 12.12 which is the main body of the core ' and are connected magnetically in a continuous manner. Reference numerals 13 and 14 denote non-magnetic materials such as glass or resin provided to support or protect the side surfaces of the magnetic film and to ensure abrasion resistance of the surface of the magnetic head facing the recording medium. 15 is a window for coil winding.

The magnetic film 10.10' is connected to the core main body 12.12' made of a bulk material of high magnetic permeability ferrite, and is, for example, L-shaped, increasing the contact area between the two and magnetic It has a structure that improves the connection and reduces magnetic resistance. In addition, in order to further perfect the magnetic connection between the magnetic material film and the high magnetic permeability ferrite portion, as shown in Fig. Even better results can be obtained if the structure is in contact with the side surface of the membrane.

Next, a typical manufacturing method of the magnetic head according to the present invention will be described below. Figures 4 (a) to (10) show a series of manufacturing steps. Hereinafter, for example, process (a) refers to the process shown in Figure 4 (a). Figure 4 (e) shows the process that is obtained. Figure 4 (W) is a perspective view of the magnetic helad core with the non-magnetic reinforcing material on the side of the magnetic film removed to clarify the relationship between the magnetic film and the connection between the high magnetic permeability ferrite part near the gap. As shown in FIG. 4(A), a large block 20 of high magnetic permeability ferrite forming the main body of the core is shown.
A block of M n -Z n ferrite is prepared as follows. A plurality of sets of small blocks are cut out from this large ferrite block in a later process, and a large number of magnetic rad cores are obtained from these sets. Here, the dimension a corresponds to the core height, which is 2 to 2.5 m, and El is the direction perpendicular to the cutting plane for cutting out the small block of 1, 2 to 1.5+++ m, which corresponds to the dimension of 1/2 of the core width. Then, in order to obtain the core width of multiple small blocks, the multiple head cores are cut in the direction perpendicular to the cutting plane to cut out a large number of head cores with a core thickness of 15 to 20 +++ m, and C is a core thickness of 0.12 to 0.18 rrvn. It has a size and shape of 10 to 20 mm so that a core diameter of 10 to 20 mm can be obtained. 1) c-plane (dimensions:
A plurality of mutually parallel first non-magnetic material filling grooves 21 are formed in the length direction of b including the side corresponding to c. The depth h of the groove was greater than the gap depth of the magnetic helad core, and was 0.2-0.4 mm including processing allowance. 0.3 to 0 to groove width
．． 5 tries, and the distance between the groove center lines was set to 0.6 to 1-. Next, in step (0), as shown in K, this first groove 21 is
is filled with a non-magnetic material 22. The following steps (b) to (g) show ac side views (plane including sides corresponding to dimensions a and C). Note that a relatively high melting point glass or the like is suitable for the non-magnetic material 22 due to the filling process temperature of the non-magnetic filler in the second groove, which will be described later. For example, glass whose working temperature is 600-750C is preferred. Such glasses are well known. Next, as in step (c), grind the excess non-magnetic material on the surface of fJ421 of the large ferrite block 20,
Obtain a polished flat surface. Next, as shown in step ), a second groove 23 is formed in the ferrite part between the non-magnetic material filling parts 22.
will be established. This second groove 23 is provided with a width larger than the interval between the first grooves 21 so as to remove a part of the non-magnetic material filling portion. It is preferable that the depth of the second groove is slightly deeper than the depth of the first groove. Groove width is 0.3 to 0.5
It was a van. Note that the groove width is not particularly specified as long as the magnetic film that will be deposited in the next step can be sufficiently deposited into the groove by sputtering, but it should be approximately half the value obtained by subtracting the track width from the core thickness. There are many things to do.

Next, as shown in step (e), a magnetic film 24 having a high saturation magnetic flux density is deposited toward each second groove 23. At this time the second
The thickness of the magnetic film 24 deposited on the side wall surfaces of the grooves is formed to be equal to the required track width. For forming the magnetic film, it is suitable to use a well-known sputtering method that can sufficiently wrap around the side walls of the groove. According to general R,F sputtering equipment, the film thickness ratio between the flat part and the side wall surface is approximately 2.
=1. In this example, an amorphous magnetic alloy with high magnetic permeability was used as the magnetic film. Its composition is CoAl MOg
Although Zr16 was used, any material for magnetic head cores may be used as long as it has a higher saturation magnetic flux density than high magnetic permeability ferrite. Note that the connection between the deposited magnetic film and the ferrite constituting the rear magnetic circuit is made at the bottom of the second groove and a part of the side wall surface, forming a sufficiently magnetically continuous structure. Ru. Here, the magnetic films on both side walls of the groove each have a track width of each magnetic head.

