JPS5954904A - capacitive strain gauge - Google Patents
capacitive strain gaugeInfo
- Publication number
- JPS5954904A JPS5954904A JP16489382A JP16489382A JPS5954904A JP S5954904 A JPS5954904 A JP S5954904A JP 16489382 A JP16489382 A JP 16489382A JP 16489382 A JP16489382 A JP 16489382A JP S5954904 A JPS5954904 A JP S5954904A
- Authority
- JP
- Japan
- Prior art keywords
- strain gauge
- capacitive strain
- electrode
- wire
- capacitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明はひずみゲージに係り、特に、高温、腐食環境下
の大きいひずみを測定するに好適な容量型ひずみゲージ
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a strain gauge, and particularly to a capacitive strain gauge suitable for measuring large strains in high-temperature, corrosive environments.
従来の容量型ひずみゲージは第１図のように２枚の半径
の異なる弓形板に固定された平板の電極の電気容量を検
出する方法となっておシ、電極間には：空間育成けなけ
ればならない。したがって、□
空間が必要セ菖ること及び導電性あ環境一体茹で使用す
ることはセきなかった。ｊた、’ｉｉ媒採の温度変化に
よ諷靜電ｉ量への影響が非常−大きく、ひずみの測定精
度を著しく低下させていた。Conventional capacitive strain gauges detect the capacitance of flat electrodes fixed to two arcuate plates with different radii, as shown in Figure 1.A space must be created between the electrodes. Must be. Therefore, it was not possible to use boiling in a conductive environment because it requires space. In addition, temperature changes in the medium have a very large effect on the amount of electromagnetism, and the accuracy of strain measurement has been significantly reduced.
ピ発明の目的５
本発明の目的はひずみゲージを取シま〈環−媒体の変化
に対して受ける影響が少なく、かつ、設置痴容易なひず
みゲージを提供するにある。OBJECT OF THE INVENTION 5 It is an object of the present invention to provide a strain gauge that is less affected by changes in the ring and medium in which the strain gauge is mounted, and that is easy to install.
〔発明の概要〕 一本発
明の要”点は□セラミックスを介して細い管に埋込まれ
た金−線が管も伸縮に良く追従すること金利用し、細□
い線状の電極をセラミックスを介して細い管に密封し、
そ糺を被測定物□に貼付けて、環境媒体の電気的影響を
さけ、かつ、補償−ｉを設けて温度の：影響から省ぬが
れるにお暮。[Summary of the Invention] One key point of the present invention is that the gold wire embedded in a thin tube via ceramics follows the expansion and contraction of the tube well.
A thin wire-shaped electrode is sealed in a thin tube via ceramics,
Attach the adhesive to the object to be measured □ to avoid the electrical influence of the environmental medium, and provide compensation to avoid the influence of temperature.
〔発明の実□施例）”” ” ” ’以下・
本発明０−実施例を第２図・第３．図及び・・、、、。[Practice of the invention □Example] ”” ” ” 'The following:
The present invention 0-Embodiment is shown in Figures 2 and 3. Figures and...
第４図によシ説明する。 ′
並行へ二対の耐熱ｉ属からなる電極ＩＡ′び２゛ □−
□は線間面積を大きくすやため、ベローズ状に曲げられ
、取付は板６に近い位置の被覆管５内部にセ１１
ラミックスフで汚−ルドされる。はぼ、同じ形状の他の
一対の電極３及び４が電極１及び２の近傍に直交する方
向に同様に被覆管６内にセラミックスでモールドされる
。電極線１． 、＆、び４の一一ハ、シールド線９及び
１１に接続し、電極線２ｉび３゛０一端は同じ′コ′ド
ー１０に接臀され６・被覆管５は取付は板９竺固定され
慢取付は板９は被。This will be explained with reference to FIG. ′ Two parallel pairs of electrodes IA′ and 2′ □−
□ is bent into a bellows shape in order to increase the area between the lines, and the inside of the cladding tube 5 at a position close to the plate 6 is contaminated with ceramic sulfur. Another pair of electrodes 3 and 4 having the same shape are similarly molded with ceramic inside the cladding tube 6 in a direction orthogonal to the vicinity of the electrodes 1 and 2. Electrode wire 1. , &, and 4 are connected to the shield wires 9 and 11, and one end of the electrode wires 2i and 3 is connected to the same cord 10. 6. The cladding tube 5 is attached to the plate 9 and fixed. For lazy installation, plate 9 is covered.
