JPS5956743U - Wafer transfer device - Google Patents
Wafer transfer deviceInfo
- Publication number
- JPS5956743U JPS5956743U JP15213082U JP15213082U JPS5956743U JP S5956743 U JPS5956743 U JP S5956743U JP 15213082 U JP15213082 U JP 15213082U JP 15213082 U JP15213082 U JP 15213082U JP S5956743 U JPS5956743 U JP S5956743U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer device
- wafer transfer
- shafts
- drive device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、従来のウェハ搬送装置の斜視構成図１、第２
図は、本考案によるウェハ搬送装置の一実施例を示す斜
視構成図である。
２０ａ、２０ｂ・・・・・・軸、２１・・・・・・駆動
装置、２２・・・・・・ベルト。FIG. 1 is a perspective view of a conventional wafer transfer device.
FIG. 1 is a perspective configuration diagram showing an embodiment of a wafer transfer device according to the present invention. 20a, 20b... shaft, 21... drive device, 22... belt.
Claims (1)
と、該軸の一方に連接された駆動装置と、該駆動装置で
前記軸の一方に巻取り可能、かつ、自身の復元力で前記
軸の他方に巻戻し可能なアウトガス量が少ない耐熱材料
で形成されたベルトとで構成したことを特徴とするウェ
ハ搬送装置。 ２ 前記ベルトを、コンスタントバネで形成した実用新
案登録請求の範囲第１項記載のウェハ搬送装置。[Claims for Utility Model Registration] 1. A shaft rotatably disposed on both sides of the wafer in the transport direction, a drive device connected to one of the shafts, and a wafer wound on one of the shafts by the drive device. and a belt made of a heat-resistant material with a small amount of outgassing that can be rewound to the other side of the shaft by its own restoring force. 2. The wafer transport device according to claim 1, wherein the belt is formed of a constant spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15213082U JPS5956743U (en) | 1982-10-08 | 1982-10-08 | Wafer transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15213082U JPS5956743U (en) | 1982-10-08 | 1982-10-08 | Wafer transfer device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5956743U true JPS5956743U (en) | 1984-04-13 |
Family
ID=30336930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15213082U Pending JPS5956743U (en) | 1982-10-08 | 1982-10-08 | Wafer transfer device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5956743U (en) |
-
1982
- 1982-10-08 JP JP15213082U patent/JPS5956743U/en active Pending
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