Next, as shown in step (f), the second groove in which the magnetic film was formed on the inner surface in step (e) is filled with a nonmagnetic material 25. The non-magnetic material to be filled in the second groove needs to be processed under conditions such that the non-magnetic material 22 in the first groove does not soften and deform due to the temperature heated during filling. Here, the working temperature is 45
0-500C low melting point glass was suitable. In particular, when an amorphous alloy is used as the magnetic film, it is necessary to carry out the filling process at least at a temperature below the crystallization temperature, and preferably at a temperature 10C lower than the crystallization temperature, so the filling process is performed at a processing temperature of 500C or below. Limited to glass available. Note that such glass is well known. Further, it is preferable that the non-magnetic material of the first groove and the non-magnetic material of the second groove have approximately the same tape wear. -For example,
In the glass used in this example, the first groove has Zn0(26,8).

Pb0(0,5)-NazO(11,4), I'QO(
0,5), S'02 (21), A40s (4,4)
, 820! (27,3), Ba0r8.1) glass with composition C (weight% in parentheses), Pb0 (
84), Btus (3), 5jOt (1,5)
A glass having a composition of 40 g (1,5) (wt% in parentheses) was used, and satisfactory results were obtained. Next, as in step (g), the unnecessary nonmagnetic filler and magnetic film on the surface facing the recording medium (the surface with the grooves 21 and 23 of the large ferrite block 20) are ground and removed to obtain a flat surface. The purpose of this blade is to clarify the cross section having the thickness of the magnetic film that corresponds to the track width, so that when a pair of small blocks, which will be described later, are butted together, the track portions can be matched with good accuracy. The large block obtained in this way is the fourth
The structure is shown in perspective view in Figure (a). This is cut along the dotted line 40 to obtain a plurality of small blocks 26, 26', etc., and the surface 27 which becomes the gap abutting surface is mirror polished. In this way, at least one pair of small protrusions 26,2
6' was obtained, and less in the process (1 ka', □□□).

Both small blocks 26' have grooves 28 for coil winding.
will be established. Furthermore, grooves 29 and 29'l for filling bonding reinforcing material are provided in the rear ferrite portion as needed, and filling the reinforcing material 30 in the sickling process is effective for increasing mechanical strength.

Furthermore, processing generally performed on magnetic head preparations, such as applying a non-magnetic material 30 for forming a gap, is performed. Note that if a low melting point glass film is formed by sputtering or the like on the bonding surface other than the gap forming portion and bonded by heat treatment, the reinforcing grooves 29 and 29' are unnecessary. Next, the gear forming surfaces of the pair of small blocks 26 and 26' obtained in the above process are all butted together so that the corresponding track portions are aligned with each other, and as is well known, they are heat treated under pressure and joined to form an integrated unit. Obtain a joint block as shown below. Next, track width tw
Destruction centered on the magnetic film having +i! i! i! 41 to have a core thickness T, a plurality of magnetic cores shown in FIG. 2(3) are obtained, and by winding coils around these, the magnetic head of the present invention is obtained. . In addition, in FIG. 4 (W), the non-magnetic material 22.25 has been temporarily removed in order to clarify the relationship between the magnetic material /13 (24, 24') and the core main body 26.26' made of ferrite bulk material in the vicinity of the gap. This is a perspective view when the magnetic film 24°24' is equal to the predetermined track width (10-odd microns). TW indicates the total thickness of the core made of ferrite, for example, the track width. About 10 times thicker.

Note that the junction between the magnetic film and the ferrite is provided with a step in the ferrite part in order to complete the magnetic connection, and at least the gap depth d is formed by the magnetic film, and the depth to the connection part with the ferrite is h=4h>d, and the connecting portion at the bottom of the magnetic film is made deeper than that so that it is connected to the bottom of the L-shape on one side.