測定物８咳その周囲を（例えばスヂット溶接等で）貼付
けられる。今、被測定物８に第２図の水平方向に力が作
用し、かつ、高温ふん囲気中に・置か、れた場合を考え
る。取付は板６及び被覆管５は固定部を介して、また管
内部のセラミックス７は被覆管５を介してそれぞれ水平
方向に伸び、同時に、それと直交方向に収縮する。これ
にともないセラミックスにモールドされた電極線１と２
との間隔μ大き、くなシ、電極線３と４の間隔は小さく
なる。The area around the measurement object 8 can be pasted (for example, by strip welding, etc.). Now, let us consider a case where a force is applied to the object to be measured 8 in the horizontal direction as shown in FIG. 2, and the object is placed in a high-temperature atmosphere. The plate 6 and the cladding tube 5 are attached via fixing parts, and the ceramics 7 inside the tube extend horizontally through the cladding tube 5, and at the same time contract in a direction perpendicular thereto. Along with this, electrode wires 1 and 2 molded in ceramics
If the distance .mu. is large, the distance between the electrode lines 3 and 4 becomes small.
：′寓
電極線１と２及び電極線３と４の間の静電容量の−，１
・・１：、ｌ″ｉ′□一覧□ ・・初期値をそれぞれＣ
１ｌ及びＣ３４とし、外力による・・変化量をΔＣｔＴ
ｔ及び、、ＪＣＪ’い温度変化による変化−量をΔＣ１
Ｔｔ及びΔＣ３”４とすれ□ばミ第５′■Ｖｃ＝す回路
によシΔＣＩＰ！を測定することができ、水平方向の外
力による伸びを測定することができる。すなわち、初期
のＣｔｔ及び０Ｍ４″ｆ、はぼ同じに設定しておけば
ΔＣ＋ｔ：ΔＣＩＰ！十ΔＣＩＴ！
ΔＣ３４＝ΔＣ３Ｐ４＋ΔＣ’ ａ′ｒ４．：、ここで
・ΔＣ／４＝−シΔＣ’＠’ｔ、（νはポアソン比）・
Δ、Ｃ，，％’−＝ Δ Ｃ１丁。:' -, 1 of the capacitance between electrode wires 1 and 2 and electrode wires 3 and 4
・・1:, l″i′□List□ ・・Initial value for each C
1l and C34, the amount of change due to external force is ΔCtT
t and JCJ' The amount of change due to temperature change is ΔC1
It is possible to measure ΔCIP! by the circuit where Tt and ΔC3"4 and 5'Vc=, and the elongation due to external force in the horizontal direction can be measured. That is, the initial Ctt and 0M4 ``If f is set almost the same, ΔC+t: ΔCIP! Ten ΔCIT! ΔC34=ΔC3P4+ΔC'a'r4. :, where ΔC/4=-ΔC'@'t, (ν is Poisson's ratio)
Δ, C,, %'-= Δ C1 block.
一方、電極線間と静電容量の間に次の関係があるから
すな？ち、被測定物のひずみ６をプリイジの不平衡電圧
として測定することができ、る。また、素線には従来の
抵粋線型と異なシ１．電気抵抗特性を確保する必要がな
く、良導体？金属、例えば、白金などの延性の大きいも
のを使用できるので、構造物が破壊する以前に断線する
ことはない。On the other hand, isn't there the following relationship between the electrode lines and capacitance? In other words, the strain 6 on the object to be measured can be measured as a Prijsi unbalanced voltage. In addition, the wire has a different type from the conventional resistive wire type. Is it a good conductor without the need to ensure electrical resistance characteristics? Since a highly ductile metal such as platinum can be used, the wire will not break before the structure is destroyed.
第６図は電極線の異なる型状のニ例で櫛形を組合せた形
状となっている。これによれば櫛の歯を結ぶ部分の寸法
を大きくすることができ、るので、さらに、耐久性のあ
るゲージを作やことができる。FIG. 6 shows two examples of different shapes of electrode wires, each having a combination of comb shapes. According to this, it is possible to increase the size of the part where the teeth of the comb are connected, so that a more durable gauge can be manufactured.
第７図は平板から打抜きによ＃）製作する。電極線の一
例で、本方法によれ醪、安定また一定形状の電極線が得
られるので特性の一定したひずみゲージヲ製作すること
ができる。、 。Figure 7 is manufactured by punching from a flat plate. This is an example of an electrode wire, and since electrode wires that are stable, stable, and have a constant shape can be obtained by this method, strain gauges with constant characteristics can be manufactured. , .
本実施例によれば外部環境媒体の、影響を受けない。大
きな変形に対しても破壊しない高温ひずみを測定できる
。According to this embodiment, there is no influence from external environmental media. It can measure high-temperature strain without breaking even under large deformations.