Another embodiment of the present invention is shown in FIG. In reality, the shape of the bottom of the groove is rounded, as shown in the side view of the block in Figure 5 (A).The magnetic head core obtained from such a block is as shown in Figure 5. (b) As shown in K, the connecting part 31 between the magnetic film and the ferrite is inclined, increasing the adhesion strength of the magnetic film at the connecting part.Also, the bottom surface may be curved, depending on the shape of the bottom surface of the processing grindstone. You can choose appropriately.

Another implementation of the invention is shown in FIG. FIG. 3 is a view of the magnetic head viewed from the recording medium facing surface. In this case, the track width is 1
w is composed of a multilayer magnetic material in which magnetic layers 32 and non-magnetic insulating layers 33 such as Si Q, 40a, etc. are laminated alternately. In this way, eddy current loss in the metal magnetic film is reduced, and magnetic properties up to a high frequency range can be ensured.

Another practical ufM'fIJ of the present invention is shown in FIGS. 7(a) and 7(b). (A) shows a top plan view of the large block 20 of the present invention.

Here, a magnetic head having a predetermined azimuth angle θ is provided in which the magnetic films 24 and 24' are located at the center of the core over the entire width of the core. This is done by forming a plurality of first grooves and second grooves parallel to each other by a predetermined azimuth angle θ with respect to one side corresponding to the dimension aVc in the rectangular parallelepiped ferrite large block shown in FIG. 7(a). process up to), and further process QO
It is obtained by cutting the core parallel to these grooves and winding the core with a coil. As shown in FIG. 7(b), which is a plan view of the recording medium facing surface of this magnetic helad core, the track portion (width tw) formed of the magnetic film is centered with respect to the core thickness T-. A magnetic head is obtained in which the gap portion is tilted by the azimuth angle θ.

Other embodiments of the invention are shown in FIGS. 8 and 9.

FIG. 8 shows the manufacturing method, and FIG. 9 shows a perspective view of the shape of the magnetic herad core obtained. The process in Figure 8 (
In a), a large block is prepared in which a large ferrite block 20 and a non-magnetic material 34 are bonded together. The thickness of this non-magnetic material is approximately the same as the gap depth of the completed magnetic head, and including processing cost, it is 0.
．． 3 rtrm. If such a large block is used, the first groove machining in other manufacturing methods of the present invention (for example, FIG. 4(a)) becomes unnecessary. Next, step ←) corresponds to step ) in FIG. 4, and a second groove machining is performed. Next, in step (c), a magnetic material having a high saturation magnetic flux density is sputtered toward the second groove 23, and at least one part of the groove is sputtered.
A magnetic film 24 having a thickness equal to the track width is deposited on the regular wall. Next, in step 2), after filling with a non-magnetic material 25 such as glass, the unnecessary non-magnetic filler and magnetic film on the surface are ground and removed to obtain a flat portion. The large block thus separated is subjected to the same steps as step (g) and subsequent steps in FIG. 4 to obtain the magnetic head shown in FIG. 9.

In the drawings of each of the magnetic heads mentioned above, illustration of the coils is omitted.

As explained above, the magnetic head according to the present invention has a metal magnetic film having a high saturation magnetic flux density disposed near the gap, and the metal magnetic film has a thickness equal to the track width and a core width. , a portion 110 of the surface facing the recording medium is made of a non-magnetic material, and the other portions are made of a non-magnetic material.

Since the portion is made of a bulk material of high magnetic permeability ferrite, the magnetic head has extremely excellent recording and reproducing characteristics. Furthermore, a magnetic head with a narrow track width, which has low tape sliding noise and excellent wear resistance, can be obtained.

The manufacturing method according to the present invention is illustrated in FIG. 1(a), for example.
(b), enables more efficient mass production than the conventional magnetic head manufacturing method shown in Figures 2 (a) and (b), and improves gap length accuracy, track alignment accuracy, and close contact between the metal magnetic film and ferrite. This results in improved head performance and high yield.

In addition, in the magnetism, rad, and manufacturing method thereof of the present invention, the conventional techniques may be followed for the above-mentioned matters.

[Brief explanation of the drawing]

1(A) and 1(B) are a perspective view and a top view showing the structure of a conventional magnetic head, FIG. 2(A) is a perspective view showing part of the manufacturing process of another conventional magnetic head, and FIG. Figure 2 (b)
2(a) is a perspective view showing the structure of a conventional magnetic head obtained through the process shown in FIG. )～(
E) is a magnetic head manufacturing process 8 in an embodiment of the present invention.
FIG. 4 (W) is an explanatory diagram for clarifying the relative relationship between the metal magnetic film and the high magnetic permeability ferrite of the magnetic head in one embodiment of the present invention,
FIGS. 5(A) and 5(B) are a cross-sectional view and a perspective view showing a magnetic head in another embodiment of the present invention, and FIG. 6 is a top view of a magnetic head in another embodiment of the present invention. 7
Figures (a) and (b) are a plan view showing a part of the manufacturing process of a magnetic head having an azimuth angle according to another embodiment of the present invention, and a top view of the obtained magnetic head, and Fig. 8 (a). Figure 9 is a perspective view or cross-sectional view showing a part of the manufacturing process of a magnetic head according to another embodiment of the present invention, and Figure 9 is a diagram obtained through the steps shown in Figures 8 (a) to 8). FIG. 3 is a perspective view showing a magnetic head in another embodiment of the present invention. 20... High magnetic permeability ferrite large block, 21...
1st groove, 22... non-magnetic material, 23... 2nd groove,
24°24'...Metal magnetic film, 25...Nonmagnetic material, 26°Z. Figure 4 Figure 4r''?-1 Figure 6 '7 Continued from Figure 1 page 0 Inventor: Hiroshi Kudo Inside the Central Research Laboratory, Hitachi, Ltd., 1-280 Higashikoigakubo, Kokubunji City

Claims (1)