〔発明の効果〕 ・
本発明によれば測定空間の小さい高温環境中にもひずみ
を測定することができる。[Effects of the Invention] - According to the present invention, strain can be measured even in a high temperature environment with a small measurement space.
第１図は従来の容量型高温ひずみゲージの側面図、第２
図は本発明の容量型高温ひずみゲージの半面図、第３甲
は第２図のＩＩＩ−ＩＩ［矢視断面図、第４図は第３図
の電極線の部分拡大図、第５図は本発明の一実施例の電
気回路図、・第６図及び第７図は本発明の他の実施例９
電極形状の平面図でおる。
１．２・・・圭電極線対、３，４・・−逆電極線対、・
５・・・被覆管、６・・・取付は板、７・・・セラミッ
クス、８・・・被測定物、９．１０．１１・・・シール
ド線。
第５国
第４−図
１９−Figure 1 is a side view of a conventional capacitive high-temperature strain gauge, Figure 2
The figure is a half-view of the capacitive high-temperature strain gauge of the present invention, No. 3 is a sectional view taken along the line III-II in Fig. 2, Fig. 4 is a partial enlarged view of the electrode wire in Fig. 3, and Fig. 5 is Electric circuit diagram of one embodiment of the present invention, Figures 6 and 7 are other embodiment 9 of the present invention
This is a plan view of the electrode shape. 1.2...Kei electrode wire pair, 3,4...-reverse electrode wire pair,・
5... Cladding tube, 6... Mounting on plate, 7... Ceramics, 8... Measured object, 9.10.11... Shield wire. 5th Country No. 4 - Figure 19 -
Claims (1)
量の変化量として検出す木容量型ひずみゲージにおいて
、 ・ 前記、被測定物とほぼ等距離で平行に設置される線状の
電極対を設けたことを特徴とする容量型ひずみゲージ。 □ ・２、特許請求の範囲第１
項の記載において、同じ伸縮量に対して、静電容量の変
化量の異なる２対の電極を接近して設けたことを特徴と
する容量型ひずみゲージ。 ′ □
・[Claims] 1. In a wood capacitive strain gauge that is attached to the surface of a measured object to detect the amount of expansion and contraction of the measured object as a change in capacitance: A capacitive strain gauge characterized by a pair of linear electrodes installed in parallel. □ ・2, Claim 1
2. A capacitive strain gauge according to item 1, characterized in that two pairs of electrodes having different amounts of change in capacitance are provided close to each other for the same amount of expansion and contraction. ′ □
・
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16489382A JPS5954904A (en) | 1982-09-24 | 1982-09-24 | capacitive strain gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16489382A JPS5954904A (en) | 1982-09-24 | 1982-09-24 | capacitive strain gauge |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5954904A true JPS5954904A (en) | 1984-03-29 |
| JPH0226723B2 JPH0226723B2 (en) | 1990-06-12 |
Family
ID=15801872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16489382A Granted JPS5954904A (en) | 1982-09-24 | 1982-09-24 | capacitive strain gauge |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5954904A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03160338A (en) * | 1989-11-17 | 1991-07-10 | Hitachi Ltd | Adhesive type capacitive strain gauge |
| WO2001004593A1 (en) * | 1999-07-09 | 2001-01-18 | Tokin Corporation | Capacitive strain sensor and method for using the same |
| JP2009020006A (en) * | 2007-07-12 | 2009-01-29 | Tokai Rubber Ind Ltd | Capacitive sensor |
| CN107014283A (en) * | 2015-11-20 | 2017-08-04 | 通用电气公司 | system and method for monitoring component strain |
-
1982
- 1982-09-24 JP JP16489382A patent/JPS5954904A/en active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03160338A (en) * | 1989-11-17 | 1991-07-10 | Hitachi Ltd | Adhesive type capacitive strain gauge |
| WO2001004593A1 (en) * | 1999-07-09 | 2001-01-18 | Tokin Corporation | Capacitive strain sensor and method for using the same |
| US6532824B1 (en) | 1999-07-09 | 2003-03-18 | Tokin Corporation | Capacitive strain sensor and method for using the same |
| JP2009020006A (en) * | 2007-07-12 | 2009-01-29 | Tokai Rubber Ind Ltd | Capacitive sensor |
| US8451011B2 (en) | 2007-07-12 | 2013-05-28 | Tokai Rubber Industries, Ltd. | Electrostatic capacity-type sensor |
| CN107014283A (en) * | 2015-11-20 | 2017-08-04 | 通用电气公司 | system and method for monitoring component strain |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0226723B2 (en) | 1990-06-12 |
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