[Claims] 1. One end of each of a pair of metal magnetic films having a thickness corresponding to the track width and having a high saturation magnetic flux density is opposed to each other to form an operating gap, and the metal magnetic The other end of the body membrane on the side of the working gap reaches the end of the magnetic head in the direction in which the magnetic recording medium runs, and one end of the biological membrane of the metal magnet 1 on the side of the surface facing the magnetic recording medium reaches the recording medium of the magnetic head. The other end of the metal magnetic film that is exposed on the opposing surface and opposite to one end of the recording medium opposing surface reaches at least the coil winding window, and is connected to the high magnetic permeability ferrite that is the core body in the vicinity of the coil winding window to form a magnetic field. furthermore, the portion of the medium facing surface other than the exposed portion of the metal magnetic film on the magnetic recording medium facing surface of the magnetic head is made of a nonmagnetic material that is in contact with both side surfaces of the metal magnetic film. A magnetic head featuring: 2. At least a portion of the bonding surface between the metal magnetic film and the high magnetic permeability ferrite opposite to the recording medium facing surface side is non-perpendicular to the recording medium facing i, and the area of the bonding surface is as described above. 2. The magnetic head according to claim 1, wherein the area of the magnetic head is larger than that of the exposed portion of the metal magnetic film. 3. The bonding surface between the metal magnetic film and the high magnetic permeability ferrite is a plane that is substantially perpendicular to the recording medium facing surface, and is substantially perpendicular to the recording medium facing surface, and is a flat surface that is substantially perpendicular to the opposing surface at the other end of the recording medium facing surface. 3. The magnetic head according to claim 2, wherein the surface is non-perpendicular to the opposing surface. 4. The magnetic head according to claim 2 or 3, wherein at least a part of the non-perpendicular surface is a plane obliquely intersecting the recording medium facing surface. 5. The magnetic head according to claim 2 or 3, wherein at least a part of the non-perpendicular surface is a plane parallel to the recording medium facing surface. 6. One end of the metal magnetic film on the side opposite to the surface facing the recording medium is exposed on the side surface of the core of the magnetic head (f-Claims 1 to 5 of the claims characterized in 7. The magnetic head according to any one of claims 1 to 7, wherein the metal magnetic film is composed of a laminate of a magnetic layer and a non-magnetic layer.
6. The magnetic head according to any one of item 6. 8. The metal magnetic film is Fe-B1 alloy, Fe-At-
8l alloy, 1;"consisting of at least one alloy selected from the group consisting of e-Ni alloy and amorphous magnetic alloy, according to any one of claims 1 to 6. 9. The magnetic layer is made of pe-, 9l alloy, Fe-ht-st.
The magnetic head according to claim 7, characterized in that the magnetic head is made of at least one alloy selected from the group consisting of a gold alloy li"e-Ni alloy and an amorphous magnetic alloy. 10. The metal magnetic film Claims 1 to 9, characterized in that the non-magnetic materials in contact with both side surfaces of the magnet are different materials and have substantially the same wear characteristics. 11. A step of forming a plurality of mutually parallel first grooves on a surface of a large block made of N high magnetic permeability ferrite that will be a surface facing a recording medium; 11) The first grooves. 111) filling a first groove deeper than the first groove so as to also remove a side wall portion of the non-magnetic material adjacent to the first groove and filled in the first groove; Step of providing a groove of No. 2, +V > Step of depositing a metal magnetic film of a thickness that provides a predetermined track width on at least the side wall surface of the second groove, V) Step of forming the second groove after completing step +V) Filling the groove with a non-magnetic material, V+) Processing and flattening the surface of the large block that will be the surface facing the recording medium after completing step V), forming a metal magnetic material film parallel to the contact surface on the surface; removing the non-magnetic material protruding on the surface;
Step of exposing the metal magnetic film corresponding to the track width, vll) Cutting out a pair of small blocks from the large block, polishing the surfaces that will be the gap abutting surfaces, and further winding a coil on at least one of the small blocks. (vm) step of butting the pair of small blocks so that the end faces of the metal magnetic film coincide with each other through a non-magnetic layer having a thickness corresponding to the gap length, and integrating the small blocks. , 1x) The small blocks integrated in step vii+) are cut between the metal magnetic films in parallel to the metal magnetic films and to have a predetermined core thickness. 1. A method for creating a magnetic head, comprising the steps of: obtaining a magnetic rad core; and X) attaching a coil k M to the magnetic rad core. 12. In the steps l) and 111), the first
12. The method of manufacturing a magnetic head according to claim 11, wherein the groove and the second groove are formed so as to form a predetermined azimuth angle θ with respect to the end face of the large block. 13.1) A second layer parallel to the non-magnetic material layer surface of a large block made of a composite body in which all non-magnetic material layers are bonded to a high magnetic permeability ferrite block and having a depth greater than the thickness of the non-magnetic material layer. (1) providing a groove of the second groove; (1) depositing a metal magnetic film having a thickness that corresponds to a predetermined track width on at least the side wall surface of the second groove; Step 1) Processing and flattening the surface of the large block that will be the surface facing the recording medium after step 2), and forming a metal magnetic material film parallel to the contact surface on the surface, and Step of removing the non-magnetic material protruding on the surface and exposing the metal magnetic film corresponding to the track width; (2) cutting out a pair of small blocks from the large block and polishing the surfaces that will be the gap abutting surfaces; , further providing a coil winding groove in at least one of the small blocks; Match the small blocks,
Step of integrating this, ■) The small blocks integrated in step VI) are cut between the metal magnetic films parallel to the metal magnetic films and to a predetermined core thickness. do,
1. A method for manufacturing a magnetic head, comprising the steps of: obtaining a plurality of magnetic head cores; and (1) attaching a coil to the magnetic head core. 14. In step 11), glass is used as the non-magnetic material, and in step V), glass is used as the non-magnetic material in step 11.
13. The method of manufacturing a magnetic head according to claim 11 or 12, characterized in that a glass having a softening temperature lower than that of the glass used in claim 11 or claim 12 is used. 15. The metal magnetic film deposited in the step +V) or step H) is made of an amorphous magnetic alloy, and the metal magnetic film deposited in the step
15. The method of manufacturing a magnetic head according to claim 11, wherein in step ) or step (iv), the non-magnetic material is filled at a temperature lower than the crystallization temperature of the amorphous magnetic alloy. 16. The magnetic head according to claim 13, wherein in step I), the second groove is formed to form a predetermined azimuth angle θ with respect to the end face of the large block. manufacturing method.